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A single-phased Ag2O film was deposited on glass substrate by direct-current reactive magnetron sputtering, and was then vacuum thermally annealed at different annealing temperatures (T A) for 1 hour. Effect of the TAon the films microstructure and optical properties was investigated by X-ray diffractometry, scanning electron microscopy and spectrophotometry. The results indicate that Ag nano-scaled particles begin to appear in the annealed Ag2O film at TA= 300 ℃. The Ag content obviously increases with increasing TA, and in particular, Ag2O phase is completely transformed into Ag at T A = 475 ℃. The evolution of the films surface morphology from dense to loose indicates that the diffusion and escape of O atoms from film surface accompanied the thermal decomposition reaction of Ag2O to Ag particles during the vacuum thermal annealing. The changes of the films transmissivity, reflectivity and absorptivity with T A are attributed to the thermal decomposition of Ag2O and the films structure evolution during annealing.
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Keywords:
- Ag2O film /
- thermal annealing temperature /
- microstructure /
- optical properties
[1] Fuji H, Tominaga J, Men L, Nakano T, Katayama H, Atoda N 2000 Jpn. J. Appl. Phys. 39 980
[2] 报 34 1158
[3] Pierson J F, Rousselot C 2005 Surf. Coat. Technol. 200 276
[4] Abe Y, Hasegawa T, Kawamura M, Sasaki K 2004 Vacuum 76 1
[5] Chiu Y, Rambabu U, Hsu M H, Shieh H P D, Chen C Y, Lin H H 2003 J. Appl. Phys. 94 1996
[6] Chuang H J, Ko H W 1989 Proc. Natl. Sci. Counc. China 13 145
[7] Zhang X Y, Pan X Y, Zhang Q F, Xu B X, Jiang H B, Liu C L, Gong Q H, Wu J L 2003 Acta. Phys. Chim. Sin. 19 203 (in Chinese) [张西尧、 潘新宇、 张琦锋、 许北雪、 蒋红兵、 刘春玲、 龚旗煌、 吴锦雷 2003 物理化学学报 19 203]
[8] 郜小勇、 刘 萍、 陈永生、 王海燕、 卢景霄 2005 人工晶体学
[9] Gao X Y, Feng H L, Ma J M, Zhang Z Y,Lu J X, Chen Y S, Yang S E, Gu J H 2010 Physica B 405 1922
[10] Gao X Y, Feng H L, Zhang Z Y, Ma J M, Lu J X 2010 Chin. Phys. Lett. 27 026804
[11] Gao X Y, Feng H L, Ma J M, Zhang Z Y 2010 Chin. Phys. B 9 090701
[12] Zhang Z Y, Gao X Y, Feng H L, Ma J M, Lu J X 2011 Acta Phys. Sin. 60 016110 (in Chinese) [张增院、 郜小勇、 冯红亮、 马娇民、 卢景霄 2011 物理学报 60 016110]
[13] Singh R, Fakhraddin M, Poole K F 2000 Appl. Surf. Sci. 168 198
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[1] Fuji H, Tominaga J, Men L, Nakano T, Katayama H, Atoda N 2000 Jpn. J. Appl. Phys. 39 980
[2] 报 34 1158
[3] Pierson J F, Rousselot C 2005 Surf. Coat. Technol. 200 276
[4] Abe Y, Hasegawa T, Kawamura M, Sasaki K 2004 Vacuum 76 1
[5] Chiu Y, Rambabu U, Hsu M H, Shieh H P D, Chen C Y, Lin H H 2003 J. Appl. Phys. 94 1996
[6] Chuang H J, Ko H W 1989 Proc. Natl. Sci. Counc. China 13 145
[7] Zhang X Y, Pan X Y, Zhang Q F, Xu B X, Jiang H B, Liu C L, Gong Q H, Wu J L 2003 Acta. Phys. Chim. Sin. 19 203 (in Chinese) [张西尧、 潘新宇、 张琦锋、 许北雪、 蒋红兵、 刘春玲、 龚旗煌、 吴锦雷 2003 物理化学学报 19 203]
[8] 郜小勇、 刘 萍、 陈永生、 王海燕、 卢景霄 2005 人工晶体学
[9] Gao X Y, Feng H L, Ma J M, Zhang Z Y,Lu J X, Chen Y S, Yang S E, Gu J H 2010 Physica B 405 1922
[10] Gao X Y, Feng H L, Zhang Z Y, Ma J M, Lu J X 2010 Chin. Phys. Lett. 27 026804
[11] Gao X Y, Feng H L, Ma J M, Zhang Z Y 2010 Chin. Phys. B 9 090701
[12] Zhang Z Y, Gao X Y, Feng H L, Ma J M, Lu J X 2011 Acta Phys. Sin. 60 016110 (in Chinese) [张增院、 郜小勇、 冯红亮、 马娇民、 卢景霄 2011 物理学报 60 016110]
[13] Singh R, Fakhraddin M, Poole K F 2000 Appl. Surf. Sci. 168 198
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