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中国物理学会期刊

考虑基区载流子动态输运修正的结隔离LDMOS寄生三极管高精度SPICE模型

A High-Precision SPICE Model for Parasitic Bipolar Transistors in Junction-Isolated LDMOS Incorporating Base Carrier Dynamic Transport Correction

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  • 针对结隔离LDMOS器件中寄生三极管建模的挑战,本文提出了一种基于基区载流子动态输运修正的高精度SPICE模型。该模型创新性地引入基区载流子动态输运修正的k因子和版图几何参数,能够有效解决传统葛潘模型在上管续流工况下电流虚高和物理描述冗余问题。实验验证了上、下管续流工况下的 LDMOS 器件寄生三极管模型,结果显示模型在各工况下RMS误差均低于5%,表现出高精度和稳定性。研究进一步表明,k因子能够动态反映双向载流子注入和基区有效宽度变化,版图几何参数则准确捕捉多指拓扑及基极电阻分布对电流均匀性的影响。在工程应用方面,该模型可用于高精度功率集成电路设计、优化续流路径及降低导通损耗,为BCD工艺下功率芯片的可靠性设计提供关键技术支撑。本研究不仅解决了葛潘模型的物理局限性,还为功率器件的高精度仿真和工程优化提供了可操作的方法和技术基础。

     

    The rising demand for high-performance computing has increased the need for low-voltage, high-current power management. In junction-isolated LDMOS devices, internal isolation structures inherently generate parasitic NPN and PNP bipolar junction transistors, which can degrade device switching performance and reliability. Under high-side (HS) conditions, conventional Gummel-Poon models often overestimate parasitic currents due to their inability to accurately capture the non-equilibrium carrier transport associated with effective base-width modulation and dual-injection effects, causing underestimation of conduction losses, overestimation of reverse recovery charge, and deviations in stress evaluation. To address this, a high-precision SPICE compact model incorporating a dynamic base transport correction factor is proposed to accurately capture the carrier transport behavior of parasitic transistors under high-injection conditions. The model analyzes the differences in carrier transport and recombination mechanisms under low-side (LS) and HS conditions and introduces a k-factor to dynamically modify the base transport coefficient. The k-factor accounts for the nonlinear widening of the effective base width and enhanced recombination under dual injection in HS conditions. Layout-dependent geometric parameters are also included in the model topology to quantify multi-finger current crowding and parasitic resistance, ensuring accurate current distribution in multi-finger LDMOS structures and improving scalability. Experimental validation on wafer-level LDMOS devices under diverse bias conditions shows that the model achieves RMS errors below 5% for key terminal currents (ID, IISO, IS), demonstrating significantly improved accuracy compared with the conventional GP model, which exhibits RMS errors exceeding 17% under HS conditions. In summary, the proposed SPICE compact model provides a physically based and scalable approach for accurately describing parasitic transistor behavior in junction-isolated LDMOS devices, enabling more accurate prediction of power loss, reverse-recovery behavior, and electrical stress for BCD power IC design.

     

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