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利用喷雾装置在清洁载玻片上喷洒出各种尺寸（微米到毫米量级）的硅油滴，采用直流磁控溅射方法在硅油滴上沉积金属铬薄膜，研究了薄膜中由热应力引起的自组装褶皱. 实验发现硅油滴上的铬薄膜受到油滴边缘的约束而具有受限的边界条件，其对褶皱的形貌具有很好的调控作用：褶皱呈垂直于边界的辐射状条纹；越靠近约束边界，褶皱的波长和振幅越小. 褶皱的形貌特征还与薄膜厚度和硅油滴尺寸密切相关. 随着膜厚的增加，褶皱在约束边界处首先形成，并逐渐扩展到油滴中心区域；相同尺寸油滴中心处的褶皱波长基本不变，而振幅随膜厚先增大随后减小. 薄膜厚度相同时，随着油滴尺寸的增加，褶皱的波长和振幅都相应增加. 进一步的研究表明：在沉积过程中，高能粒子的轰击和溅射源的热辐射导致硅油表面层的结构发生改变而形成聚合物层，在此基础上对褶皱的形貌特征和振幅演化给出合理的解释.Silicone oil droplets with varied sizes (micrometer to millimeter) were sprayed onto a clean glass slide and then Cr films were deposited on the droplets by DC-magnetron sputtering. Self-organized wrinkles induced by thermal stress have been investigated using atomic force microscope. It is found that the Cr films are limited by the droplet edges and thus possess constrained edges, which can well control the wrinkle morphologies: the wrinkles may exhibit radiated strips perpendicular to the edge. The wavelength and amplitude will decrease when approaching to the constrained edge. Morphologies of the wrinkles are closely related to the film thickness and oil drop size. As the film thickness increases, the wrinkles first form near the edge, and then propagate to the central region. The wavelength at the droplet center is almost unchanged for different oil sizes, but the amplitude first increases and then decreases with increasing film thickness. When the film thickness is fixed, the wavelength and amplitude may increase accordingly with increasing droplet size. Further studies show that the top surface of the silicone oil is modified to form a polymer layer during the deposition due to the bombardment from high-energy particles and heat radiation from the sputtering source. Morphologies of the wrinkles and amplitude evolutions are then explained in detail.
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Keywords:
- liquid substrate /
- metal film /
- self-organization /
- constrained edge
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[1] Zhong M J, Guo G L, Yang J Y, Ma N H, Ye G, Guo X D, Li R X, Ma H L 2008 Chin. Phys. B 17 1223
[2] Jiang Y H, Liu L W, Yang K, Xiao W D, Gao H J 2011 Chin. Phys. B 20 096401
[3] Zhang C H, L N, Zhang X F, Saida A, Xia A G, Ye G X 2011 Chin. Phys. B 20 066103
[4] Bowden N, Brittain S, Evans A G, Hutchinson J W, Whitesides G M 1998 Nature 393 146
[5] Efimenko K, Rackaitis M, Manias E, Vaziri A, Mahadevan L, Genzer J 2005 Nat. Mater. 4 293
[6] Wang F, Xue M, Cao T 2009 Adv. Mater. 21 2211
[7] Colin J, Coupeau C, J Grilhé 2007 Phys. Rev. Lett. 99 046101
[8] Faou J Y, Parry G, Grachev S, Barthel E 2012 Phys. Rev. Lett. 108 116102
[9] Yu S J, Xiao X F, Chen M G, Zhou H, Chen J, Si P Z, Jiao Z W 2014 Acta Mater. 64 41
[10] Cai P G, Yu S J, Ye Q L, Jin J S, Ye G X 2003 Phys. Lett. A 312 119
[11] Yu S J, Zhang Y J, Ye Q L, Cai P G, Tang X W, Ye G X 2003 Phys. Rev. B 68 193403
[12] Zhang Y J, Yu S J 2005 Acta Phys. Sin. 54 4867 (in Chinese)[张永炬, 余森江 2005 物理学报 54 4867]
[13] Xia A G, Yang B, Jin J S, Zhang Y W, Tang F, Ye G X 2005 Acta Phys. Sin. 54 302
[14] Liu X, Wuttig M 2006 Phys. Rev. B 73 033405
[15] Zhang Y J, Yu S J, Ge H L, Wu L N, Cui Y J 2006 Acta Phys. Sin. 55 5444 (in Chinese)[张永炬, 余森江, 葛洪良, 邬良能, 崔玉建 2006 物理学报 55 5444]
[16] Pocivavsek L, Dellsy R, Kern A, Johnson S, Lin B, Lee K Y C, Cerda E 2008 Science 320 912
[17] Huang J, Davidovitch B, Santangelo C D, Russell T P, Menon N 2010 Phys. Rev. Lett. 105 038302
[18] Kim P, Abkarian M, Stone H A 2011 Nat. Mater. 10 952
[19] Vandeparre H, Pineirua M, Brau F, Roman B, Bico J, Gay C, Bao W, Lau C N, Reis P M, Damman P 2011 Phys. Rev. Lett. 106 224301
[20] Bao W, Miao F, Chen Z, Zhang H, Jang W, Dames C, Lau C N 2009 Nat. Nanotech. 4 562
[21] Yu S J, Zhou H, Zhang Y J, Chen M G, Jiao Z W, Si P Z 2012 Thin Solid Films 520 5683
[22] Yu S J, Zhang Y J, Zhou H, Chen M G, Zhang X F, Jiao Z W, Si P Z 2013 Phys. Rev. E 88 042401
[23] Al-Shareef A, Neogi P, Bai B 2013 Chem. Eng. Sci. 99 113
[24] Feng C M, Ge H L, Tong M R, Ye G X, Jiao Z K 1999 Thin Solid Films 34 230
[25] Tao X M, Lao Y F, Ye Q L, Jin J S, Jiao Z K, Ye G X 2001 Acta Phys. Sin. 50 1991 (in Chinese)[陶向明, 劳燕锋, 叶全林, 金进生, 焦正宽, 叶高翔 2001 物理学报 50 1991]
[26] Cerda E, Mahadevan L 2003 Phys. Rev. Lett. 90 074302
[27] Chua D B H, Ng H T, Li S F Y 2000 Appl. Phys. Lett. 76 721
[28] Genzer J, Groenewold J 2006 Soft Matter 2 310
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