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硅基全光宽带太赫兹幅度调制器的研究

田伟 文岐业 陈智 杨青慧 荆玉兰 张怀武

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硅基全光宽带太赫兹幅度调制器的研究

田伟, 文岐业, 陈智, 杨青慧, 荆玉兰, 张怀武

Optically tuned wideband terahertz wave amplitude modulator based on gold-doped silicon

Tian Wei, Wen Qi-Ye, Chen Zhi, Yang Qing-Hui, Jing Yu-Lan, Zhang Huai-Wu
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  • 提出了一种基于掺金硅的全光学宽带太赫兹波幅度调制器, 研究了金(Au)点阵掺杂后硅(Si)体内的少数载流子寿命及其太赫兹波调制特性. 实验结果表明, 掺杂的Au原子为Si中的光生电子- 空穴对提供了有效复合中心, 使其少数载流子寿命由原来十几微秒降低至110 ns左右. 利用波长915 nm 调制激光作为抽运光源, 在340 GHz载波的动态调制测试中获得4.3 MHz的调制速率和21%的调制深度, 使Si基调制器的调制速率提高了两个数量级. 该全光太赫兹调制器可工作在整个太赫兹频段内, 具有极化不敏感特性, 因而在太赫兹波高速和宽带调控方面具有重要的应用价值, 也是构建光控型Si 基太赫兹功能器件的重要基础.
    In this paper, we present a broadband terahertz wave amplitude modulator based on optically-controlled gold-doped silicon. Gold dots with a diameter of 40 μm are used as a dopant source. Experimental results indicate that interstitial Au atoms provide effective recombination centers for photo-generated electron-hole pairs in Si body, leading to a significant decrease of the minority carrier lifetime from more than 10 μs to about 110 ns. Dynamic modulation measurement at 340 GHz carrier shows a modulation depth of 21% and a maximum modulation speed of 4.3 MHz. This modulator has advantages such as wideband operation, high modulation speed, polarization insensitivity, and easy manufacture by using the large-scale integrated technology, and thus can be widely used in terahertz technology.
    • 基金项目: 国家自然科学基金重点项目(批准号: 61131005)、教育部科学技术研究重大项目(批准号: 313013)、国家高新技术研究计划(批准号: 2011AA010204)、教育部新世纪优秀人才资助计划(批准号: NCET-11-0068)、四川省杰出青年学术技术带头人计划(批准号: 2011JQ0001)和高校博士点专项科研基金(批准号: 20110185130002)资助的课题.
    • Funds: Project supported by the National Natural Science Foundation of China (Grant No. 61131005), the Key Program Project of Chinese Ministry of Education (Grant No. 313013), the National High-tech Research and Development Progran (Grant No. 2011AA010204), the New Century Excellent Talent Foundation of Ministry of Education, China (Grant No. NCET-11-0068), Sichuan Youth S & T Foundation, China (Grant No. 2011JQ0001), and the Specialized Research Fund for the Doctoral Program of Higher Education, China (Grant No. 20110185130002).
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    Chan W L, Chen H T, Taylor A J, Brener I, Cich M J, Mittleman D M 2009 Appl. Phys. Lett. 94 213511

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    Savo S, Shrekenhamer D, Padilla W J 2014 Adv. Opt. Mater. 2 275

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    He X J, Li T Y, Wang L, Wang J M, Jiang J X, Yang G H, Meng F Y, Wu Q 2014 J. Appl. Phys. 115 17B903

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    Degl'innocenti R, Jessop D S, Shah Y D, Sibik J, Zeitler J A, Kidambi P R, Hofmann S, Beere H E, Ritchie D A 2014 ACS Nano 8 2548

    [34]

    Shrekenhamer D, Rout S, Strikwerda A C, Bingham C, Averitt R D, Sonkusale S, Padilla W J 2011 Opt. Express 19 9968

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    Weis P, Garcia-Pomar J L, Hoh M, Reinhard B, Brodyanski A, Rahm M 2012 ACS Nano 6 9118

    [36]

    Xie Z, Wang X, Ye J, Feng S, Sun W, Akalin T, Zhang Y 2013 Scientific Reports 3 3347

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  • [1]

    Tonouchi M 2007 Nat. Photon. 1 97

    [2]

    Federici J, Moeller L 2010 J. Appl. Phys. 107 111101

    [3]

    Mittleman D M, Gupta M, Neelamani R, Baraniuk R G, Rudd J V, Koch M 1999 Appl. Phys. B 68 1085

    [4]

    Siegel P H Microwave Symposium Digest 2004 IEEE MTT-S International 2004 1575

    [5]

    Kemp M C, Taday P F, Cole B E, Cluff J A, Fitzgerald A J, Tribe W R 2003 International Society for Optics and Photonics in AeroSense 2003 p44

    [6]

    Kleine-Ostmann T, Dawson P, Pierz K, Hein G, Koch M 2004 Appl. Phys. Lett. 84 3555

    [7]

    Kleine-Ostmann T, Pierz K, Hein G, Dawson P, Marso M, Koch M 2009 J. Appl. Phys. 105 093707

    [8]

    Suzuki D, Oda S, Kawano Y 2013 Appl. Phys. Lett. 102 122102

    [9]

    Fekete L, Kadlec F, Kuzel P, Nemec H 2007 Opt. Lett. 32 680

    [10]

    Fekete L, Kadlec F, Nemec H, Kuzel P 2007 Opt. Express 15 8898

    [11]

    Seo M, Kyoung J, Park H, Koo S, Kim H, Bernien H, Kim B J, Choe J H, Ahn Y H, Kim H T, Park N, Park Q H, Ahn K, Kim D 2010 Nano Lett. 10 2064

    [12]

    Wen Q Y, Zhang H W, Yang Q H, Xie Y S, Chen K, Liu Y L 2010 Appl. Phys. Lett. 97 021111

    [13]

    Choi S B, Kyoung J S, Kim H S, Park H R, Park D J, Kim B J, Ahn Y H, Rotermund F, Kim H T, Ahn K J, Kim D S 2011 Appl. Phys. Lett. 98 071105

    [14]

    Liu M K, Hwang H Y, Tao H, Strikwerda A C, Fan K B, Keiser G R, Sternbach A J, West K G, Kittiwatanakul S, Lu J W, Wolf S A, Omenetto F G, Zhang X, Nelson K A, Averitt R D 2012 Nature 487 345

    [15]

    Wen Q Y, Zhang H W, Yang Q H, Chen Z, Long Y, Jing Y L, Lin Y, Zhang P X 2012 J. Phys. D: Appl. Phys. 45 235106

    [16]

    Sun D D, Chen Z, Wen Q Y, Qiu D H, Lai W E, Dong K, Zhao B H, Zhang H W 2013 Acta Phys. Sin. 62 017202 (in Chinese) [孙丹丹, 陈智, 文岐业, 邱东鸿, 赖伟恩, 董凯, 赵碧辉, 张怀武 2013 物理学报 62 017202]

    [17]

    Zhao Y, Chen C, Pan X, Zhu Y, Holtz M, Bernussi A, Fan Z 2013 J. Appl. Phys. 114 113509

    [18]

    Liu Z Q, Chang S J, Wang X L, Fan F, Li W 2013 Acta Phys. Sin 62 130702 (in Chinese) [刘志强, 常胜江, 王晓雷, 范飞, 李伟 2013 物理学报 62 130702]

    [19]

    Chen H T, Padilla W J, Zide J M O, Gossard A C, Taylor A J, Averitt R D 2006 Nature 444 597

    [20]

    Chen H T, Palit S, Tyler T, Bingham C M, Zide J M O, O'Hara J F, Smith D R, Gossard A C, Averitt R D, Padilla W J, Jokerst N M, Taylor A J 2008 Appl. Phys. Lett. 93 091117

    [21]

    Chen H T, Padilla W J, Cich M J, Azad A K, Averitt R D, Taylor A J 2009 Nat. Photon. 3 148

    [22]

    Shu J, Qiu C, Astley V, Nickel D, Mittleman D M, Xu Q 2011 Opt. Express 19 26666

    [23]

    Yang Y, Huang R, Cong L, Zhu Z, Gu J, Tian Z, Singh R, Zhang S, Han J, Zhang W 2011 Appl. Phys. Lett. 98 121114

    [24]

    Yan R S, Sensale-Rodriguez B, Liu L, Jena D, Xing H G 2012 Opt. Express 20 28664

    [25]

    Gao W, Shu J, Reichel K, Nickel D V, He X, Shi G, Vajtai R, Ajayan P M, Kono J, Mittleman D M 2014 Nano Lett. 14 1242

    [26]

    Karl N, Reichel K, Chen H T, Taylor A J, Brener I, Benz A, Reno J L, Mendis R, Mittleman D M 2014 Appl. Phys. Lett. 104 091115

    [27]

    Larsen K, Austin D, Sandall I C, Davies D G, Revin D G, Cockburn J W, Adawi A M, Airey R J, Fry P W, Hopkinson M, Wilson L R 2012 Appl. Phys. Lett. 101 251109

    [28]

    Zhou Q L, Shi Y L, Wang A H, Li L, Zhang C L 2012 Chin. Phys. B 21 058701

    [29]

    Chan W L, Chen H T, Taylor A J, Brener I, Cich M J, Mittleman D M 2009 Appl. Phys. Lett. 94 213511

    [30]

    Shrekenhamer D, Montoya J, Krishna S, Padilla W J 2013 Adv. Opt. Mater. 1 905

    [31]

    Savo S, Shrekenhamer D, Padilla W J 2014 Adv. Opt. Mater. 2 275

    [32]

    He X J, Li T Y, Wang L, Wang J M, Jiang J X, Yang G H, Meng F Y, Wu Q 2014 J. Appl. Phys. 115 17B903

    [33]

    Degl'innocenti R, Jessop D S, Shah Y D, Sibik J, Zeitler J A, Kidambi P R, Hofmann S, Beere H E, Ritchie D A 2014 ACS Nano 8 2548

    [34]

    Shrekenhamer D, Rout S, Strikwerda A C, Bingham C, Averitt R D, Sonkusale S, Padilla W J 2011 Opt. Express 19 9968

    [35]

    Weis P, Garcia-Pomar J L, Hoh M, Reinhard B, Brodyanski A, Rahm M 2012 ACS Nano 6 9118

    [36]

    Xie Z, Wang X, Ye J, Feng S, Sun W, Akalin T, Zhang Y 2013 Scientific Reports 3 3347

    [37]

    Wen Q Y, Tian W, Mao Q, Chen Z, Liu W W, Yang Q H, Sanderson M, Zhang H W 2014 Scientific Reports 4 7409

    [38]

    Collins C B, Carlson R O, Gallagher C J 1957 Phys. Rev. 105 1168

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出版历程
  • 收稿日期:  2014-08-10
  • 修回日期:  2014-09-07
  • 刊出日期:  2015-01-05

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