Abstract: In this paper， Monte Carlo method was used to simulate the motion of ions in the cathode fall zone of glow discharge. Energy distributions and angle distributions at different pressures and voltages are presented. The simulations are based on two main scattering processes of charge transfer and elastic scattering. Either the ion energy dependence or independence of collision cross-sections is taken into account. For elastic scattering, the potential interaction and hard-sphere models are considered. The parameter Pdc has a great influence on the energy distribution, but the angle distribution of ions is not sensitive to discharge parameters. Simulation results obtained by different models have been compared and discussed. The model that includes charge transfer and potential interaction scattering processes and is based on the dependence of collision cross-section on the ion energy is obviously the best.

Keywords: 
• glow discharge /
• plasma sheath /
• Monte Carlo simulation