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纳米线减反层的解析设计法

朱兆平 秦亦强

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纳米线减反层的解析设计法

朱兆平, 秦亦强

Nanowires array designed by means of two-dimension closed-form solution for antireflection

Zhu Zhao-Ping, Qin Yi-Qiang
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  • 本文通过分析比较给出了常用二维等效介质理论解析解的适用条件并 且将有效介质理论的适用范围推广至零级衍射边界处, 并通过FDTD模拟验证了该解析方法的准确性. 这不仅解决了长期以来没有精确二维有效介质理论(2D-EMT)解析解的困境, 而且使得直接用解析公式设计和定量解释减反微结构的减反效果变得可能, 有着广泛的应用前景.
    By investigating the difference between the analytic solutions obtained from commonly used two-dimensional effective medium theory and the numerical solutions, we found that any analytical solution was quite accurate only at its right normalized cycle, determined by its own effective range. Thus, one should solve the problem that there was no closed-form solution for the effective permittivity of a two-dimensional zero-order grating, and expand the applied scope of the effective medium theory to the boundary of zero-order diffraction. Secondly, by using the two-dimensional analytical solution, we have designed a nanowires anti-reflection layer in silicon, which fully meet the needs of the design that reach zero reflectance at 650 nm; and the spectrum averaged reflection from 310-1120 nm is 8%, lower than silicon nitride anti-reflection layer 9.9%. Stavenga formula can be used to design a large normalized period antireflective microstructure, while the Maxwell-Garnett formula can be used to design a small normalized cycle antireflective microstructure. Design of antireflection structure by two-dimensional closed form solution directly is viable, which have huge potential application value.
    • 基金项目: 国家重点基础研究发展计划(批准号: 2010CB6307030)和国家自然科学基金(批准号: 11074118, 11274164)资助的课题.
    • Funds: Project supported by the State Key Development Program for Basic Research of China (Grant No. 2010CB6307030), and the National Natural Science Foundation of China (Grant Nos. 11074118, 11274164).
    [1]

    Kelzenberg M D, Boettcher S W, Petykiewicz J A, Turner-Evans D B, Putnam M C, Warren E L, Spurgeon J M, Briggs R M, Lewis N S, Atwater H A 2010 Nat. Mater. 9 239

    [2]

    Polman A, Atwater H A 2012 Nat. Mater. 11 174

    [3]

    Kuo M L, Poxson D J, Kim Y S, Mont F W, Kim J K, Schubert E F, Lin S Y 2008 Opt. Lett. 11 174

    [4]

    Prevo B G, Hon E W, Velev O D 2007 J. Mater. Chem. 17 791

    [5]

    Her T H, Finlay R J, Wu C, Deliwala S, Mazur E 1998 Appl. Phys. Lett. 73 1673

    [6]

    Strehlke S, Bastide S, Guillet J, Le’vy-Cle’ment C 2000 Mater. Sci. Eng. B 69 81

    [7]

    Xi J Q, Schubert M F, Kim J K, Schubert E F, Chen M, Lin S Y, Liu W, Smart J A 2007 Nat. Photonics 1 176

    [8]

    Grann E B, Moharam M G, Pommet D A 1994 J. Opt. Soc. Am. A 11 2695

    [9]

    Green M A, Pillai S 2012 Nat. Photonics 6 130

    [10]

    Spinelli P, Verschuuren M A, Polman A 2012 Nat. Comms. 3:692 1

    [11]

    Raguin D H, Morris G M 1993 Appl. Opt. 32 1154

    [12]

    Raguin D H, Morris G M 1993 Appl. Opt. 32 2582

    [13]

    Scheller M, Wietzke S, Jansen C, Koch M 2009 J. Phys. D: Appl. Phys. 42 065415

    [14]

    Sancho-Parramon J, Janicki V 2008 J. Phys. D: Appl. Phys. 41 215304

    [15]

    Chen S H, Wang H W, Chang T W 2012 Opt. Express 20 A197

    [16]

    Aspnes D E 2011 Thin Solid Films 519 2571

    [17]

    Grann E B, Moharam M G, Pommet D A 1995 J. Opt. Soc. Am. A 12 333

    [18]

    Sun C H, Jiang P, Jiang B 2008 Appl. Phys. Lett. 92 061112

    [19]

    Huang Y F, Chattopadhyay S, Jen Y J, Peng C Y, Liu T, Hsu Y K, Pan C L, Lo H C, Hsu C H, Chang Y H, Lee C S, Chen K H, Chen L C 2007 Nat. Nanotech. 2 770

    [20]

    Stavenga D G, Foletti S, Palasantzas G, Arikawa K 2006 Proc. R. Soc. B 273 661

    [21]

    Pei T H, Thiyagu S, Pei Z 2011 Appl. Phys. Lett. 99 153108

    [22]

    Zhu J, Yu Z F, Burkhard G F, Hsu C M, Connor S T, Xu Y Q, Wang Q, McGehee M, Fan S H, Cui Y 2009 Nano Lett. 9 279

    [23]

    Motamedi M E, Southwell W H, Gunning W J 1992 Appl. Opt. 31 4371

    [24]

    Hu L, Chen L 2007 Nano Lett. 7 3250

    [25]

    Xiong Z Q, Zhao F Y, Yang J, Hu X H 2010 Appl. Phys. Lett. 96 181903

    [26]

    Heine C, Morf R H 1995 Appl. Opt. 34 2476

    [27]

    Kikuta H, Toyota H, Yu W J 2003 Opt. Rev. 10 63

    [28]

    Gaylord T K, Baird W E, Moharam M G 1986 Appl. Opt. 25 4562

    [29]

    Diedenhofen S L, Janssen O T A, Grzela G, Bakkers E P A M, Rivas J G 2011 Acs Nano 5 2316

    [30]

    Southwell W H 1991 J. Opt. Soc. Am. A 8 549

    [31]

    Merrilll W M, Diaz R E, LoRe M M, Squires M C, Alexopoulos N G 1999 IEEE Trans. Antennas Propag. 47 142

    [32]

    Chen F T, Craighead H G 1995 Opt. Lett. 20 121

    [33]

    Pe’ rez R 2009 J. Appl. Polym. Sci. 113 2264

    [34]

    Zhou J, Sun Y T, Sun T T, Liu X, Song W J 2011 Acta Phys. Sin. 60 088802 (in Chinese) [周骏, 孙永堂, 孙铁囤, 刘晓, 宋伟杰 2011 物理学报 60 088802]

  • [1]

    Kelzenberg M D, Boettcher S W, Petykiewicz J A, Turner-Evans D B, Putnam M C, Warren E L, Spurgeon J M, Briggs R M, Lewis N S, Atwater H A 2010 Nat. Mater. 9 239

    [2]

    Polman A, Atwater H A 2012 Nat. Mater. 11 174

    [3]

    Kuo M L, Poxson D J, Kim Y S, Mont F W, Kim J K, Schubert E F, Lin S Y 2008 Opt. Lett. 11 174

    [4]

    Prevo B G, Hon E W, Velev O D 2007 J. Mater. Chem. 17 791

    [5]

    Her T H, Finlay R J, Wu C, Deliwala S, Mazur E 1998 Appl. Phys. Lett. 73 1673

    [6]

    Strehlke S, Bastide S, Guillet J, Le’vy-Cle’ment C 2000 Mater. Sci. Eng. B 69 81

    [7]

    Xi J Q, Schubert M F, Kim J K, Schubert E F, Chen M, Lin S Y, Liu W, Smart J A 2007 Nat. Photonics 1 176

    [8]

    Grann E B, Moharam M G, Pommet D A 1994 J. Opt. Soc. Am. A 11 2695

    [9]

    Green M A, Pillai S 2012 Nat. Photonics 6 130

    [10]

    Spinelli P, Verschuuren M A, Polman A 2012 Nat. Comms. 3:692 1

    [11]

    Raguin D H, Morris G M 1993 Appl. Opt. 32 1154

    [12]

    Raguin D H, Morris G M 1993 Appl. Opt. 32 2582

    [13]

    Scheller M, Wietzke S, Jansen C, Koch M 2009 J. Phys. D: Appl. Phys. 42 065415

    [14]

    Sancho-Parramon J, Janicki V 2008 J. Phys. D: Appl. Phys. 41 215304

    [15]

    Chen S H, Wang H W, Chang T W 2012 Opt. Express 20 A197

    [16]

    Aspnes D E 2011 Thin Solid Films 519 2571

    [17]

    Grann E B, Moharam M G, Pommet D A 1995 J. Opt. Soc. Am. A 12 333

    [18]

    Sun C H, Jiang P, Jiang B 2008 Appl. Phys. Lett. 92 061112

    [19]

    Huang Y F, Chattopadhyay S, Jen Y J, Peng C Y, Liu T, Hsu Y K, Pan C L, Lo H C, Hsu C H, Chang Y H, Lee C S, Chen K H, Chen L C 2007 Nat. Nanotech. 2 770

    [20]

    Stavenga D G, Foletti S, Palasantzas G, Arikawa K 2006 Proc. R. Soc. B 273 661

    [21]

    Pei T H, Thiyagu S, Pei Z 2011 Appl. Phys. Lett. 99 153108

    [22]

    Zhu J, Yu Z F, Burkhard G F, Hsu C M, Connor S T, Xu Y Q, Wang Q, McGehee M, Fan S H, Cui Y 2009 Nano Lett. 9 279

    [23]

    Motamedi M E, Southwell W H, Gunning W J 1992 Appl. Opt. 31 4371

    [24]

    Hu L, Chen L 2007 Nano Lett. 7 3250

    [25]

    Xiong Z Q, Zhao F Y, Yang J, Hu X H 2010 Appl. Phys. Lett. 96 181903

    [26]

    Heine C, Morf R H 1995 Appl. Opt. 34 2476

    [27]

    Kikuta H, Toyota H, Yu W J 2003 Opt. Rev. 10 63

    [28]

    Gaylord T K, Baird W E, Moharam M G 1986 Appl. Opt. 25 4562

    [29]

    Diedenhofen S L, Janssen O T A, Grzela G, Bakkers E P A M, Rivas J G 2011 Acs Nano 5 2316

    [30]

    Southwell W H 1991 J. Opt. Soc. Am. A 8 549

    [31]

    Merrilll W M, Diaz R E, LoRe M M, Squires M C, Alexopoulos N G 1999 IEEE Trans. Antennas Propag. 47 142

    [32]

    Chen F T, Craighead H G 1995 Opt. Lett. 20 121

    [33]

    Pe’ rez R 2009 J. Appl. Polym. Sci. 113 2264

    [34]

    Zhou J, Sun Y T, Sun T T, Liu X, Song W J 2011 Acta Phys. Sin. 60 088802 (in Chinese) [周骏, 孙永堂, 孙铁囤, 刘晓, 宋伟杰 2011 物理学报 60 088802]

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  • PDF下载量:  478
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出版历程
  • 收稿日期:  2013-01-26
  • 修回日期:  2013-04-12
  • 刊出日期:  2013-08-05

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