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超高分辨光学相干层析成像技术与材料检测应用

唐弢 赵晨 陈志彦 李鹏 丁志华

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超高分辨光学相干层析成像技术与材料检测应用

唐弢, 赵晨, 陈志彦, 李鹏, 丁志华

Ultrahigh-resolution optical coherence tomography and its application in inspection of industrial materials

Tang Tao, Zhao Chen, Chen Zhi-Yan, Li Peng, Ding Zhi-Hua
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  • 本文报道了一种超高分辨率谱域光学相干层析成像(SD-OCT)系统. 该系统基于超连续谱激光光源并截取部分光谱作为宽带光源, 其中心波长为665 nm, 光谱半高全宽(FWHM) 230 nm. 系统轴向分辨率0.9 μm, 轴向扫描速率28600行/秒, 横向分辨率3.9 μm, 横向视场1 mm, 最大成像深度0.6 mm(空气中). 利用研制的超高分辨率SD-OCT系统, 对不同型号的工业砂纸精细结构进行了成像, 并与普通SD-OCT的成像结果进行对比, 充分展示了研制系统在材料无损检测中优势.
    Since many industrial materials have micro or submicro structures on the surface or subsurface, utrahigh-resolution is required in the inspection of these materials. Ultrahigh-resolution optical coherence tomography uses broadband light sources to achieve axial image resolutions on the scale of a few microns. We have been investigating an ultrahigh-resolution spectral-domain optical coherence tomography (SD-OCT) system using supercontinuum sources (SC) in free space. The effective SC spectrum has a full width at half maximum of 230 nm centered around 665 nm, and the imaging setup has an ultrahigh axial resolution of 0.9 μm in air, and a lateral resolution of 3.9 μm, with the system measurement range being 0.6 mm in axial direction. At a 50 μm axial position, the sensitivity can be 63 dB with 28600 axial scans per second at 2048 pixels per axial scan. Images of polystyrene microspheres solution with an average diameter of 5 μm and different sizes of industrial abrasive papers are presented to illustrate the performance of the system.
      通信作者: 丁志华, zh_ding@zju.edu.cn
    • 基金项目: 国家自然科学基金(批准号: 61335003, 61275196, 61327007, 11404285, 61475143), 国家高技术研究发展计划(863计划)(批准号: 2015AA020515), 浙江省自然科学基金 (批准号: LY14F050007), 中央高校基本科研业务费专项资金(批准号: 2014QNA5017)和教育部留学回国人员科研启动基金资助的课题.
      Corresponding author: Ding Zhi-Hua, zh_ding@zju.edu.cn
    • Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 61335003, 61275196, 61327007, 11404285, 61475143), the National High Technology Research and Development Program of China (Grant No. 2015AA020515), the Natural Science Foundation of Zhejiang Province, China (Grant No. LY14F050007), the Fundamental Research Funds for the Central Universities of Ministry of Education of China (Grant No. 2014QNA5017), and the Scientific Research Foundation for the Returned Overseas Chinese Scholars, State Education Ministry.
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  • [1]

    Huang D, Swanson E A, Lin C P, Schuman J S, Stinson W G, ChangW, Hee M R, Flotte T, Gregory K, Puliafito C A, Fujimoto J G 1991 Science 254 1178

    [2]

    Drexler W, Fujimoto J G 2008 Optical coherence tomography: technology and applications (Berlin: Springer) pp1-72

    [3]

    Wojtkowski M, Leitgeb R, Kowalczyk A, Fercher A F, Bajraszewski T 2002 J. Biomed. Opt. 7 457

    [4]

    Nassif N, Cense B, Park B, Pierce M, Yun S, Bouma B, Tearney G, Chen T, de Boer J 2004 Opt. Express 12 367

    [5]

    Cense B, Nassif N, Chen T, Pierce M, Yun S H, Park B, Bouma B, Tearney G 2004 Opt. Lett. 12 2435

    [6]

    Chen Y, Huang S W, Aguirre A D, Fujimoto J G 2007 Opt. Lett. 32 1971

    [7]

    Yadav R, Lee K S, Rolland J P, Zavislan J M, Aquavella J V, Yoon G 2011 Biomed. Opt. Express 2 3037

    [8]

    Fernández E J, Hermann B, Považay B, Unterhuber A, Sattmann H, Hofer B, Ahnelt P, Drexler W 2008 Opt. Express 16 11083

    [9]

    Bayleyegn M D, Makhlouf H, Crotti C, Plamann K, Dubois A 2012 Opt. Commun. 285 5564

    [10]

    Drexler W 2004 J. Biomed. Opt. 9 47

    [11]

    Leitgeb R, Drexler W, Unterhuber A, Hermann B, Bajraszewski T, Le T, Stingl A, Fercher A 2004 Opt. Express 12 2156

    [12]

    Zhao C, Chen Z Y, Ding Z H, Li P, Shen Y, Ni Y 2014 Acta Phys. Sin. 63 194201 (in Chinese) [赵晨, 陈志彦, 丁志华, 李鹏, 沈毅, 倪秧 2014 物理学报 63 194201]

    [13]

    Prykäri T, Czajkowski J, Alarousu E, Myllylä R 2010 Opt. Rev. 17 218

    [14]

    Wiesauer K, Pircher M, Götzinger E, Bauer S, Engelke R, Ahrens G, Grützner G, Hitzenberger C, Stifter D 2005 Opt. Express 13 1015

    [15]

    Heise B, Schausberger S E, Häuser S, Plank B, Salaberger D, Leiss-Holzinger E, Stifter D 2012 Opt. Fiber. Technol. 18 403

    [16]

    Kumar M, Islam M N, Terry F L, Aleksoff C C, Davidson D 2010 Opt. Express 18 22471

    [17]

    Xue P, Fujimoto J G 2008 Chin. Sci. Bull. 53 1963

    [18]

    Safrani A, Abdulhalim I 2012 Opt. Lett. 37 458

    [19]

    Yan Y Z, Ding Z H, Wang L, Shen Y 2013 Acta Phys. Sin. 62 164204 (in Chinese) [颜扬治, 丁志华, 王玲, 沈毅 2013 物理学报 62 164204]

    [20]

    Wang K, Ding Z H 2008 Chin. Opt. Lett. 6 902

    [21]

    Bao W, Ding Z H, Wang C, Mei S T 2013 Acta Phys. Sin. 62 114202 (in Chinese) [鲍文, 丁志华, 王川, 梅胜涛 2013 物理学报 62 114202]

    [22]

    Wojtkowski M, Srinivasan V, Ko T, Fujimoto J G, Kowalczyk A, Duker J 2004 Opt. Express 12 2404

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出版历程
  • 收稿日期:  2015-02-02
  • 修回日期:  2015-03-24
  • 刊出日期:  2015-09-05

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