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金属有机物化学气相沉积法生长Ga2(1-x)In2xO3薄膜的结构及光电性能研究

杨帆 马瑾 孔令沂 栾彩娜 朱振

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金属有机物化学气相沉积法生长Ga2(1-x)In2xO3薄膜的结构及光电性能研究

杨帆, 马瑾, 孔令沂, 栾彩娜, 朱振
cstr: 32037.14.aps.58.7079

Structural, optical and electrical properties of Ga2(1-x)In2xO3 films prepared by metalorganic chemical vapor deposition

Yang Fan, Ma Jin, Kong Ling-Yi, Luan Cai-Na, Zhu Zhen
cstr: 32037.14.aps.58.7079
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  • 采用金属有机物化学气相沉积(MOCVD)法在蓝宝石(0001)衬底上制备出了Ga2(1-x)In2xO3(x=01—09)薄膜,研究了薄膜的结构、电学和光学特性以及退火处理对薄膜性质的影响.测量结果表明:当In组分x=02时,样品为单斜β-Ga2O3结构;x=05的样品,薄膜呈现非晶结构,退火处理后薄膜结构得到明显的改善
    Ga2(1-x)In2xO3(x=01—09) thin films were prepared on α-Al2O3 (0001) substrates by metalorganic chemical vapor deposition (MOCVD). The structure, the optical and electrical properties as well as the effect of annealing on the properties of the films were investigated in detail. The results indicate that the film deposited with composition x=02 was polycrystalline with β-Ga2O3 structure, the film with x=05 was amorphous and transformed into body-centered cubic (bcc) structure of In2O3 with a preferred orientation of (222) after annealing. For x=08, the obtained film showed bcc structure of In2O3 and the crystalinity was improved after annealing treatment. The average transmittance for the films in the visible range was over 85%. The band-gap of the Ga2(1-x)In2xO3 films can be suitably tuned from 376 to 443 eV by controlling the gallium content and it is increased obviously by annealing.
    • 基金项目: 国家自然科学基金(批准号: 50672054)资助的课题.
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  • 文章访问数:  10558
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  • 被引次数: 0
出版历程
  • 收稿日期:  2008-10-22
  • 修回日期:  2009-02-16
  • 刊出日期:  2009-05-05

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