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中国物理学会期刊

基于光瞳像差的标准球面镜头设计与误差分析

CSTR: 32037.14.aps.75.20251651

Design and measurement error analysis of transmission sphere based on pupil aberration theory

CSTR: 32037.14.aps.75.20251651
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  • 高端光学制造对光学部组件的面形和波像差提出了极高要求, 菲索干涉仪是光学精密测量领域重要的高精度、高灵敏度计量仪器, 标准球面镜头是其实现球面元件面形、光学镜头波像差高精度测量的关键核心器件, 在测量范围内尽可能降低其引入的测量误差是极具挑战性的. 本文从球面干涉测量误差的产生机理出发, 首次建立了光瞳像差与回程误差的理论模型, 揭示了镜头设计参数和测量对象对光瞳像差的底层作用机制. 设计了一款6inF7.2标准球面镜头, 通过仿真分析验证了理论模型的正确性. 针对该款镜头进行公差分析和研制组装, 通过镜间距主动补偿实现了透射波前离焦项0.03λ, 总体波前\rm PV=0.32\lambda, 优于公差预期. 开展多条纹回程误差测量实验, 验证了光瞳像差与回程误差的相关性. 本文提出的设计理论有助于深入理解标准球面镜头像差对球面干涉测量误差的作用机理, 为该类镜头制定合理的设计目标和高效的优化策略, 并有望为超高精度、非球面等极端测量场景提供专用化解决方案.

     

    High-end optical manufacturing imposes stringent demands on the irregularity and wavefront error of optical components. The Fizeau interferometer serves as a critical instrument in optical precision metrology, offering high accuracy and sensitivity. The transmission sphere is the key component for achieving high-precision measurement of the surface figure of spherical elements and the wavefront error of optical lenses, fulfilling the dual role of generating the reference wavefront and collecting the test wavefront. On one hand, it must provide a highly precise transmitted wavefront to suppress cavity-induced measurement error. On the other hand, it should minimize errors arising from the uncommon optical path between the reference and test wavefronts. Existing research basically addresses the design challenge of the transmission sphere using isolated metrics-such as wavefront slope, F^\primeC error, and mapping geometry. Owing to the lack of in-depth understanding of the underlying measurement error mechanism, lens design relies on conventional optimization approaches that aim for comprehensive correction of multiple aberrations. This strategy not only increases design complexity but also reduces cost-effectiveness in engineering due to over-design. Therefore, this paper analyzes the origin of measurement error in Fizeau interferometry and establishes a theoretical model linking pupil aberration and retrace error. It reveals the fundamental mechanism by which the F# of the transmission sphere and the radius of curvature of the test object influence pupil aberration, thereby affecting retrace error. A 6-inch F/7.2 transmission sphere is designed, and simulation analyses are performed to validate the relationship among imaging aberrations, intrinsic pupil aberrations, and total pupil aberrations. The correlation between pupil aberrations and retrace errors across different test objects is also demonstrated, with the observed trend closely aligned with stop-shift effects at the theoretical level. Tolerance analysis and prototype assembly are carried out for this lens. By actively compensating the lens spacing, a transmitted wavefront with a defocus term of 0.03λ and an overall wavefront PV of 0.32λ is achieved, exceeding tolerance expectations. Retrace error measurement experiments are conducted by shifting the test objects to generate 10 interference fringes. The retrace error is obtained by subtracting the null measurement result from the non-null measurement result. The test groups are as follows: 1) measurement of a convex surface (R=100\;\mathrmmm) using the self-developed 6-inch F/7.2 transmission sphere; 2) measurement of a convex surface (R=100\;\mathrmmm) using a commercial 4-inch F/3.3 transmission sphere; 3) measurement of a concave surface (R=27.61\;\mathrmmm) using a commercial 4-inch F/3.3 transmission sphere. Based on the theoretical analysis and simulation results, pupil distortion is found to contribute to coma in the retrace error. Statistical analysis of the total pupil distortion coefficient and the Zernike coefficient of the coma component in the retrace error for each test group show strong consistency, confirming that the proposed design methodology grounded in pupil aberration theory can accurately predict retrace errors introduced by transmission spheres. In summary, the design theory proposed in this paper advances the understanding of the interrelationships among imaging aberration, pupil aberration of the transmission sphere, and the corresponding cavity and retrace errors in spherical surface metrology. It facilitates the establishment of reasonable design objectives and efficient optimization strategies for transmission spheres. Moreover, it offers a potential pathway for extreme measurement scenarios such as ultra-high precision and aspheric testing by enabling pupil aberration compensation tailored to specific test objects.

     

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