搜索

x
中国物理学会期刊

1550 nm毫瓦级单横模垂直腔面发射半导体激光器

CSTR: 32037.14.aps.71.20212132

1550-nm vertical-cavity surface-emitting laser with single-mode power of milliwatts

CSTR: 32037.14.aps.71.20212132
PDF
HTML
导出引用
  • 报道了国内首次实现出光功率达到毫瓦量级的单横模1550 nm波段垂直腔面发射半导体激光器(vertical-cavity surface-emitting laser, VCSEL). 设计了基于InAlGaAs四元量子阱的应变发光区结构; 设计并制备了具有隧穿特性的台面结构, 实现了对载流子空穴的高效注入及横向模式调控; 采用半导体分布式布拉格反射镜与介质反射镜结合的方式制备了1550 nm VCSEL的反射镜结构. VCSEL中心波长位于1547.6 nm, 工作温度为15 ℃时最高出光功率可达到2.6 mW, 最高单模出光功率达到0.97 mW, 最大边模抑制比达到35 dB. 随着工作温度增加, 激光器最高出光功率由于发光区增益衰减而降低, 然而35 ℃下最大出光功率仍然可以达到1.3 mW. 激光器中心波长随工作电流漂移系数为0.13 nm/mA, 并且激光波长在单模工作区呈现出非常一致的漂移速度, 在气体探测领域具有很好的应用潜力. 本研究为下一步通过高密度集成获得高功率1550 nm VCSEL列阵奠定了基础.

     

    We report on a 1550-nm vertical-cavity surface-emitting laser (VCSEL) with single mode power of 0.97 mW. The quaternary AlGaInAs quantum well is designed to improve the gain level in an active region. The mesa structure with tunneling capability is designed and fabricated to achieve the efficient carrier injection and the transverse mode guiding. The distributed Bragg reflector (DBR) mirror of 1550 nm VCSEL consists of the semiconductor DBR and outer dielectric DBR. The central wavelength of VCSEL is 1547.6 nm. The maximum output power of 2.6 mW is achieved at 15 ℃, and the maximum single-mode output power is 0.97 mW. The side mode suppression ratio (SMSR) can reach more than 35 dB. The maximum output power decreases with operation temperature increasing. However, the maximum output power of more than 1.3 mW is also gained at 35 ℃. The shift coefficient of the central wavelength varying with the operation current is 0.13 nm/mA. And the wavelength shows a stable shift with the operation current in the single-mode working region, which indicates the application possibility in the field of gas detection.

     

    目录

    /

    返回文章
    返回