搜索

x
中国物理学会期刊

一种基于JFET区非对称P型注入的用于改善RON-DIBL权衡并优化开关性能的新型4H-SiC MOSFET

A Novel 4H-SiC MOSFET Based on Asymmetric P-Type Implantation in the JFET Region for an Improved RON-DIBL Trade-off and Enhanced Switching Performance

PDF
导出引用
  • 针对4H-SiC MOSFET中漏致势垒降低效应(drain-induced barrier lowering,DIBL)抑制与导通电阻相互制约的问题,提出一种JFET区非对称P型注入MOSFET(AJPI-MOSFET)。该结构仅在部分JFET宽度内设置与P阱连续的P型延伸区,在同一元胞内形成共栅、共源的短沟道支路MS和P型延伸支路ME。MS保留宽的低阻电流窗口,ME利用反偏P/N结耗尽区重构JFET电势并减弱栅漏耦合,从而实现导通与电场调控的功能分区。TCAD结果表明,当P型区覆盖比例为1/4、注入深度为0.25 μm、浓度为5×1016 cm-3时,器件导通电阻RON为15.05 mΩ,DIBL系数kDIBL为1.206 mV/V。与常规垂直双扩散MOSFET(vertical double-diffused MOSFET,VDMOS)相比,RON仅增加1.5%,kDIBL、米勒电荷QGDRON·QGD分别降低17.2%、45.3%和44.5%;与JFET中心P+注入的PB结构相比,RONQGDRON·QGD分别降低7.3%、33.3%和38.2%,而kDIBL仅高4.3%。结果表明,AJPI-MOSFET通过非对称P型注入实现了导电通道与漏端电场的协同调控,在仅付出较小导通电阻代价的同时,有效抑制了DIBL并改善了高频开关性能。

     

    A novel 4H-SiC MOSFET with asymmetric P-type implantation in the JFET region (AJPI-MOSFET) is proposed to improve the trade-off among on-state resistance, drain-induced barrier lowering (DIBL), and switching performance. By extending one P-well into only part of the JFET region, two laterally coupled local MOS branches sharing common source, gate, drain, and JFET/drift regions are formed. The short-channel MOS branch (MS) has a shorter effective channel and a wider current path, whereas the P-extended MOS branch (ME) has a longer effective channel and a higher threshold voltage. During turn-on, MS first establishes the main low-resistance current path, and ME subsequently participates in conduction as the gate voltage increases. Meanwhile, the reverse-biased P/N junction associated with ME expands its depletion region into the JFET region, redistributes the equipotential lines, and suppresses the penetration of the drain electric field toward the channel. The proposed structure therefore preserves conduction capability through MS while improving channel electrostatic control and reducing gate-drain coupling through ME. The influences of the P-type implantation coverage, depth, and concentration on the static and dynamic characteristics are investigated by two-dimensional TCAD simulations. The product of the on-state resistance (RON) and DIBL coefficient (kDIBL), RON·kDIBL, and the product of RON·and the Miller charge (QGD), RON·QGD, are employed to evaluate the conduction-DIBL trade-off and high-frequency performance, respectively. The optimized AJPI-MOSFET has a P-type JFET coverage ratio of 1/4, an implantation depth of 0.25 μm, and a doping concentration of 5×1016 cm-3. Its RON and kDIBL are 15.05 mΩ and 1.206 mV/V, respectively. Compared with the conventional vertical double-diffused MOSFET (VDMOS), the optimized device increases RON by only 1.5% while reducing kDIBL by 17.2%. Compared with the center-PB MOSFET, it reduces RON by 7.3% while maintaining a comparable kDIBL. Although the asymmetric electric-field distribution results in a lower breakdown voltage of 1497 V, the device still meets the 1200 V design target. The simulated conduction-band profiles show that the barrier lowerings in MS and ME are 18.45 and 12.63 meV, respectively, compared with 19.14 meV in the conventional VDMOS. The smaller barrier variation in ME confirms the electric-field protection provided by the asymmetric P-type region, while the current-density distributions verify the sequential establishment of the MS and ME current paths. The reduced gate-drain coupling also shortens the Miller-charge interval and improves the RON·QGD figure of merit. Under an 800 V bus voltage and a load current of approximately 33.3 A, the optimized AJPI-MOSFET exhibits EON and EOFF values of 266.84 and 166.22 μJ, respectively. Its ESW is 433.06 μJ, which is 2.0% and 2.1% lower than those of the conventional and center-PB MOSFET, respectively. These results demonstrate that asymmetric partial-width P-type implantation provides an effective approach to coordinating the low-resistance current path with the electric-field-control region, thereby improving the conduction-DIBL trade-off and switching performance of planar-gate 4H-SiC MOSFETs.

     

    目录

    /

    返回文章
    返回