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采用热蒸发和电子束蒸发两种沉积方式分别沉积了相同厚度的SrF2-CaF2 (比例为1∶1) 的混合物薄膜，对其物理和光学特性进行了研究，并定量地给出了其在红外波段的光学常数，填补了这一数据的空白. 同时提供了一种获得不同低折射率薄膜的方法.文中还以该比例的混合物作为低折射率材料，研制出具有很好的光学性能的长波红外宽光谱增透膜.
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关键词:
- SrF2-CaF2混合物薄膜 /
- 表面形貌 /
- 红外光学特性 /
- 宽光谱增透膜
The mixed SrF2-CaF2 thin films with the same thickness were deposited by the techniques of resistant evaporation and electron beam evaporation respectively. The physical and infrared optical properties of the thin films were investigated. The optical constants in the infrared region were determined quantitatively which fills the gap of these data. At the same time, we provided a method to obtain gradient index films. We also used the mixed SrF2-CaF2 with a proportion of 1∶1 as the lower index material to deposit multilayer coatings. A broadband antireflection coatings with high optical performance was developed.-
Keywords:
- mixed SrF2-CaF2 thin films /
- surface morphology /
- infrared optical properties /
- broadband antireflection coatings
[1] ［1］Pellicori S F 1984 Thin Solid Films 113 287
[2] ［2］James D T, Andrew R M 1990 Thin Solid Films 191 47
[3] ［3］Evgeny N K, Elena V K, Vadim N P 2004 Proc. SPIE 5506 75
[4] ［4］Gu P F, Zheng Z R, Zhao Y J, Liu Xu 2006 Acta Phy. Sin 55 6459 (in Chinese) ［顾培夫、郑臻荣、赵永江、刘旭 2006 物理学报55 6459］
[5] ［5］Chen W L, Gu P F, Wang Y, Zhang Y G, Liu X 2008 Acta Phy. Sin 57 4316 (in Chinese) ［陈为兰、顾培夫、王颖、章岳光、刘旭 2008物理学报 57 4316］
[6] ［6］Su W T, Li B, Liu D Q, Zhang F S 2006 Opti. Instrum. 28 150
[7] (in Chinese) ［苏伟涛、李斌、刘定权、张凤山 2006 光学仪器 28 150］
[8] ［7］Jung Y S 2004 Thin Solid Films 467 36
[9] ［8］Mistrik J 2005 Appl. Surf. Sci. 244 431
[10] ［9］Su W T, Li B, Liu D Q, Zhang F S 2007 Acta Phy. Sin. 56 2541 (in Chinese) ［苏伟涛、李斌、刘定权、张凤山 2007 物理学报 56 2541］
[11] ］Yu T Y, Zhu F R, Liu D Q, Zhang F S 2005 Acta Opt. Sin. 25 171 (in Chinese) ［于天燕、朱福荣、刘定权、张凤山 2005 光学学报 25 171］
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[1] ［1］Pellicori S F 1984 Thin Solid Films 113 287
[2] ［2］James D T, Andrew R M 1990 Thin Solid Films 191 47
[3] ［3］Evgeny N K, Elena V K, Vadim N P 2004 Proc. SPIE 5506 75
[4] ［4］Gu P F, Zheng Z R, Zhao Y J, Liu Xu 2006 Acta Phy. Sin 55 6459 (in Chinese) ［顾培夫、郑臻荣、赵永江、刘旭 2006 物理学报55 6459］
[5] ［5］Chen W L, Gu P F, Wang Y, Zhang Y G, Liu X 2008 Acta Phy. Sin 57 4316 (in Chinese) ［陈为兰、顾培夫、王颖、章岳光、刘旭 2008物理学报 57 4316］
[6] ［6］Su W T, Li B, Liu D Q, Zhang F S 2006 Opti. Instrum. 28 150
[7] (in Chinese) ［苏伟涛、李斌、刘定权、张凤山 2006 光学仪器 28 150］
[8] ［7］Jung Y S 2004 Thin Solid Films 467 36
[9] ［8］Mistrik J 2005 Appl. Surf. Sci. 244 431
[10] ［9］Su W T, Li B, Liu D Q, Zhang F S 2007 Acta Phy. Sin. 56 2541 (in Chinese) ［苏伟涛、李斌、刘定权、张凤山 2007 物理学报 56 2541］
[11] ］Yu T Y, Zhu F R, Liu D Q, Zhang F S 2005 Acta Opt. Sin. 25 171 (in Chinese) ［于天燕、朱福荣、刘定权、张凤山 2005 光学学报 25 171］
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