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中国物理学会期刊

双凹球面空气微透镜的超聚焦优化研究

Optimization of Superfocusing in Double-concave Spherical Air-Microlenses

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  • 本文针对背照射中红外焦平面阵列的高效光耦合需求,提出并数值研究了一种工作于中红外波段的双凹型硅基空气微透镜。该设计突破了传统凸透镜的范式,通过将凹面空气腔嵌入高折射率硅介质中,利用界面处的强折射率差实现超紧致光束聚焦。我们采用时域有限差分法系统分析了前表面曲率半径、后表面曲率半径及空气腔厚度等关键透镜结构参数对焦距、焦深、焦斑尺寸和焦点光强等关键聚焦性能的影响。对于波长4微米的照明光,最小聚焦尺寸可低至0.83微米(约为硅介质内有效波长λeff的71%)。本研究揭示了双凹型空气微透镜中各参数的调控规律,证实了这种空气微透镜的“硅内聚焦”架构能够很好地契合微缩化红外探测器的物理形态,在提升器件填充因子方面展现出巨大潜力,为发展高性能、易集成的片上红外光学系统提供了新颖且可行的解决方案。

     

    To address the demand for efficient optical coupling in back-illuminated mid-infrared focal plane arrays (FPAs), this paper numerically investigates a double-concave silicon-based air-microlens operating in the 3-5 μm wavelength range. Unlike conventional convex lenses, the proposed design embeds a concave air cavity within a high-refractive-index silicon medium, leveraging the strong refractive index contrast (Δn≈2.42) to achieve tight beam focusing. Using the finite-difference time-domain (FDTD) method, we analyze the influence of the front curvature radius, rear curvature radius, and air cavity thickness on key focusing metrics.Physical mechanism analysis reveals that the double-concave architecture decouples the wavefront phase modulation process. Specifically, the front surface dominates the preliminary focusing, while the rear surface acts as a near-field phase corrector to suppress spherical aberrations and optimize the wavevector matching of high-frequency evanescent waves. For an illumination wavelength of 4 μm, the minimum focal spot size can reach 0.83 μm (approximately 71% of the effective wavelength λeff within the silicon medium). Based on these findings, we extract two typical design criteria to accommodate practical engineering trade-offs: a “minimum focal spot priority” design tailored for high-resolution arrays, and a “maximum depth of focus priority” design for systems requiring high thermo-mechanical assembly tolerances. The proposed “in-silicon focusing” architecture naturally fits the physical configuration of miniaturized infrared detectors, demonstrating significant potential for enhancing the fill factor of on-chip optoelectronic systems.

     

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