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脉冲等离子体推力器羽流沉积薄膜的结构与光学性质研究

张锐 张代贤 张帆 何振 吴建军

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脉冲等离子体推力器羽流沉积薄膜的结构与光学性质研究

张锐, 张代贤, 张帆, 何振, 吴建军

Structural and optical characterization of film deposited by pulsed plasma thruster plume

Zhang Rui, Zhang Dai-Xian, Zhang Fan, He Zhen, Wu Jian-Jun
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  • 为了研究脉冲等离子体推力器羽流污染特性, 把握脉冲等离子体推力器羽流沉积薄膜性质, 利用质谱仪对推力器羽流残余气体成分进行了分析, 利用红外傅里叶光谱、光电子能谱及紫外可见光分光光度计对推力器羽流区阴极侧不同方位角处 沉积薄膜的结构及光学性质进行了诊断. 研究结果表明, 推力器羽流中主要存在C, F, CF, CF2和CF3气体分子; 在各方位角处脉冲等离子体推力器羽流沉积生成了低氟碳比碳氟薄膜; 沉积薄膜微观结构以30°角为界在羽流不同区域中具有不同的变化趋势; 羽流沉积薄膜具有对波长小于500 nm的光低透射率及增强反射率的光学特性, 受薄膜性质的影响, 其光学特性具有极大的角度依赖性.
    In order to study the characteristics of the films deposited by pulsed plasma thruster plume and assess contamination arising from the exhaust plume, the compositions of the pulsed plasma thruster plume are studied by means of mass spectrum analysis, the structural properties of the films deposited at different angles on the cathode side of the thruster are investigated by X-ray photoelectron spectroscopy, Fourier transform infrared absorption spectroscopy, and the optical properties of the films are studied by ultraviolet-visible light spectrophotometry. The results show that the plume consists primarily of C, F, CF, CF2, CF3, that low fluorine-carbon ration carbon fluorine films are deposited by pulsed plasma thruster plume, and that the chemical bondings and structures of these films present different trends in different regions with 30 degree angle as the boundary. These films basically show that they have strong absorption properties for wavelengths below 500 nm and have enhanced reflective characteristics. Due to influence of the characteristics of the deposited films, the optical properties of these films present signigicant angular dependences.
    • 基金项目: 国家自然科学基金(批准号: 11172327)资助的课题.
    • Funds: Project supported by the National Natural Science Foundation of China (Grant No. 11172327).
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  • [1]

    Burton R L, Turchi P J 1998 J. Propul Power 14 716

    [2]

    Stechmann D P 2007 M.S. Dissertation (Worcester: Worcester Polytechnic Institute)

    [3]

    Debevec J H 2006 M.S. Dissertation (Ohio: Air Force Institute of Technology)

    [4]

    Kesenek C 2008 M.S. Dissertation (Ohio: Air Force Institute of Technology)

    [5]

    Guman W J, Begun M 1978 13th international electric propulsion conference San Diego April 25-27, 1978 AIAA-78-704

    [6]

    Rudolph L K, Jones R M 1979 14th International Electric Propulsion Conference Princeton Oct. 30-Nov.1, 1979 AIAA 79-2106

    [7]

    Arrington L A, Marrese C M, Blandino J J 2000 36th Joint Propulsion Conference Hunstville, July 17-19, 2000 AIAA-2000-3262

    [8]

    Kimura T, Lida M 2011 Jpn. J. Appl. Phys. 50 08jd04-1

    [9]

    Jiang M F, Ning Z Y 2004 Acta Phys. Sin. 53 1588 (in Chinese) [江美福, 宁兆元 2004 物理学报 53 1588]

    [10]

    Jiang M F, Ning Z Y 2004 Acta Phys. Sin. 53 3220 (in Chinese) [江美福, 宁兆元 2004 物理学报 53 3220]

    [11]

    Zhu L, Jiang M F, Ning Z Y, Du J L, Wang P J 2009 Acta Phys. Sin. 58 6430 (in Chinese) [朱丽, 江美福, 宁兆元, 杜记龙, 王培军 2009 物理学报 58 6430]

    [12]

    Xiao J R, Xu H, Zhang D H, Ma S S 2007 Chinese Journal of Vacuum Science and Technology 27 236 (in Chinese) [肖剑荣, 徐慧, 张德恒, 马松山 2007 真空科学与技术学报 27 236]

    [13]

    Jiang A H, Xiao J R, Wang D A 2008 Acta Phys. Sin. 57 6013 (in Chinese) [蒋爱华, 肖剑荣, 王德安 2008 物理学报 57 6013]

    [14]

    Ning Z Y, Cheng S H, Ye chao 2001 Acta Phys. Sin. 50 566 (in Chinese) [宁兆元, 程珊华, 叶超 2001 物理学报 50 566]

    [15]

    Xiao J R, Xu H, Wang H Y, Deng C S, Li M J 2007 Acta Phys. Sin. 56 3004 (in Chinese) [肖建荣, 徐慧, 王焕友, 邓超, 李明君 2007 物理学报 56 3004]

    [16]

    Ahn H J, Kim J B, Hwang B H, Baik H K, Park J S, Kang D 2008 Diam. Relat. Mater 17 2019

    [17]

    Fanelli F, Fracassi F, d'Agostino R 2010 Surf. Coat. Tech. 204 1779

    [18]

    Li Z R 2008 Ph. D. Dissertation (Changsha: National University of Defence Technology) (in Chinese) [李自然 2008 博士学位论文 (长沙: 国防科学技术大学)]

    [19]

    Eckman R, Gatsonis N A, Myers R M 1997 25th International Electric Propulsion Conference Cleveland, Ohio, 1997, IEPC-97-126

    [20]

    Zwahlen 2002 M. S. Dissertation (Worcester: Worcester Polytechnic Institute)

    [21]

    Ye c, Ning Z Y, Chen S H, Kang J 2001 Acta Phys. Sin. 50 784 (in Chinese) [叶超, 宁兆元, 程珊华, 康健 2001 物理学报 50 784]

    [22]

    Biederman H, Ojha S m, Holland L 1977 Thin Solid Films 41 329

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  • 收稿日期:  2012-06-15
  • 修回日期:  2012-08-23
  • 刊出日期:  2013-01-05

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