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A time-domain model for the square-wave-modulated free carrier absorption (MFCA) is developed in measuring the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) of semiconductor wafers. The dependences of time-domain MFCA signals on the electronic transport properties at different modulation frequencies are investigated by computer simulation. It is found that there are the high sensitivities of MFCA signal to the individual transport parameter. Furthermore, compared with the results by frequency-domain MFCA, in time-domain MFCA measuring ranges the transport properties can be improved.
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Keywords:
- modulated free carrier absorption /
- electronic transport properties /
- square wave modulation
[1] Sanii F, Schwartz R J, Pierret R F 1988 Proceedings of the 20th IEEE Photovoltaic Specialists Conference p575
[2] Sanii F, Giles F P, Schwartz R J 1992 Solid-State Electronics 35 311
[3] Zhang X, Li B, Gao C 2006 Appl. Phys. Lett. 89 112120
[4] Zhang X, Li B, Liu X 2008 Acta Phys. Sin. 57 7310 (in Chinese)[张希仁, 李斌成, 刘显明 2008 物理学报 57 7310]
[5] Zhang X, Gao C, Zhou Y, Wang Z 2011 Chin. Phys. B 20 068105
[6] Zhang X, Li B, Gao C 2008 J. Appl. Phys. 103 033709
[7] Li B, Shaughnessy D, Mandelis A 2005 J. Appl. Phys. 97 023701
[8] Mandelis A, Pawlak M, Wang C 2005 J. Appl. Phys. 98 123518
[9] Ozisik N M 1993 Heat Conduction Second Edition p44 (New York: John Wiley & Sons, Inc.)
[10] Kousik G S, Ling Z G, and Ajmera P K 1992 J. Appl. Phys. 72 141
[11] Press W H, Teukolsky S A, Vetterling W T, Flannery B P 1992 Numerical Recipes in C: The Art of Scientific Computing Second Edition p362 (Cambridge: Cambridge University Press)
[12] Sheard S J, Somekh M G, Hiller T 1990 Mater. Sci. Eng. B 5 101
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[1] Sanii F, Schwartz R J, Pierret R F 1988 Proceedings of the 20th IEEE Photovoltaic Specialists Conference p575
[2] Sanii F, Giles F P, Schwartz R J 1992 Solid-State Electronics 35 311
[3] Zhang X, Li B, Gao C 2006 Appl. Phys. Lett. 89 112120
[4] Zhang X, Li B, Liu X 2008 Acta Phys. Sin. 57 7310 (in Chinese)[张希仁, 李斌成, 刘显明 2008 物理学报 57 7310]
[5] Zhang X, Gao C, Zhou Y, Wang Z 2011 Chin. Phys. B 20 068105
[6] Zhang X, Li B, Gao C 2008 J. Appl. Phys. 103 033709
[7] Li B, Shaughnessy D, Mandelis A 2005 J. Appl. Phys. 97 023701
[8] Mandelis A, Pawlak M, Wang C 2005 J. Appl. Phys. 98 123518
[9] Ozisik N M 1993 Heat Conduction Second Edition p44 (New York: John Wiley & Sons, Inc.)
[10] Kousik G S, Ling Z G, and Ajmera P K 1992 J. Appl. Phys. 72 141
[11] Press W H, Teukolsky S A, Vetterling W T, Flannery B P 1992 Numerical Recipes in C: The Art of Scientific Computing Second Edition p362 (Cambridge: Cambridge University Press)
[12] Sheard S J, Somekh M G, Hiller T 1990 Mater. Sci. Eng. B 5 101
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