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飞秒光梳被广泛用于时间频率技术和精密光谱测量, 由其时频特性所衍生的绝对测距技术以可溯源、大尺寸、高精度等优点有望成为未来长度计量的最重要手段. 本文提出了一种基于飞秒光梳多路同步锁相的多波长干涉实时绝对测距方法, 使多个连续波激光器通过光学锁相环技术同步锁定到飞秒光梳梳模上, 通过多路同步相位测量和小数重合算法最终实现绝对距离测量. 所提测量方法不仅能保留传统激光干涉测距的高分辨力和精度, 而且可溯源至时间频率基准, 对高精度长度测量、尤其是对物理复现“米”的定义具有重要计量意义. 测距实验证明, 四波长干涉测距的非模糊度量程达到44.6 mm, 折射率波动导致非模糊度量程变化为纳米量级; 多波长干涉测距的非模糊度量程也受制于空气折射率的测量误差, 多波长干涉绝对测距的非模糊度量程在实验室环境下可达数米、甚至几十米, 并通过2米线性位移实验证明了多波长绝对测距的大量程和线性测量性能.Optical frequency combs of the femtosecond laser have been widely used in time-frequency technology and precision spectrum measurement. The absolute ranging technology derived from time-frequency characteristics of the optical frequency comb is expected to become the incomparable means of length metrology and distance measurement in the future due to its traceability to time-frequency standard and capability of large scale and high precision. This paper proposes a real-time absolute ranging method with multi-wavelength interferometry referenced to optical frequency comb, which enables multiple continuous-wave lasers to be synchronously calibrated to selected modes of the frequency comb by means of optical phase-locked loop. With synchronous phase measurement and calculation with excess fraction algorithm, absolute distance measurement by multi-wavelength interferometry is ultimately fulfilled. The proposed measurement method can not only retain high resolution and high accuracy of traditional laser interferometry, but also can be traced to a time-frequency reference, which is of metrological significance to high-precision length and distance measurement, especially to the definition of “meter” for physical reproduction. Measured results for ranging experiments have proved that the non-ambiguity range of the four-wavelength interferometer reaches 44.6 mm, and fluctuations of air refractive index cause the non-ambiguity range change with the order of nanometers. Through theoretical analysis, it is pointed out that the non-ambiguity range of the multi-wavelength interferometer in the actual measurement environment is restricted by the calculated error of air refractive index, especially the estimation accuracy and fluctuation degree of the refractive index relationship between wavelengths. And in a good laboratory conditions, the non-ambiguity range of real-time absolute ranging by frequency-comb-calibrated multi-wavelength interferometry can reach several meters or even tens of meters. At the same time, a 2-meter linear displacement comparison has been carried out, the P.V. value of the residual errors for linear fitting is 36.1 nm, and such residual errors match the magnitude of uncertainty of air refractive index calculated by empirical formula, which prove that the multi-wavelength interferometry can perform meter-level absolute ranging. The proposed research can be directly applied to precision manufacturing of large-scale semiconductors up to several meters, and is beneficial to promoting the accuracy of laser ranging for space mission.
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Keywords:
- absolute distance measurement /
- optical frequency comb of the femtosecond laser /
- multi-wavelength interferometry /
- non-ambiguous range
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图 3 多波长光源和相位测量结果 (a) 多波长发生器光谱测量结果; (b) 锁频激光的频率稳定度分析结果; (c) 多路同步相位解调实时测量结果
Fig. 3. Test results for preparation of real-time and meter-scale absolute distance measurement: (a) Parallel generated four wavelengths for MWI; (b) frequency stability evaluation; (c) simultaneously detected phases for MWI in real time.
图 6
$\alpha = {\beta _i} \cdot \left( {{n_1} - {n_i}} \right)$ 随参数变化的波动大小 (a)$ {\beta _i} \cdot \left( {{n_1} - {n_i}} \right) $ 随波长间距变化的波动仿真结果; (b)${\beta _i} \cdot \left( {{n_1} - {n_i}} \right)$ 随温度变化时的波动仿真结果, 波长间隔为25 nm, 波长选定为1555 nmFig. 6. Influences of the parameter variations on the value of
${\beta _i} \cdot \left( {{n_1} - {n_i}} \right)$ : (a) Fluctuation of${\beta _i} \cdot \left( {{n_1} - {n_i}} \right)$ as variations of wavelength gap; (b) fluctuation of${\beta _i} \cdot \left( {{n_1} - {n_i}} \right)$ as variations of ambient temperature. -
[1] Berkovic G, Shafir E 2012 Adv. Opt. Photon. 4 441
Google Scholar
[2] Estler W T, Edmundson K L, Peggs G N, Parker D H 2002 CIRP Ann. Manuf. Technol. 51 587
Google Scholar
[3] Manske E, Jager G, Hausotte T, Fub R 2012 Meas. Sci. Technol. 23 074001
Google Scholar
[4] Bobroff N 1993 Meas. Sci. Technol. 4 907
Google Scholar
[5] Lay O P, Dubovitsky S, Peters R D, Burger J P, Steier W H 2003 Opt. Lett. 28 890
Google Scholar
[6] Bourdet G L, Orszag A G 1979 Appl. Opt. 18 225
Google Scholar
[7] Zimmermann E, Salvadé Y, Dändliker R 1996 Opt. Lett. 21 531
Google Scholar
[8] Meiners-Hagen K, Schoedel R, Pollinger F, Abou-Zeid A 2009 Meas. Sci. Rev. 9 16
Google Scholar
[9] Dändliker R, Thalmann R, Prongue D 1988 Opt. Lett. 13 339
Google Scholar
[10] Groot P 2001 Opt. Eng. 40 28
Google Scholar
[11] 时光, 张福民, 曲兴华, 孟祥松 2014 物理学报 63 184209
Google Scholar
Shi G, Zhang F M, Qu X H, Meng X S 2014 Acta Phys. Sin. 63 184209
Google Scholar
[12] Coe P A, Howell D F, Nickerson R B 2004 Meas. Sci. Technol. 15 2175
Google Scholar
[13] Williams C C, Wickramasinghe H K 1989 Opt. Lett. 145 42
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[15] Udem T, Holzwarth R, Hansch T W 2002 Nature 416 233
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[17] Minoshima K, Matsumoto H 2000 Appl. Opt. 39 5512
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Google Scholar
Wang G C, Yan S H, Yang J, Lin C B, Yang D X, Zou P F 2013 Acta Phys. Sin. 62 070601
Google Scholar
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Google Scholar
Zhang X S, Yi W M, Hu M H, Yang Z H, Wu G H 2016 Acta Phys. Sin. 65 080602
Google Scholar
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Google Scholar
[21] 秦鹏, 陈伟, 宋有建, 胡明列, 柴路, 王清月 2012 物理学报 61 240601
Google Scholar
Qin P, Chen W, Song Y J, Hu M L, Chai L, Wang C Y 2012 Acta Phys. Sin. 61 240601
Google Scholar
[22] Coddington I, Swann W C, Nenadovic L, Newbury N R 2009 Nat. Photonics 3 351
Google Scholar
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Google Scholar
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Google Scholar
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Google Scholar
[29] Ye J 2004 Opt. Lett. 29 1153
Google Scholar
[30] Wei D, Takahashi S, Takamasu K, Matsumoto H 2009 Opt. Lett. 34 2775
Google Scholar
[31] 孟祥松, 张福民, 曲兴华 2015 物理学报 23 230601
Google Scholar
Meng X S, Zhang F M, Qu X H 2015 Acta Phys. Sin. 23 230601
Google Scholar
[32] Kim S W 2009 Nat. Photonics 3 313
Google Scholar
[33] 姜海峰 2018 物理学报 67 160602
Google Scholar
Jiang H F 2018 Acta Phys. Sin. 67 160602
Google Scholar
[34] Chun B J, Hyun S, Kim S, Kim S W, Kim Y J 2013 Opt. Express 21 29179
Google Scholar
[35] Felder R 2003 Metrologia 42 323
Google Scholar
[36] Wei D, Takamasu K, Matsumoto H 2013 Precis. Eng. 37 694
Google Scholar
[37] Tilford C R 1977 Appl. Opt. 16 1857
Google Scholar
[38] 王国超, 魏春华, 颜树华 2014 光学学报 34 111
Google Scholar
Wang G C, Wei C H, Yan S H 2014 Acta Optic. Sin. 34 111
Google Scholar
[39] Falaggis K, Towers D P, Towers C E 2013 Appl. Opt. 52 5758
Google Scholar
[40] Towers C E, Towers D P, Julian D C 2004 Opt. Express 12 1136
Google Scholar
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Google Scholar
[42] 王国超, 谭立龙, 颜树华, 魏春华 2017 光学学报 37 160
Google Scholar
Wang G C, Wei C H, Yan S H 2017 Acta Optic. Sin. 37 160
Google Scholar
[43] Hyun S, Kim Y J, Kim Y, Kim S W 2010 CIRP Ann.-Manuf. Techn. 59 555
Google Scholar
[44] 王国超 2015 博士学位论文 (长沙: 国防科技大学)
Wang G C 2015 Ph. D. Dissertation (Changsha: National University of Defense Technology) (in Chinese)
[45] Ciddor P E 1996 Appl. Opt. 35 1566
Google Scholar
[46] Birch K P, Downs M J 1993 Metrologia 30 155
Google Scholar
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Google Scholar
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Google Scholar
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