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批量生产中经常发生的锑化铟(InSb)芯片碎裂问题制约着InSb红外焦平面探测器(IRFPAs)成品率的提升. 经分析认为: 低周期液氮冲击下发生在器件边沿区域的InSb芯片破碎与该区域中迸溅金点的存在有关. 为从理论上明晰迸溅金点对InSb芯片局部碎裂的影响, 本文建立了包含迸溅金点的InSb IRFPAs结构模型, 分析了迸溅金点的存在对应力分布的影响. 在此基础上, 在应力集中处预置不同长度的初始裂纹用以描述InSb晶片中的位错, 以能量释放率为判据, 探究InSb芯片碎裂与迸溅金点和位错线长短的关系. 结论如下: 1) 迸溅金点的存在对InSb芯片碎裂的影响是局部的, 在迸溅金点与InSb芯片接触区域的两侧会形成两个应力集中点; 2) 环绕预置裂纹的能量释放率会随着预置裂纹长度的增加而加速增大, 当预置裂纹长度接近InSb芯片上表面时, 能量释放率近乎指数增加, 并在预置裂纹贯穿InSb芯片时达到最大值; 3) 迸溅金点引起的InSb芯片破碎属于I型断裂失效模式, 在多周期液氮冲击中, 位错线在应力集中效应的驱使下逐步扩展, 直至贯穿InSb芯片, 最终形成宏观碎裂失效现象.
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关键词:
- 锑化铟红外焦平面探测器 /
- 迸溅金点 /
- 热应力分布 /
- 能量释放率
Local cleavage of indium antimonide (InSb) chip always occurs in the manufacture of the InSb infrared focal plane detectors (IRFPAs), and this specific fracture phenomenon restricts the improvement of the yield of the InSb IRFPAs. After analysis, we think that the cleavage of InSb chip in the edge region of the InSb IRFPAs is related to the splashed gold bump existing in this region, and this failure phenomenon dominates in the low-cyclic liquid nitrogen shocking tests. In order to clarify the influence of the splashed gold bump on the cleavage of the InSb chip, we establish a structural model of the InSb IRFPAs containing the splashed gold bump, and analyze the influence of the splashed gold bump on the thermal stress distribution in the InSb chip. Besides, we preset the initial cracks with different lengths at the stress concentration sites to describe the dislocations in InSb wafers. Using the energy release rate as criterion, we obtain the relationship between the cleavage of the InSb chip and the dislocation line length in the presence of splashed gold bump. The main conclusions are drawn as follows. 1) The influence of the splashed gold bump on the cleavage of the InSb chip is localized, and two stress concentration sites are formed in the outermost part of the contact region between the splashed gold bump and the InSb chip. 2) The energy release rate surrounding the preset crack increases promptly with the preset crack length increasing. 3) Cleavage of the InSb chip caused by the splashed gold bump belongs to the type I fracture failure mode. In the cyclic liquid nitrogen shocking tests, the dislocation line gradually punches through the InSb chip under the driving of the concentrating stress, and forms the macro cleavage of the InSb chip.-
Keywords:
- InSb infrared focal plane detectors /
- splashed gold bump /
- thermal stress distribution /
- energy release rate








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