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中国物理学会期刊

FIB快速加工纳米孔点阵的新方法

CSTR: 32037.14.aps.54.582

Fast fabrication of large-area nanopore arrays by FIB

CSTR: 32037.14.aps.54.582
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  • 纳米尺度的点阵在纳米器件和基础科学研究方面都具有非常重要的应用.目前普遍采用的聚焦离子束和电子束曝光技术可以很方便的在衬底上加工纳米量级的微细结构,但大面积的图形加工过程需要花费太多的机时.介绍一种利用设计图形BMP文件的像素点阵和实际加工区域之间的匹配关系,通过聚焦离子束加工获得所需要的纳米孔点阵的新方法.采用这种方法可以在短时间内获得大面积的纳米点阵结构.

     

    Fabrication of nanopore arrays is of great importance in nanodevices manufacture and basic scientific research. Focused ion beam (FIB) and electron beam lithography (EBL) have been widely used for fabrication of nanostructures.However, it takes very long time to fabricate nanostructure patterns of large area. In this p aper we report a novel fast fabrication method for nanopore arrays of large area by FIB. Each pixel of predesigned BMP file is regarded as a fabrication dot. B y matching the pixel of the presigned BMP pattern with the required fabrication area, nanopore arrays of large area can be fabricated in a very short time.

     

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