搜索

x
中国物理学会期刊

非热等离子体材料表面处理及功能化研究进展

CSTR: 32037.14.aps.70.20202233

Recent progress of non-thermal plasma material surface treatment and functionalization

CSTR: 32037.14.aps.70.20202233
PDF
HTML
导出引用
  • 等离子体技术在现代材料制备和表面处理过程中起着重要的作用. 本文聚焦于非热等离子体(NTP)材料表面处理及功能化应用, 重点综述NTP在材料表面处理及功能化过程中的最新研究进展, 包括激励产生等离子体的等离子体源、NTP材料表面处理及功能化工艺以及具体应用. 其中, 激励产生等离子体的等离子体源包括感应耦合等离子体/容性耦合等离子体、电子回旋共振/表面波等离子体、螺旋波等离子体、大气压射流等离子体和介质阻挡放电等; NTP材料表面处理及功能化工艺包括等离子体表面接枝和聚合、等离子体增强化学气相沉积和等离子体辅助原子层沉积、等离子体增强反应刻蚀和等离子体辅助原子层刻蚀工艺等; 等离子体表面处理及功能化的具体应用领域包括亲水/疏水表面改性、表面微纳加工、生物组织表面处理、催化剂表面处理等. 最后提出了NTP技术材料表面处理及功能化的应用前景与发展趋势.

     

    Plasma technology plays an important role in preparing and processing materials nowadays. This review focuses on the applications of non-thermal plasma (NTP) in the surface treatment and functionalization of materials, including the plasma sources for generating plasmas, NTP techniques and specific application fields. The plasma sources include inductively coupled plasma, capacitively coupled plasma, electron cyclotron resonance plasma, surface wave plasma, helicon wave plasma, atmospheric pressure plasma jet, and dielectric barrier discharge plasma. The NTP techniques for material surface treatment and functionalization include plasma surface grafting and polymerization, plasma enhanced chemical vapor deposition, plasma assisted atomic layer deposition, plasma enhanced reactive ion etching, and plasma assisted atomic layer etching. Specific applications of plasma surface treatment and functionalization cover hydrophilic/hydrophobic surface modification, surface micro-nano processing, biological tissue surface treatment, and catalyst surfaces treatment. Finally, the application prospects and development trends of NTP technology for material surface treatment and functionalization are proposed.

     

    目录

    /

    返回文章
    返回