-
随着芯片尺寸不断缩小, 短沟道效应、热效应日趋显著. 开发全新的量子材料体系以实现高性能芯片器件应用已成为当前科技发展的迫切需求. 二维材料作为一类重要的量子材料, 其天然具备原子层厚度和平面结构, 能够有效克服短沟道效应并兼容当代微纳加工工艺, 非常有望应用于新一代高性能器件方向. 与硅基芯片发展类似, 二维材料芯片级器件应用必须基于高质量、大尺寸的二维单晶材料制造. 然而, 由于二维材料的表界面特性, 现有体单晶制备技术不能完全适用于单原子层结构的二维单晶制造. 因此, 亟需发展新的制备策略以实现大尺寸、高质量的二维单晶原子制造. 有鉴于此, 本文重点综述表界面调控二维单晶大尺寸制备技术发展现状, 总结梳理了米级二维单晶原子制造过程中的3个关键调控方向, 即单畴生长调控、单晶衬底制备和多畴取向控制. 最后, 系统展望了大尺寸二维单晶在未来规模化芯片器件方向的潜在应用前景.With the shrinkage of the chip feature size, the short-channel effect becomes more and more predominate. The development of new quantum materials for high-performance devices has become imperative for the current technological development. Two-dimensional (2D) materials, due to their excellent physical and chemical properties, are thought to be the promising candidate of quantum materials for achieving the high-end electronic and optoelectronic devices. Like the development of silicon-based chips, the wafer-scale device applications of 2D materials must be based on the fabrication of high-quality, large-size 2D single crystals. However, the existing manufacturing techniques of the well-studied bulk single crystals cannot be fully applied to the fabrication of 2D single crystals due to the interfacial characteristics of 2D materials. So far, single crystals of metre-sized graphene, decimetre-sized hBN and wafer-sized TMDCs have been successfully prepared by chemical vapor deposition, but the sizes of other 2D single crystals are still very limited and not in the same league as conventional semiconductor materials. Therefore, it is urgent to develop an effective preparation strategy for the manufacture of various 2D single crystals. In this review, we mainly overview the fabrication techniques for the meter-scale growth of 2D single crystals, and propose three key modulation aspects in the atomic-scale manufacture, i.e. the growth modulation of 2D single nucleus, the preparation of single-crystal substrates, and the alignment control of 2D single-crystal domains, in order to provide a universal method of fabricating the large-size 2D single crystals. Finally, the prospect of chip devices based on these high-quality large-size novel 2D single crystals is discussed, thereby paving the way for the future industrial applications of electronics and optoelectronics.
[1] Keyes R W 2005 Rep. Prog. Phys. 68 2701
Google Scholar
[2] Geim A K, Novoselov K S 2007 Nat. Mater. 6 183
Google Scholar
[3] Novoselov K S, Fal'ko V I, Colombo L, Gellert P R, Schwab M G, Kim K 2012 Nature 490 192
Google Scholar
[4] Desai S B, Madhvapathy S R, Sachid A B, Llinas J P, Wang Q X, Ahn G H, Pitner G, Kim M J, Bokor J, Hu C M, Wong H S P, Javey A 2016 Science 354 99
Google Scholar
[5] Li M Y, Su S K, Wong H S P, Li L J 2019 Nature 567 169
Google Scholar
[6] Banszerus L, Schmitz M, Engels S, Dauber J, Oellers M, Haupt F, Watanabe K, Taniguchi T, Beschoten B, Stampfer C 2015 Sci. Adv. 1 1500222
Google Scholar
[7] Kang K, Xie S, Huang L, Han Y, Huang P Y, Mak K F, Kim C J, Muller D, Park J 2015 Nature 520 656
Google Scholar
[8] Novoselov K S, Mishchenko A, Carvalho A, Castro Neto A H 2016 Science 353 aac9439
Google Scholar
[9] Hong H, Liu C, Cao T, Jin C, Wang S, Wang F, Liu K 2017 Adv. Mater. Interfaces 4 1601054
Google Scholar
[10] Liu C, Hong H, Wang Q, Liu P, Zuo Y, Liang J, Cheng Y, Zhou X, Wang J, Zhao Y, Xiong J, Xiang B, Zhang J, Liu K 2019 Nanoscale 11 17195
Google Scholar
[11] Novoselov K S, Geim A K, Morozov S V, Jiang D, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Science 306 666
Google Scholar
[12] Wang F, Zhang Y, Tian C, Girit C, Zettl A, Crommie M, Shen Y R 2008 Science 320 206
Google Scholar
[13] Carvalho A, Wang M, Zhu X, Rodin A S, Su H, Castro Neto A H 2016 Nat. Rev. Mater. 1 16061
Google Scholar
[14] Manzeli S, Ovchinnikov D, Pasquier D, Yazyev O V, Kis A 2017 Nat. Rev. Mater. 2 17033
Google Scholar
[15] Liu B, Ma Y, Zhang A, Chen L, Abbas A N, Liu Y, Shen C, Wan H, Zhou C 2016 ACS Nano 10 5153
Google Scholar
[16] Li L, Han W, Pi L, Niu P, Han J, Wang C, Su B, Li H, Xiong J, Bando Y, Zhai T 2019 InfoMat 1 54
Google Scholar
[17] Meng L, Wang Y, Zhang L, Du S, Wu R, Li L, Zhang Y, Li G, Zhou H, Hofer W A, Gao H J 2013 Nano Lett. 13 685
Google Scholar
[18] Watanabe K, Taniguchi T, Kanda H 2004 Nat. Mater. 3 404
Google Scholar
[19] Xu M, Liang T, Shi M, Chen H 2013 Chem. Rev. 113 3766
Google Scholar
[20] Gong C, Li L, Li Z, Ji H, Stern A, Xia Y, Cao T, Bao W, Wang C, Wang Y, Qiu Z Q, Cava R J, Louie S G, Xia J, Zhang X 2017 Nature 546 265
Google Scholar
[21] Deng Y, Yu Y, Song Y, Zhang J, Wang N Z, Sun Z, Yi Y, Wu Y Z, Wu S, Zhu J, Wang J, Chen X H, Zhang Y 2018 Nature 563 94
Google Scholar
[22] Jiang S, Li L, Wang Z, Mak K F, Shan J 2018 Nat. Nanotechnol. 13 549
Google Scholar
[23] Huang B, Clark G, Klein D R, MacNeill D, Navarro-Moratalla E, Seyler K L, Wilson N, McGuire M A, Cobden D H, Xiao D, Yao W, Jarillo-Herrero P, Xu X 2018 Nat. Nanotechnol. 13 544
Google Scholar
[24] Gibertini M, Koperski M, Morpurgo A F, Novoselov K S 2019 Nat. Nanotechnol. 14 408
Google Scholar
[25] Wen Y, Liu Z, Zhang Y, Xia C, Zhai B, Zhang X, Zhai G, Shen C, He P, Cheng R, Yin L, Yao Y, Getaye Sendeku M, Wang Z, Ye X, Liu C, Jiang C, Shan C, Long Y, He J 2020 Nano Lett. 20 3130
Google Scholar
[26] Bonilla M, Kolekar S, Ma Y, Diaz H C, Kalappattil V, Das R, Eggers T, Gutierrez H R, Phan M H, Batzill M 2018 Nat. Nanotechnol. 13 289
Google Scholar
[27] Yang H, Heo J, Park S, Song H J, Seo D H, Byun K E, Kim P, Yoo I, Chung H J, Kim K 2012 Science 336 1140
Google Scholar
[28] Goossens S, Navickaite G, Monasterio C, Gupta S, Piqueras J J, Pérez R, Burwell G, Nikitskiy I, Lasanta T, Galán T, Puma E, Centeno A, Pesquera A, Zurutuza A, Konstantatos G, Koppens F 2017 Nat. Photonics 11 366
Google Scholar
[29] Sun L, Zhang Y, Han G, Hwang G, Jiang J, Joo B, Watanabe K, Taniguchi T, Kim Y M, Yu W J, Kong B S, Zhao R, Yang H 2019 Nat. Commun. 10 3161
Google Scholar
[30] Xia F, Wang H, Xiao D, Dubey M, Ramasubramaniam A 2014 Nat. Photonics 8 899
Google Scholar
[31] Wang Q H, Kalantar-Zadeh K, Kis A, Coleman J N, Strano M S 2012 Nat. Nanotechnol. 7 699
Google Scholar
[32] Li C, Cao Q, Wang F, Xiao Y, Li Y, Delaunay J J, Zhu H 2018 Chem. Soc. Rev. 47 4981
Google Scholar
[33] Zuo Y, Yu W, Liu C, Cheng X, Qiao R, Liang J, Zhou X, Wang J, Wu M, Zhao Y, Gao P, Wu S, Sun Z, Liu K, Bai X, Liu Z 2020 Nat. Nanotechnol. 15 987
Google Scholar
[34] Stockbarger D C 1936 Rev. Sci. Instrum. 7 133
Google Scholar
[35] Czocbralski J 1918 Z. Phys. Chem. 92 219
Google Scholar
[36] Novoselov K S, Geim A K, Morozov S V, Jiang D, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Sciences 306 666
[37] Zhang Y, Tan Y W, Stormer H L, Kim P 2005 Nature 438 201
Google Scholar
[38] Huang Y, Sutter E, Shi N N, Zheng J, Yang T, Englund D, Gao H J, Sutter P 2015 ACS Nano 9 10612
Google Scholar
[39] Cai X, Luo Y, Liu B, Cheng H M 2018 Chem. Soc. Rev. 47 6224
Google Scholar
[40] Yi M, Shen Z 2015 J. Mater. Chem. A 3 11700
Google Scholar
[41] Huang Y, Pan Y H, Yang R, Bao L H, Meng L, Luo H L, Cai Y Q, Liu G D, Zhao W J, Zhou Z, Wu L M, Zhu Z L, Huang M, Liu L W, Liu L, Cheng P, Wu K H, Tian S B, Gu C Z, Shi Y G, Guo Y F, Cheng Z G, Hu J P, Zhao L, Yang G H, Sutter E, Sutter P, Wang Y L, Ji W, Zhou X J, Gao H J 2020 Nat. Commun. 11 2453
Google Scholar
[42] Halim U, Zheng C R, Chen Y, Lin Z, Jiang S, Cheng R, Huang Y, Duan X 2013 Nat. Commun. 4 2213
Google Scholar
[43] Coleman J N 2013 Acc. Chem. Res. 46 14
Google Scholar
[44] Cui X, Zhang C, Hao R, Hou Y 2011 Nanoscale 3 2118
Google Scholar
[45] Ciesielski A, Samori P 2014 Chem. Soc. Rev. 43 381
Google Scholar
[46] Zhang C, Tan J, Pan Y, Cai X, Zou X, Cheng H M, Liu B 2020 Natl. Sci. Rev. 7 324
Google Scholar
[47] Hao Y F, Bharathi M S, Wang L, Liu Y Y, Chen H, Nie S, Wang X H, Chou H, Tan C, Fallahazad B, Ramanarayan H, Magnuson C W, Tutuc E, Yakobson B I, McCarty K F, Zhang Y W, Kim P, Hone J, Colombo L, Ruoff R S 2013 Science 342 720
Google Scholar
[48] Yan K, Fu L, Peng H, Liu Z 2013 Acc. Chem. Res. 46 2263
Google Scholar
[49] Geng D, Wu B, Guo Y, Huang L, Xue Y, Chen J, Yu G, Jiang L, Hu W, Liu Y 2012 Proc. Natl. Acad. Sci. USA 109 7992
Google Scholar
[50] Yan Z, Lin J, Peng Z, Sun Z, Zhu Y, Li L, Xiang C, Samuel E L, Kittrell C, Tour J M 2012 ACS Nano 6 9110
Google Scholar
[51] Reina A, Jia X, Ho J, Nezich D, Son H, Bulovic V, Dresselhaus M S, Kong J 2009 Nano Lett. 9 30
Google Scholar
[52] Li E, Wang D, Fan P, Zhang R, Zhang Y Y, Li G, Mao J, Wang Y, Lin X, Du S, Gao H J 2018 Nano Res. 11 5858
Google Scholar
[53] Chen M W, Ovchinnikov D, Lazar S, Pizzochero M, Whitwick M B, Surrente A, Baranowski M, Sanchez O L, Gillet P, Plochocka P, Yazyev O V, Kis A 2017 ACS Nano 11 6355
Google Scholar
[54] Nakhaie S, Wofford J M, Schumann T, Jahn U, Ramsteiner M, Hanke M, Lopes J M J, Riechert H 2015 Appl. Phys. Lett. 106 213108
Google Scholar
[55] Xu X, Zhang Z, Dong J, Yi D, Niu J, Wu M, Lin L, Yin R, Li M, Zhou J, Wang S, Sun J, Duan X, Gao P, Jiang Y, Wu X, Peng H, Ruoff R S, Liu Z, Yu D, Wang E, Ding F, Liu K 2017 Sci. Bull. 62 1074
Google Scholar
[56] Liu C, Xu X, Qiu L, Wu M, Qiao R, Wang L, Wang J, Niu J, Liang J, Zhou X, Zhang Z, Peng M, Gao P, Wang W, Bai X, Ma D, Jiang Y, Wu X, Yu D, Wang E, Xiong J, Ding F, Liu K 2019 Nat. Chem. 11 730
Google Scholar
[57] Zhang Z, Qi J, Zhao M, Shang N, Cheng Y, Qiao R, Zhang Z, Ding M, Li X, Liu K, Xu X, Liu K, Liu C, Wu M 2020 Chinese Phys. Lett. 37 108101
Google Scholar
[58] Wang L, Xu X, Zhang L, Qiao R, Wu M, Wang Z, Zhang S, Liang J, Zhang Z, Zhang Z, Chen W, Xie X, Zong J, Shan Y, Guo Y, Willinger M, Wu H, Li Q, Wang W, Gao P, Wu S, Zhang Y, Jiang Y, Yu D, Wang E, Bai X, Wang Z J, Ding F, Liu K 2019 Nature 570 91
Google Scholar
[59] Li T, Guo W, Ma L, Li W, Yu Z, Han Z, Gao S, Liu L, Fan D, Wang Z, Yang Y, Lin W, Luo Z, Chen X, Dai N, Tu X, Pan D, Yao Y, Wang P, Nie Y, Wang J, Shi Y, Wang X 2021 Nat. Nanotechnol. 16 1201
Google Scholar
[60] Wang J, Xu X, Cheng T, Gu L, Qiao R, Liang Z, Ding D, Hong H, Zheng P, Zhang Z, Zhang Z, Zhang S, Cui G, Chang C, Huang C, Qi J, Liang J, Liu C, Zuo Y, Xue G, Fang X, Tian J, Wu M, Guo Y, Yao Z, Jiao Q, Liu L, Gao P, Li Q, Yang R, Zhang G, Tang Z, Yu D, Wang E, Lu J, Zhao Y, Wu S, Ding F, Liu K 2022 Nat. Nanotechnol. 17 33
Google Scholar
[61] Yu Q, Jauregui L A, Wu W, Colby R, Tian J, Su Z, Cao H, Liu Z, Pandey D, Wei D, Chung T F, Peng P, Guisinger N P, Stach E A, Bao J, Pei S S, Chen Y P 2011 Nat. Mater. 10 443
Google Scholar
[62] Huang P Y, Ruiz-Vargas C S, van der Zande A M, Whitney W S, Levendorf M P, Kevek J W, Garg S, Alden J S, Hustedt C J, Zhu Y, Park J, McEuen P L, Muller D A 2011 Nature 469 389
Google Scholar
[63] Ruiz-Vargas C S, Zhuang H L, Huang P Y, van der Zande A M, Garg S, McEuen P L, Muller D A, Hennig R G, Park J 2011 Nano Lett. 11 2259
Google Scholar
[64] Hammer B, Norskov J K 1995 Nature 376 238
Google Scholar
[65] Chen H, Zhu W, Zhang Z 2010 Phys. Rev. Lett. 104 186101
Google Scholar
[66] Gao J, Yip J, Zhao J, Yakobson B I, Ding F 2011 J. Am. Chem. Soc. 133 5009
Google Scholar
[67] Han G H, Gunes F, Bae J J, Kim E S, Chae S J, Shin H J, Choi J Y, Pribat D, Lee Y H 2011 Nano Lett. 11 4144
Google Scholar
[68] Wang H, Wang G, Bao P, Yang S, Zhu W, Xie X, Zhang W J 2012 J. Am. Chem. Soc. 134 3627
Google Scholar
[69] Li X, Magnuson C W, Venugopal A, Tromp R M, Hannon J B, Vogel E M, Colombo L, Ruoff R S 2011 J. Am. Chem. Soc. 133 2816
Google Scholar
[70] Ding G, Zhu Y, Wang S, Gong Q, Sun L, Wu T, Xie X, Jiang M 2013 Carbon 53 321
Google Scholar
[71] Zeng M, Tan L, Wang J, Chen L, Rümmeli M H, Fu L 2014 Chem. Mater. 26 3637
Google Scholar
[72] Zang X, Zhou Q, Chang J, Teh K S, Wei M, Zettl A, Lin L 2017 Adv. Mater. Interfaces 4 1600783
Google Scholar
[73] Zhou H, Yu W J, Liu L, Cheng R, Chen Y, Huang X, Liu Y, Wang Y, Huang Y, Duan X 2013 Nat. Commun. 4 2096
Google Scholar
[74] Gan L, Luo Z 2013 ACS Nano 7 9480
Google Scholar
[75] Guo W, Jing F, Xiao J, Zhou C, Lin Y, Wang S 2016 Adv. Mater. 28 3152
Google Scholar
[76] Lin L, Li J, Ren H, Koh A L, Kang N, Peng H, Xu H Q, Liu Z 2016 ACS Nano 10 2922
Google Scholar
[77] Wang H, Xue X, Jiang Q, Wang Y, Geng D, Cai L, Wang L, Xu Z, Yu G 2019 J. Am. Chem. Soc. 141 11004
Google Scholar
[78] Zhu J, Xu H, Zou G, Zhang W, Chai R, Choi J, Wu J, Liu H, Shen G, Fan H 2019 J. Am. Chem. Soc. 141 5392
Google Scholar
[79] Kim H, Ovchinnikov D, Deiana D, Unuchek D, Kis A 2017 Nano Lett. 17 5056
Google Scholar
[80] Chen W, Zhao J, Zhang J, Gu L, Yang Z, Li X, Yu H, Zhu X, Yang R, Shi D, Lin X, Guo J, Bai X, Zhang G 2015 J. Am. Chem. Soc. 137 15632
Google Scholar
[81] Chen J, Tang W, Tian B, Liu B, Zhao X, Liu Y, Ren T, Liu W, Geng D, Jeong H Y, Shin H S, Zhou W, Loh K P 2016 Adv. Sci. 3 1500033
Google Scholar
[82] Wu T, Zhang X, Yuan Q, Xue J, Lu G, Liu Z, Wang H, Wang H, Ding F, Yu Q, Xie X, Jiang M 2016 Nat. Mater. 15 43
Google Scholar
[83] Vlassiouk I V, Stehle Y, Pudasaini P R, Unocic R R, Rack P D, Baddorf A P, Ivanov I N, Lavrik N V, List F, Gupta N, Bets K V, Yakobson B I, Smirnov S N 2018 Nat. Mater. 17 318
Google Scholar
[84] Xu X, Zhang Z, Qiu L, Zhuang J, Zhang L, Wang H, Liao C, Song H, Qiao R, Gao P, Hu Z, Liao L, Liao Z, Yu D, Wang E, Ding F, Peng H, Liu K 2016 Nat. Nanotechnol. 11 930
Google Scholar
[85] Chung J W, Dai Z R, Ohuchi F S 1998 J. Cryst. Growth 186 137
Google Scholar
[86] Cun H, Macha M, Kim H, Liu K, Zhao Y, LaGrange T, Kis A, Radenovic A 2019 Nano Res. 12 2646
Google Scholar
[87] Eichfeld S M, Hossain L, Lin Y C, Piasecki A F, Kupp B, Birdwell A G, Burke R A, Lu N, Peng X, Li J, Azcatl A, McDonnell S, Wallace R M, Kim M J, Mayer T S, Redwing J M, Robinson J A 2015 ACS Nano 9 2080
Google Scholar
[88] Ishihara S, Hibino Y, Sawamoto N, Machida H, Wakabayashi H, Ogura A 2018 MRS Adv. 3 379
Google Scholar
[89] Eichfeld S M, Hossain L, Lin Y C, Piasecki A F, Kupp B, Birdwell A G, Burke R A, Lu N, Peng X, Li J, Azcatl A, McDonnell S, Wallace R M, Kim M J, Mayer T S, Redwing J M, Robinson J A 2015 ACS Nano. 9 2080
[90] Shu H, Chen X, Tao X, Ding F 2012 ACS Nano 6 3243
Google Scholar
[91] Ma T, Ren W, Zhang X, Liu Z, Gao Y, Yin L C, Ma X L, Ding F, Cheng H M 2013 Proc. Natl. Acad. Sci. USA 110 20386
Google Scholar
[92] Patera L L, Bianchini F, Africh C, Dri C, Soldano G, Mariscal M M, Peressi M, Comelli G 2018 Science 359 1243
Google Scholar
[93] Gao Y, Hong Y L, Yin L C, Wu Z, Yang Z, Chen M L, Liu Z, Ma T, Sun D M, Ni Z, Ma X L, Cheng H M, Ren W 2017 Adv. Mater. 29 1700990
Google Scholar
[94] Lee J H, Lee E K, Joo W J, Jang Y, Kim B S, Lim J Y, Choi S H, Ahn S J, Ahn J R, Park M H, Yang C W, Choi B L, Hwang S W, Whang D 2014 Science 344 286
Google Scholar
[95] Li X, Cai W, An J, Kim S, Nah J, Yang D, Piner R, Velamakanni A, Jung I, Tutuc E, Banerjee S K, Colombo L, Ruoff R S 2009 Science 324 1312
Google Scholar
[96] Nguyen V L, Perello D J, Lee S, Nai C T, Shin B G, Kim J G, Park H Y, Jeong H Y, Zhao J, Vu Q A, Lee S H, Loh K P, Jeong S Y, Lee Y H 2016 Adv. Mater. 28 8177
Google Scholar
[97] Deng B, Pang Z, Chen S, Li X, Meng C, Li J, Liu M, Wu J, Qi Y, Dang W, Yang H, Zhang Y, Zhang J, Kang N, Xu H, Fu Q, Qiu X, Gao P, Wei Y, Liu Z, Peng H L 2017 ACS Nano 11 12337
Google Scholar
[98] Nguyen V L, Shin B G, Duong D L, Kim S T, Perello D, Lim Y J, Yuan Q H, Ding F, Jeong H Y, Shin H S, Lee S M, Chae S H, Vu Q A, Lee S H, Lee Y H 2015 Adv. Mater. 27 1376
Google Scholar
[99] Jin S, Huang M, Kwon Y, Zhang L, Li B W, Oh S, Dong J, Luo D, Biswal M, Cunning B V, Bakharev P V, Moon I, Yoo W J, Camacho-Mojica D C, Kim Y J, Lee S H, Wang B, Seong W K, Saxena M, Ding F, Shin H J, Ruoff R S 2018 Science 362 1021
Google Scholar
[100] Wu M, Zhang Z, Xu X, Zhang Z, Duan Y, Dong J, Qiao R, You S, Wang L, Qi J, Zou D, Shang N, Yang Y, Li H, Zhu L, Sun J, Yu H, Gao P, Bai X, Jiang Y, Wang Z J, Ding F, Yu D, Wang E, Liu K 2020 Nature 581 406
Google Scholar
[101] Li Y, Sun L, Chang Z, Liu H, Wang Y, Liang Y, Chen B, Ding Q, Zhao Z, Wang R, Wei Y, Peng H, Lin L, Liu Z 2020 Adv. Mater. 32 2002034
Google Scholar
[102] Zhang J, Lin L, Jia K, Sun L, Peng H, Liu Z 2020 Adv. Mater. 32 1903266
Google Scholar
[103] Fu D, Zhao X, Zhang Y Y, Li L, Xu H, Jang A R, Yoon S I, Song P, Poh S M, Ren T, Ding Z, Fu W, Shin T J, Shin H S, Pantelides S T, Zhou W, Loh K P 2017 J. Am. Chem. Soc. 139 9392
Google Scholar
[104] Song X, Gao J, Nie Y, Gao T, Sun J, Ma D, Li Q, Chen Y, Jin C, Bachmatiuk A, Rümmeli M H, Ding F, Zhang Y, Liu Z 2015 Nano Res. 8 3164
Google Scholar
[105] Li J, Li Y, Yin J, Ren X, Liu X, Jin C, Guo W 2016 Small 12 3645
Google Scholar
[106] Chen T A, Chuu C P, Tseng C C, Wen C K, Wong H P, Pan S, Li R, Chao T A, Chueh W C, Zhang Y, Fu Q, Yakobson B I, Chang W H, Li L J 2020 Nature 579 219
Google Scholar
[107] Chen L, Liu B, Ge M, Ma Y, Abbas A N, Zhou C 2015 ACS Nano 9 8368
Google Scholar
[108] Yang P, Zhang S, Pan S, Tang B, Liang Y, Zhao X, Zhang Z, Shi J, Huan Y, Shi Y, Pennycook S J, Ren Z, Zhang G, Chen Q, Zou X, Liu Z, Zhang Y 2020 ACS Nano 14 5036
Google Scholar
[109] Yu H, Liao M, Zhao W, Liu G, Zhou X J, Wei Z, Xu X, Liu K, Hu Z, Deng K, Zhou S, Shi J A, Gu L, Shen C, Zhang T, Du L, Xie L, Zhu J, Chen W, Yang R, Shi D, Zhang G 2017 ACS Nano 11 12001
Google Scholar
[110] Wang Q, Li N, Tang J, Zhu J, Zhang Q, Jia Q, Lu Y, Wei Z, Yu H, Zhao Y, Guo Y, Gu L, Sun G, Yang W, Yang R, Shi D, Zhang G 2020 Nano Lett. 20 7193
Google Scholar
[111] Choi S H, Kim H J, Song B, Kim Y I, Han G, Nguyen H T T, Ko H, Boandoh S, Choi J H, Oh C S, Cho H J, Jin J W, Won Y S, Lee B H, Yun S J, Shin B G, Jeong H Y, Kim Y M, Han Y K, Lee Y H, Kim S M, Kim K K 2021 Adv. Mater. 33 2006601
Google Scholar
[112] Xue X, Xu Q, Wang H, Liu S, Jiang Q, Yu Z, Zhou X, Ma T, Wang L, Yu G 2019 Chem. Mater. 31 1231
Google Scholar
[113] Zeng M, Wang L, Liu J, Zhang T, Xue H, Xiao Y, Qin Z, Fu L 2016 J. Am. Chem. Soc. 138 7812
Google Scholar
[114] Lee J S, Choi S H, Yun S J, Kim Y I, Boandoh S, Park J H, Shin B G, Ko H, Lee S H, Kim Y M, Lee Y H, Kim K K, Kim S M 2018 Science 362 817
Google Scholar
-
图 1 大尺寸二维单晶制备3个关键调控方向
Fig. 1. Schematic illustration of three key aspects for the growth of large-size 2D single crystals.
图 2 二维材料单畴生长调控 (a)氧辅助铜箔上石墨烯晶畴生长的光学图像[47]; (b)石墨烯晶畴生长速率dr/dt与1/T的对数曲线[47]; (c)控制单个晶畴形核并长大示意图; (d)局域氧元素供应方法的实验设计示意图[84]; (e)局域氟元素供应反应能量曲线[56]; (f)同位素标记局域氟辅助石墨烯晶畴生长速率结果[56]; (g)金箔上WSe2晶畴快速生长光学结果[93]
Fig. 2. Growth modulation of 2D single nucleus: (a) Optical image of centimeter-scale graphene domains on oxygen-rich Cu exposed to O2[47]; (b) logarithmic plots of graphene domain growth rate dr/dt versus 1/T[47]; (c) schematic illustration of controlling single nucleus growth; (d) schematic illustration of the experimental design of local-oxygen-feeding method[84]; (e) the corresponding energy profile of carbon species with the assistance of local fluorine[56]; (f) isotope-labelled Raman mapping of the 2D band for graphene domain grown by local fluorine supply[56]; (g) optical image of single-crystal monolayer WSe2 domain grown on an Au foil[93]
图 3 单晶衬底制备 (a) 2 in蓝宝石衬底上沉积Cu(111)薄膜[96]; (b) Cu(111)表面原子力显微镜图像[96]; (c)温度梯度驱动单晶Cu(111)箔片实验设计图[55]; (d)退火获得的5 cm×50 cm大尺寸单晶Cu(111)箔[55]; (e)氧化层界面驱动A4纸尺寸高指数Cu(hkl)制备[100]; (f)高指数单晶铜箔电子背散射衍射反极图[101]
Fig. 3. Preparation of single-crystal substrate: (a) A photograph of 2 in Cu(111) film on sapphire[96]; (b) atomic force microscopic image of Cu(111) film with noncontact mode[96]; (c) schematic illustration of experimental design for the continuous production of single-crystal Cu(111) foil with a hot temperature zone at the central area of the furnace tube[55]; (d) the obtained 5 cm×50 cm single-crystal Cu(111) foil[55]; (e) the preparation of high-index Cu(hkl) with typical size of 35 cm×21 cm driven by oxide layer[100]; (f) electron backscatter diffraction inverse pole figure maps of the as-prepared high-index single-crystal Cu foils[101].
图 4 二维单晶多畴取向控制 (a) Cu(111)上单晶石墨烯晶畴取向排列[55]; (b) Cu(110)表面
$\left\langle {211} \right\rangle $ 方向原子台阶只倾向与hBN的N原子进行结合[58]; (c) Cu(110)衬底上hBN晶畴单一取向排列[58]; (d)在蓝宝石衬底上单层MoS2晶畴拼接的高分辨透射电子显微镜图像[109]; (e) Au(111)衬底上台阶诱导MoS2形核以及外延取向控制示意图[108]; (f) WS2晶畴沿Al2O3$\langle {1 \bar{1}01} \rangle$ 台阶方向形核生长的原子力显微镜结果[60]; (g) 2 in蓝宝石衬底上满覆盖单层WS2照片[60]Fig. 4. Alignment control of 2D single-crystal domains: (a) Optical image of unidirectionally aligned graphene domains grown on Cu(111)[55]; (b) Cu
$\left\langle {211} \right\rangle $ atomic steps tend to connect with the N atom of hBN[58]; (c) scanning electron microscopic image of as-grown aligned hBN domains on the Cu(110) substrate[58]; (d) high-resolution transmission electron microscopic image of the stitched domain boundary in monolayer MoS2 on sapphire substrate[109]; (e) schematic illustration of MoS2 nucleation and epitaxial growth process on Au(111) substrate[108]; (f) WS2 domain grown along the Al2O3$\langle {1 \bar{1}01} \rangle$ steps[60]; (g) photograph of the full-coverage WS2 monolayer on a 2 in sapphire substrate[60]. -
[1] Keyes R W 2005 Rep. Prog. Phys. 68 2701
Google Scholar
[2] Geim A K, Novoselov K S 2007 Nat. Mater. 6 183
Google Scholar
[3] Novoselov K S, Fal'ko V I, Colombo L, Gellert P R, Schwab M G, Kim K 2012 Nature 490 192
Google Scholar
[4] Desai S B, Madhvapathy S R, Sachid A B, Llinas J P, Wang Q X, Ahn G H, Pitner G, Kim M J, Bokor J, Hu C M, Wong H S P, Javey A 2016 Science 354 99
Google Scholar
[5] Li M Y, Su S K, Wong H S P, Li L J 2019 Nature 567 169
Google Scholar
[6] Banszerus L, Schmitz M, Engels S, Dauber J, Oellers M, Haupt F, Watanabe K, Taniguchi T, Beschoten B, Stampfer C 2015 Sci. Adv. 1 1500222
Google Scholar
[7] Kang K, Xie S, Huang L, Han Y, Huang P Y, Mak K F, Kim C J, Muller D, Park J 2015 Nature 520 656
Google Scholar
[8] Novoselov K S, Mishchenko A, Carvalho A, Castro Neto A H 2016 Science 353 aac9439
Google Scholar
[9] Hong H, Liu C, Cao T, Jin C, Wang S, Wang F, Liu K 2017 Adv. Mater. Interfaces 4 1601054
Google Scholar
[10] Liu C, Hong H, Wang Q, Liu P, Zuo Y, Liang J, Cheng Y, Zhou X, Wang J, Zhao Y, Xiong J, Xiang B, Zhang J, Liu K 2019 Nanoscale 11 17195
Google Scholar
[11] Novoselov K S, Geim A K, Morozov S V, Jiang D, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Science 306 666
Google Scholar
[12] Wang F, Zhang Y, Tian C, Girit C, Zettl A, Crommie M, Shen Y R 2008 Science 320 206
Google Scholar
[13] Carvalho A, Wang M, Zhu X, Rodin A S, Su H, Castro Neto A H 2016 Nat. Rev. Mater. 1 16061
Google Scholar
[14] Manzeli S, Ovchinnikov D, Pasquier D, Yazyev O V, Kis A 2017 Nat. Rev. Mater. 2 17033
Google Scholar
[15] Liu B, Ma Y, Zhang A, Chen L, Abbas A N, Liu Y, Shen C, Wan H, Zhou C 2016 ACS Nano 10 5153
Google Scholar
[16] Li L, Han W, Pi L, Niu P, Han J, Wang C, Su B, Li H, Xiong J, Bando Y, Zhai T 2019 InfoMat 1 54
Google Scholar
[17] Meng L, Wang Y, Zhang L, Du S, Wu R, Li L, Zhang Y, Li G, Zhou H, Hofer W A, Gao H J 2013 Nano Lett. 13 685
Google Scholar
[18] Watanabe K, Taniguchi T, Kanda H 2004 Nat. Mater. 3 404
Google Scholar
[19] Xu M, Liang T, Shi M, Chen H 2013 Chem. Rev. 113 3766
Google Scholar
[20] Gong C, Li L, Li Z, Ji H, Stern A, Xia Y, Cao T, Bao W, Wang C, Wang Y, Qiu Z Q, Cava R J, Louie S G, Xia J, Zhang X 2017 Nature 546 265
Google Scholar
[21] Deng Y, Yu Y, Song Y, Zhang J, Wang N Z, Sun Z, Yi Y, Wu Y Z, Wu S, Zhu J, Wang J, Chen X H, Zhang Y 2018 Nature 563 94
Google Scholar
[22] Jiang S, Li L, Wang Z, Mak K F, Shan J 2018 Nat. Nanotechnol. 13 549
Google Scholar
[23] Huang B, Clark G, Klein D R, MacNeill D, Navarro-Moratalla E, Seyler K L, Wilson N, McGuire M A, Cobden D H, Xiao D, Yao W, Jarillo-Herrero P, Xu X 2018 Nat. Nanotechnol. 13 544
Google Scholar
[24] Gibertini M, Koperski M, Morpurgo A F, Novoselov K S 2019 Nat. Nanotechnol. 14 408
Google Scholar
[25] Wen Y, Liu Z, Zhang Y, Xia C, Zhai B, Zhang X, Zhai G, Shen C, He P, Cheng R, Yin L, Yao Y, Getaye Sendeku M, Wang Z, Ye X, Liu C, Jiang C, Shan C, Long Y, He J 2020 Nano Lett. 20 3130
Google Scholar
[26] Bonilla M, Kolekar S, Ma Y, Diaz H C, Kalappattil V, Das R, Eggers T, Gutierrez H R, Phan M H, Batzill M 2018 Nat. Nanotechnol. 13 289
Google Scholar
[27] Yang H, Heo J, Park S, Song H J, Seo D H, Byun K E, Kim P, Yoo I, Chung H J, Kim K 2012 Science 336 1140
Google Scholar
[28] Goossens S, Navickaite G, Monasterio C, Gupta S, Piqueras J J, Pérez R, Burwell G, Nikitskiy I, Lasanta T, Galán T, Puma E, Centeno A, Pesquera A, Zurutuza A, Konstantatos G, Koppens F 2017 Nat. Photonics 11 366
Google Scholar
[29] Sun L, Zhang Y, Han G, Hwang G, Jiang J, Joo B, Watanabe K, Taniguchi T, Kim Y M, Yu W J, Kong B S, Zhao R, Yang H 2019 Nat. Commun. 10 3161
Google Scholar
[30] Xia F, Wang H, Xiao D, Dubey M, Ramasubramaniam A 2014 Nat. Photonics 8 899
Google Scholar
[31] Wang Q H, Kalantar-Zadeh K, Kis A, Coleman J N, Strano M S 2012 Nat. Nanotechnol. 7 699
Google Scholar
[32] Li C, Cao Q, Wang F, Xiao Y, Li Y, Delaunay J J, Zhu H 2018 Chem. Soc. Rev. 47 4981
Google Scholar
[33] Zuo Y, Yu W, Liu C, Cheng X, Qiao R, Liang J, Zhou X, Wang J, Wu M, Zhao Y, Gao P, Wu S, Sun Z, Liu K, Bai X, Liu Z 2020 Nat. Nanotechnol. 15 987
Google Scholar
[34] Stockbarger D C 1936 Rev. Sci. Instrum. 7 133
Google Scholar
[35] Czocbralski J 1918 Z. Phys. Chem. 92 219
Google Scholar
[36] Novoselov K S, Geim A K, Morozov S V, Jiang D, Zhang Y, Dubonos S V, Grigorieva I V, Firsov A A 2004 Sciences 306 666
[37] Zhang Y, Tan Y W, Stormer H L, Kim P 2005 Nature 438 201
Google Scholar
[38] Huang Y, Sutter E, Shi N N, Zheng J, Yang T, Englund D, Gao H J, Sutter P 2015 ACS Nano 9 10612
Google Scholar
[39] Cai X, Luo Y, Liu B, Cheng H M 2018 Chem. Soc. Rev. 47 6224
Google Scholar
[40] Yi M, Shen Z 2015 J. Mater. Chem. A 3 11700
Google Scholar
[41] Huang Y, Pan Y H, Yang R, Bao L H, Meng L, Luo H L, Cai Y Q, Liu G D, Zhao W J, Zhou Z, Wu L M, Zhu Z L, Huang M, Liu L W, Liu L, Cheng P, Wu K H, Tian S B, Gu C Z, Shi Y G, Guo Y F, Cheng Z G, Hu J P, Zhao L, Yang G H, Sutter E, Sutter P, Wang Y L, Ji W, Zhou X J, Gao H J 2020 Nat. Commun. 11 2453
Google Scholar
[42] Halim U, Zheng C R, Chen Y, Lin Z, Jiang S, Cheng R, Huang Y, Duan X 2013 Nat. Commun. 4 2213
Google Scholar
[43] Coleman J N 2013 Acc. Chem. Res. 46 14
Google Scholar
[44] Cui X, Zhang C, Hao R, Hou Y 2011 Nanoscale 3 2118
Google Scholar
[45] Ciesielski A, Samori P 2014 Chem. Soc. Rev. 43 381
Google Scholar
[46] Zhang C, Tan J, Pan Y, Cai X, Zou X, Cheng H M, Liu B 2020 Natl. Sci. Rev. 7 324
Google Scholar
[47] Hao Y F, Bharathi M S, Wang L, Liu Y Y, Chen H, Nie S, Wang X H, Chou H, Tan C, Fallahazad B, Ramanarayan H, Magnuson C W, Tutuc E, Yakobson B I, McCarty K F, Zhang Y W, Kim P, Hone J, Colombo L, Ruoff R S 2013 Science 342 720
Google Scholar
[48] Yan K, Fu L, Peng H, Liu Z 2013 Acc. Chem. Res. 46 2263
Google Scholar
[49] Geng D, Wu B, Guo Y, Huang L, Xue Y, Chen J, Yu G, Jiang L, Hu W, Liu Y 2012 Proc. Natl. Acad. Sci. USA 109 7992
Google Scholar
[50] Yan Z, Lin J, Peng Z, Sun Z, Zhu Y, Li L, Xiang C, Samuel E L, Kittrell C, Tour J M 2012 ACS Nano 6 9110
Google Scholar
[51] Reina A, Jia X, Ho J, Nezich D, Son H, Bulovic V, Dresselhaus M S, Kong J 2009 Nano Lett. 9 30
Google Scholar
[52] Li E, Wang D, Fan P, Zhang R, Zhang Y Y, Li G, Mao J, Wang Y, Lin X, Du S, Gao H J 2018 Nano Res. 11 5858
Google Scholar
[53] Chen M W, Ovchinnikov D, Lazar S, Pizzochero M, Whitwick M B, Surrente A, Baranowski M, Sanchez O L, Gillet P, Plochocka P, Yazyev O V, Kis A 2017 ACS Nano 11 6355
Google Scholar
[54] Nakhaie S, Wofford J M, Schumann T, Jahn U, Ramsteiner M, Hanke M, Lopes J M J, Riechert H 2015 Appl. Phys. Lett. 106 213108
Google Scholar
[55] Xu X, Zhang Z, Dong J, Yi D, Niu J, Wu M, Lin L, Yin R, Li M, Zhou J, Wang S, Sun J, Duan X, Gao P, Jiang Y, Wu X, Peng H, Ruoff R S, Liu Z, Yu D, Wang E, Ding F, Liu K 2017 Sci. Bull. 62 1074
Google Scholar
[56] Liu C, Xu X, Qiu L, Wu M, Qiao R, Wang L, Wang J, Niu J, Liang J, Zhou X, Zhang Z, Peng M, Gao P, Wang W, Bai X, Ma D, Jiang Y, Wu X, Yu D, Wang E, Xiong J, Ding F, Liu K 2019 Nat. Chem. 11 730
Google Scholar
[57] Zhang Z, Qi J, Zhao M, Shang N, Cheng Y, Qiao R, Zhang Z, Ding M, Li X, Liu K, Xu X, Liu K, Liu C, Wu M 2020 Chinese Phys. Lett. 37 108101
Google Scholar
[58] Wang L, Xu X, Zhang L, Qiao R, Wu M, Wang Z, Zhang S, Liang J, Zhang Z, Zhang Z, Chen W, Xie X, Zong J, Shan Y, Guo Y, Willinger M, Wu H, Li Q, Wang W, Gao P, Wu S, Zhang Y, Jiang Y, Yu D, Wang E, Bai X, Wang Z J, Ding F, Liu K 2019 Nature 570 91
Google Scholar
[59] Li T, Guo W, Ma L, Li W, Yu Z, Han Z, Gao S, Liu L, Fan D, Wang Z, Yang Y, Lin W, Luo Z, Chen X, Dai N, Tu X, Pan D, Yao Y, Wang P, Nie Y, Wang J, Shi Y, Wang X 2021 Nat. Nanotechnol. 16 1201
Google Scholar
[60] Wang J, Xu X, Cheng T, Gu L, Qiao R, Liang Z, Ding D, Hong H, Zheng P, Zhang Z, Zhang Z, Zhang S, Cui G, Chang C, Huang C, Qi J, Liang J, Liu C, Zuo Y, Xue G, Fang X, Tian J, Wu M, Guo Y, Yao Z, Jiao Q, Liu L, Gao P, Li Q, Yang R, Zhang G, Tang Z, Yu D, Wang E, Lu J, Zhao Y, Wu S, Ding F, Liu K 2022 Nat. Nanotechnol. 17 33
Google Scholar
[61] Yu Q, Jauregui L A, Wu W, Colby R, Tian J, Su Z, Cao H, Liu Z, Pandey D, Wei D, Chung T F, Peng P, Guisinger N P, Stach E A, Bao J, Pei S S, Chen Y P 2011 Nat. Mater. 10 443
Google Scholar
[62] Huang P Y, Ruiz-Vargas C S, van der Zande A M, Whitney W S, Levendorf M P, Kevek J W, Garg S, Alden J S, Hustedt C J, Zhu Y, Park J, McEuen P L, Muller D A 2011 Nature 469 389
Google Scholar
[63] Ruiz-Vargas C S, Zhuang H L, Huang P Y, van der Zande A M, Garg S, McEuen P L, Muller D A, Hennig R G, Park J 2011 Nano Lett. 11 2259
Google Scholar
[64] Hammer B, Norskov J K 1995 Nature 376 238
Google Scholar
[65] Chen H, Zhu W, Zhang Z 2010 Phys. Rev. Lett. 104 186101
Google Scholar
[66] Gao J, Yip J, Zhao J, Yakobson B I, Ding F 2011 J. Am. Chem. Soc. 133 5009
Google Scholar
[67] Han G H, Gunes F, Bae J J, Kim E S, Chae S J, Shin H J, Choi J Y, Pribat D, Lee Y H 2011 Nano Lett. 11 4144
Google Scholar
[68] Wang H, Wang G, Bao P, Yang S, Zhu W, Xie X, Zhang W J 2012 J. Am. Chem. Soc. 134 3627
Google Scholar
[69] Li X, Magnuson C W, Venugopal A, Tromp R M, Hannon J B, Vogel E M, Colombo L, Ruoff R S 2011 J. Am. Chem. Soc. 133 2816
Google Scholar
[70] Ding G, Zhu Y, Wang S, Gong Q, Sun L, Wu T, Xie X, Jiang M 2013 Carbon 53 321
Google Scholar
[71] Zeng M, Tan L, Wang J, Chen L, Rümmeli M H, Fu L 2014 Chem. Mater. 26 3637
Google Scholar
[72] Zang X, Zhou Q, Chang J, Teh K S, Wei M, Zettl A, Lin L 2017 Adv. Mater. Interfaces 4 1600783
Google Scholar
[73] Zhou H, Yu W J, Liu L, Cheng R, Chen Y, Huang X, Liu Y, Wang Y, Huang Y, Duan X 2013 Nat. Commun. 4 2096
Google Scholar
[74] Gan L, Luo Z 2013 ACS Nano 7 9480
Google Scholar
[75] Guo W, Jing F, Xiao J, Zhou C, Lin Y, Wang S 2016 Adv. Mater. 28 3152
Google Scholar
[76] Lin L, Li J, Ren H, Koh A L, Kang N, Peng H, Xu H Q, Liu Z 2016 ACS Nano 10 2922
Google Scholar
[77] Wang H, Xue X, Jiang Q, Wang Y, Geng D, Cai L, Wang L, Xu Z, Yu G 2019 J. Am. Chem. Soc. 141 11004
Google Scholar
[78] Zhu J, Xu H, Zou G, Zhang W, Chai R, Choi J, Wu J, Liu H, Shen G, Fan H 2019 J. Am. Chem. Soc. 141 5392
Google Scholar
[79] Kim H, Ovchinnikov D, Deiana D, Unuchek D, Kis A 2017 Nano Lett. 17 5056
Google Scholar
[80] Chen W, Zhao J, Zhang J, Gu L, Yang Z, Li X, Yu H, Zhu X, Yang R, Shi D, Lin X, Guo J, Bai X, Zhang G 2015 J. Am. Chem. Soc. 137 15632
Google Scholar
[81] Chen J, Tang W, Tian B, Liu B, Zhao X, Liu Y, Ren T, Liu W, Geng D, Jeong H Y, Shin H S, Zhou W, Loh K P 2016 Adv. Sci. 3 1500033
Google Scholar
[82] Wu T, Zhang X, Yuan Q, Xue J, Lu G, Liu Z, Wang H, Wang H, Ding F, Yu Q, Xie X, Jiang M 2016 Nat. Mater. 15 43
Google Scholar
[83] Vlassiouk I V, Stehle Y, Pudasaini P R, Unocic R R, Rack P D, Baddorf A P, Ivanov I N, Lavrik N V, List F, Gupta N, Bets K V, Yakobson B I, Smirnov S N 2018 Nat. Mater. 17 318
Google Scholar
[84] Xu X, Zhang Z, Qiu L, Zhuang J, Zhang L, Wang H, Liao C, Song H, Qiao R, Gao P, Hu Z, Liao L, Liao Z, Yu D, Wang E, Ding F, Peng H, Liu K 2016 Nat. Nanotechnol. 11 930
Google Scholar
[85] Chung J W, Dai Z R, Ohuchi F S 1998 J. Cryst. Growth 186 137
Google Scholar
[86] Cun H, Macha M, Kim H, Liu K, Zhao Y, LaGrange T, Kis A, Radenovic A 2019 Nano Res. 12 2646
Google Scholar
[87] Eichfeld S M, Hossain L, Lin Y C, Piasecki A F, Kupp B, Birdwell A G, Burke R A, Lu N, Peng X, Li J, Azcatl A, McDonnell S, Wallace R M, Kim M J, Mayer T S, Redwing J M, Robinson J A 2015 ACS Nano 9 2080
Google Scholar
[88] Ishihara S, Hibino Y, Sawamoto N, Machida H, Wakabayashi H, Ogura A 2018 MRS Adv. 3 379
Google Scholar
[89] Eichfeld S M, Hossain L, Lin Y C, Piasecki A F, Kupp B, Birdwell A G, Burke R A, Lu N, Peng X, Li J, Azcatl A, McDonnell S, Wallace R M, Kim M J, Mayer T S, Redwing J M, Robinson J A 2015 ACS Nano. 9 2080
[90] Shu H, Chen X, Tao X, Ding F 2012 ACS Nano 6 3243
Google Scholar
[91] Ma T, Ren W, Zhang X, Liu Z, Gao Y, Yin L C, Ma X L, Ding F, Cheng H M 2013 Proc. Natl. Acad. Sci. USA 110 20386
Google Scholar
[92] Patera L L, Bianchini F, Africh C, Dri C, Soldano G, Mariscal M M, Peressi M, Comelli G 2018 Science 359 1243
Google Scholar
[93] Gao Y, Hong Y L, Yin L C, Wu Z, Yang Z, Chen M L, Liu Z, Ma T, Sun D M, Ni Z, Ma X L, Cheng H M, Ren W 2017 Adv. Mater. 29 1700990
Google Scholar
[94] Lee J H, Lee E K, Joo W J, Jang Y, Kim B S, Lim J Y, Choi S H, Ahn S J, Ahn J R, Park M H, Yang C W, Choi B L, Hwang S W, Whang D 2014 Science 344 286
Google Scholar
[95] Li X, Cai W, An J, Kim S, Nah J, Yang D, Piner R, Velamakanni A, Jung I, Tutuc E, Banerjee S K, Colombo L, Ruoff R S 2009 Science 324 1312
Google Scholar
[96] Nguyen V L, Perello D J, Lee S, Nai C T, Shin B G, Kim J G, Park H Y, Jeong H Y, Zhao J, Vu Q A, Lee S H, Loh K P, Jeong S Y, Lee Y H 2016 Adv. Mater. 28 8177
Google Scholar
[97] Deng B, Pang Z, Chen S, Li X, Meng C, Li J, Liu M, Wu J, Qi Y, Dang W, Yang H, Zhang Y, Zhang J, Kang N, Xu H, Fu Q, Qiu X, Gao P, Wei Y, Liu Z, Peng H L 2017 ACS Nano 11 12337
Google Scholar
[98] Nguyen V L, Shin B G, Duong D L, Kim S T, Perello D, Lim Y J, Yuan Q H, Ding F, Jeong H Y, Shin H S, Lee S M, Chae S H, Vu Q A, Lee S H, Lee Y H 2015 Adv. Mater. 27 1376
Google Scholar
[99] Jin S, Huang M, Kwon Y, Zhang L, Li B W, Oh S, Dong J, Luo D, Biswal M, Cunning B V, Bakharev P V, Moon I, Yoo W J, Camacho-Mojica D C, Kim Y J, Lee S H, Wang B, Seong W K, Saxena M, Ding F, Shin H J, Ruoff R S 2018 Science 362 1021
Google Scholar
[100] Wu M, Zhang Z, Xu X, Zhang Z, Duan Y, Dong J, Qiao R, You S, Wang L, Qi J, Zou D, Shang N, Yang Y, Li H, Zhu L, Sun J, Yu H, Gao P, Bai X, Jiang Y, Wang Z J, Ding F, Yu D, Wang E, Liu K 2020 Nature 581 406
Google Scholar
[101] Li Y, Sun L, Chang Z, Liu H, Wang Y, Liang Y, Chen B, Ding Q, Zhao Z, Wang R, Wei Y, Peng H, Lin L, Liu Z 2020 Adv. Mater. 32 2002034
Google Scholar
[102] Zhang J, Lin L, Jia K, Sun L, Peng H, Liu Z 2020 Adv. Mater. 32 1903266
Google Scholar
[103] Fu D, Zhao X, Zhang Y Y, Li L, Xu H, Jang A R, Yoon S I, Song P, Poh S M, Ren T, Ding Z, Fu W, Shin T J, Shin H S, Pantelides S T, Zhou W, Loh K P 2017 J. Am. Chem. Soc. 139 9392
Google Scholar
[104] Song X, Gao J, Nie Y, Gao T, Sun J, Ma D, Li Q, Chen Y, Jin C, Bachmatiuk A, Rümmeli M H, Ding F, Zhang Y, Liu Z 2015 Nano Res. 8 3164
Google Scholar
[105] Li J, Li Y, Yin J, Ren X, Liu X, Jin C, Guo W 2016 Small 12 3645
Google Scholar
[106] Chen T A, Chuu C P, Tseng C C, Wen C K, Wong H P, Pan S, Li R, Chao T A, Chueh W C, Zhang Y, Fu Q, Yakobson B I, Chang W H, Li L J 2020 Nature 579 219
Google Scholar
[107] Chen L, Liu B, Ge M, Ma Y, Abbas A N, Zhou C 2015 ACS Nano 9 8368
Google Scholar
[108] Yang P, Zhang S, Pan S, Tang B, Liang Y, Zhao X, Zhang Z, Shi J, Huan Y, Shi Y, Pennycook S J, Ren Z, Zhang G, Chen Q, Zou X, Liu Z, Zhang Y 2020 ACS Nano 14 5036
Google Scholar
[109] Yu H, Liao M, Zhao W, Liu G, Zhou X J, Wei Z, Xu X, Liu K, Hu Z, Deng K, Zhou S, Shi J A, Gu L, Shen C, Zhang T, Du L, Xie L, Zhu J, Chen W, Yang R, Shi D, Zhang G 2017 ACS Nano 11 12001
Google Scholar
[110] Wang Q, Li N, Tang J, Zhu J, Zhang Q, Jia Q, Lu Y, Wei Z, Yu H, Zhao Y, Guo Y, Gu L, Sun G, Yang W, Yang R, Shi D, Zhang G 2020 Nano Lett. 20 7193
Google Scholar
[111] Choi S H, Kim H J, Song B, Kim Y I, Han G, Nguyen H T T, Ko H, Boandoh S, Choi J H, Oh C S, Cho H J, Jin J W, Won Y S, Lee B H, Yun S J, Shin B G, Jeong H Y, Kim Y M, Han Y K, Lee Y H, Kim S M, Kim K K 2021 Adv. Mater. 33 2006601
Google Scholar
[112] Xue X, Xu Q, Wang H, Liu S, Jiang Q, Yu Z, Zhou X, Ma T, Wang L, Yu G 2019 Chem. Mater. 31 1231
Google Scholar
[113] Zeng M, Wang L, Liu J, Zhang T, Xue H, Xiao Y, Qin Z, Fu L 2016 J. Am. Chem. Soc. 138 7812
Google Scholar
[114] Lee J S, Choi S H, Yun S J, Kim Y I, Boandoh S, Park J H, Shin B G, Ko H, Lee S H, Kim Y M, Lee Y H, Kim K K, Kim S M 2018 Science 362 817
Google Scholar
下载:
计量
- 文章访问数: 6368
- PDF下载量: 304
- 被引次数: 0
