搜索

x
中国物理学会期刊

基于硅基微电子机械系统仿生振膜的光纤麦克风

CSTR: 32037.14.aps.71.20212229

Fiber-optic microphone based on bionic silicon micro-electro-mechanical system diaphragm

CSTR: 32037.14.aps.71.20212229
PDF
HTML
导出引用
  • 仿蝇耳声传感器是一种对声压梯度敏感的指向性微型麦克风. 本文设计制备了桥连耦合双翼形硅基微电子机械系统仿蝇耳振膜, 利用该振膜制作了光纤Fabry-Pérot干涉式麦克风, 并对这种麦克风的特性进行了理论与实验研究. 仿真结果指出: 这种仿生振膜具有摇摆和弯曲两种振动模态, 单位声压下摇摆模态的振幅依赖于入射声波的频率与传播方向, 频率越接近摇摆模态本征值, 振幅越大; 摇摆模态振幅随传播方向在三维空间的变化呈纺锤形分布, 纺锤的长轴平行于振膜的长轴, 意味着传播方向平行于振膜长轴时麦克风灵敏度最高. 实验测得的光纤仿生麦克风的摇摆模态本征频率略小于仿真值, 其输出信号振幅随声源水平方位角的变化呈“8”字形分布, 在0°—± 60°方位角范围二者呈线性关系, 由此得出麦克风的方向灵敏度为39.98 mV/(°).

     

    The bionic sound detector based on the principle of the Ormia ochracea fly’s coupled ears is a miniature directional microphone that is sensitive to the sound pressure gradient. In this work, a silicon micro-electro-mechanical system bionic diaphragm consisting of two interconnected wings is designed and prepared, and a fiber-optic Fabry-Pérot interferometric microphone is constructed using the bionic diaphragm, and the characteristics of this microphone are studied theoretically and experimentally. According to the simulation results, the bionic diaphragm has two vibration modes of rocking and bending, and the rocking-mode displacement amplitude at a given sound pressure depends on the frequency and the propagation direction of the incident sound wave, and the closer to the eigenfrequency of the rocking mode the sound frequency, the greater the amplitude is; the rocking-mode displacement amplitude changes with the propagation direction in the three-dimensional space, resulting in a spindle-shaped distribution, and the long axis of the spindle is parallel to the long axis of the diaphragm, implying that the microphone is most sensitive to the sound wave propagating along the long axis of the diaphragm. The rocking-mode resonance frequency of the fiber-optic bionic microphone is measured to be slightly smaller than the simulated value. The output signal amplitude of the microphone changes with the horizontal azimuth angle of the sound source, producing a figure-8 polar pattern. A linear relationship between the microphone response and the azimuth angle is obtained in a range of 0° – ±60°, and in this angle range the directional sensitivity of the microphone is 39.98 mV/(°).

     

    目录

    /

    返回文章
    返回