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中国物理学会期刊

气压对低磁场密度峰值中Trivelpiece-Gould波能量沉积特性的影响

CSTR: 32037.14.aps.75.20260500

Impact of neutral gas pressure on Trivelpiece-Gould wave energy deposition characteristics in low magnetic field density peak

CSTR: 32037.14.aps.75.20260500
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  • 揭示低磁场密度峰值现象背后的物理机制, 对实现简洁、低成本及高性能射频等离子体源至关重要. 本文借助温等离子体介电张量模型和带电粒子温度各向异性假设, 利用磁化等离子体中电磁波本征模色散关系, 理论分析了低磁场(B0 ≤ 100 G, 1 G = 10–4 T)、中等密度(n0 = 1 × 1012 cm–3)、低气压(p ≤ 5 mTorr, 1 mTorr = 0.133 Pa)条件下螺旋波与Trivelpiece-Gould(TG) 波之间的波数耦合关系及两种波前三个角向模 (m = 0, –1, +1)的能量沉积特性. 研究结果表明: 在ω/(2π) = 13.56 MHz、Ti,z/Te,z = 0.1参量条件下, 气压变化对螺旋波与TG 波之间的模式耦合特性、模式耦合层位置及横向波数幅值具有显著影响; 在低气压情形下, 随着气压的增大, 螺旋波能量沉积减弱而TG波能量沉积增强; TG波 m=0模在整个能量沉积中扮演主导作用, 存在一个气压阈值pcr, p < pcr时朗道阻尼主导能量沉积, p > pcr时碰撞阻尼主导能量沉积.

     

    Full understanding of the basic physical mechanism behind the low magnetic field density peak phenomenon is crucial for realizing a simple, low-cost, and high-performance radio frequency helicon plasma source. Although research on this nonlinear phenomenon has continued for many years, there is still no unified explanation, and further theoretical and experimental research is needed.
    As a further theoretical attempt to clarify the basic physical picture behind the low magnetic field density peak phenomenon, this paper investigates the influence of neutral gas pressure on Trivelpiece-Gould (TG) wave energy deposition characteristics in this context. Within the typical parameter range of low magnetic field density peak phenomenon, i.e. , wave frequency ω/(2π) = 13.56 MHz, low magnetic field (B0 ≤ 100 G, 1 G = 10–4 T), moderate plasma density (n0 = 1 × 1012 cm–3), low neutral gas pressure (p ≤ 5 mTorr, 1 mTorr = 0.133 Pa), ratio of axial ion temperature to axial electron temperature (Ti,z /Te,z = 0.1), by employing the general warm plasma dielectric tensor model and the eigenmode dispersion relationship of electromagnetic waves in magnetized plasma, the mode coupling characteristic between helicon and Trivelpiece-Gould (TG) waves, and the power deposition properties of helicon and TG waves for the first three azimuthal modes (m = 0, –1, +1) are theoretically analyzed. Analytical results suggest that: 1) The intensity of neutral gas pressure significantly impacts the mode coupling between the electromagnetic and electrostatic branches of Whistler waves, as well as between the helicon wave and TG wave. It also alters the position of the mode coupling surface (MCS) and the amplitude of the perpendicular wave numbers of helicon and TG waves. 2) For the first three azimuthal modes (m = 0, –1, +1) of helicon and TG waves, under low-pressure conditions, as pressure increases, energy deposition by the helicon wave gradually weakens while that by the TG wave increases; the m = +1 mode dominates energy deposition for the helicon wave, while the m = 0 mode dominates for the TG wave. As pressure increases, the peak energy deposition regions for both the m = +1 mode of the helicon wave and the m = 0 mode of the TG wave shift toward the edge of the plasma column. The m = 0 mode of TG wave plays a dominant role in overall energy deposition, with collisional and Landau damping dominating at different electron temperature ranges. As pressure increases, collisional damping induced energy deposition intensifies until a critical pressure threshold is exceeded beyond which collisional damping becomes the absolutely dominant mechanism. 3) For the m = 0 mode of the TG wave, under low neutral gas pressure conditions, energy deposition resulting from collisional and Landau damping peaks at a magnetic field of approximately 50 G and an electron temperature of a few electron-volts. These results provide theoretical support for understanding the low magnetic field density peak phenomenon and offer new evidence for a more comprehensive understanding of the helicon discharge process.

     

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