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中国物理学会期刊

基于散射截面模型修正的固体表面二次电子发射蒙特卡洛模拟

Monte Carlo simulation of secondary electron emission from solid surfaces based on a modified scattering cross-section model

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  • 二次电子发射(SEE)是固态物理学、表面物理学和材料科学中的关键物理现象,在能谱仪、探测器、电子显微镜等仪器设备中有重要应用。研究提出一种适用于多种应用场景的二次电子产额(SEY)模拟方法,旨在实现实际工程场景中固体表面 SEY 的有效预测。 基于弹性散射、 非弹性散射、 界面透射三类电子与物质互作用过程, 应用 Geant4 仿真平台建立基于蒙特卡洛方法的 SEE 计算模型。 引入电子截止能量和材料表面势垒等参数提高仿真精度,仿真获得的归一化结果表明,在 1.5 倍最可几能量的初始电子能量范围内, 该模型仿真与实验结果差异小于 10%。 依据材料特性设置不同的仿真参数特征值,并用于铝、硅、氧化铝等 6种固体材料的 SEY 计算,仿真与实验结果一致性良好。针对实际工程中表面具有功能镀层和微观结构的样品进行 SEY 模拟, 仿真与实验结果在趋势上具有一致性。 其中,硅基氧化铝和氧化镁镀层厚度小于 3 nm 时,镀层厚度增加会使得 SEY 逐渐增加并趋于饱和。针对微观结构的计算结果表明, 氧化铝和氮化钛表面微观结构能够显著降低 SEY,随微观结构深宽比和表面孔隙率增加 SEY 逐渐降低并趋于饱和,且仿真和实验结果的 SEY 最大值平均差异低于 10%。 该模型在涉及 SEE 过程的工程场景中具有潜在应用价值。

     

    Secondary electron emission (SEE) is a fundamental physical phenomenon in solid-state physics and surface physics, playing critical roles in electron microscopes, energy spectrometers, electron multipliers and many vacuum-based scientific instruments. Nevertheless, in some engineering scenarios where electron avalanche multiplication occurs, SEE brings severe reliability risks for engineering systems such as particle accelerators and high-power microwave devices, where it may trigger multipactor discharge, electron cloud effect and electrostatic discharge, eventually degrading or even destroying functional hardware. Conventional experimental characterization of SEE yield (SEY) suffers from long testing cycles and high costs; moreover, it is difficult to quantitatively decouple and evaluate the contributions from complex surface modifications in practical engineering scenarios. Therefore, reliable numerical simulation tools are highly demanded to predict SEY for diverse materials and surface configurations. In this work, we presents a simulation method for SEY calculation that is adaptable to various application scenarios, specifically designed to model strategies for either suppressing or enhancing SEY on solid surfaces in practical engineering contexts. Based on three fundamental physical processes in electron–matter interactions including elastic scattering, inelastic scattering, and interface transmission, this approach integrates the Moller cross-section model, a single-scattering model, and an interface transmission model to establish the SEE process model. Using the Geant4 particle simulation platform, a Monte Carlo (MC) simulation method for SEE prediction has been developed. The SEY values are simulated for different model parameters, material types, and surface structures, and the results are compared with experimental data. Two key physical parameters, the secondary electron cutoff energy (Ec) and surface barrier energy loss (EL), are introduced and calibrated to improve low-energy simulation accuracy within the incident electron energy range from 50 eV to 1000 eV. By tuning Ec and EL, the calculation accuracy of the SEE model has been significantly improved. After normalization, in the low-energy regime (less than 1.5 times the most probable energy), the SEY discrepancy between simulation and experimental results remains within 10%. Furthermore, the simulated SEY values for both compound solids (including Al2O3, MgO, SiO2, TiN) and elemental solids (including Al, Si) show well agreement with public experimental data. SEY calculations are also performed for typical SEY modulation methods including nanoscale surface coating engineering and surface microstructure engineering. The simulated trends closely align with those observed experimentally. Specifically, for coating thicknesses below 10 nm, increasing thickness causes the surface SEY to transition from the substrate level toward that of the thin film material. For the Si substrates coated with Al2O3 and MgO, when the thickness increases from 0 to 3 nm, the maximum SEY rises from 1.67 (bare Si) to 4.36 and 5.76, respectively. Periodic cylindrical and square pore microarray structures effectively suppress SEY for both Al2O3 and TiN samples; SEY decreases and becomes saturated with increasing aspect ratio and surface porosity. Across all tested microstructure samples, the average deviation of maximum SEY between simulation and experimental measurements remains below 10 %. Merely, limited by idealized geometry setup, the current model does not incorporate secondary micro-roughness introduced by physical etching, which partly accounts for deviations observed at high incident-electron energies. The simulation method achieves acceptable computational efficiency, with the average computing time per energy point below 30 seconds. It supports flexible configuration for bulk materials, nanometer-thick films and complex micro-geometries. This validated Geant4-based SEE MC model provides an effective numerical approach for SEE-related engineering analysis and surface modification design, and showing promising application prospects for SEY prediction including multipactor suppression and secondary electron effect mitigation.

     

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