搜索

x
中国物理学会期刊

单层MoS2薄膜的NaCl双辅助生长方法

CSTR: 32037.14.aps.71.20220273

Growth of monolayer MoS2 films dual-assisted by NaCl

CSTR: 32037.14.aps.71.20220273
PDF
HTML
导出引用
  • 以单层二硫化钼(MoS2)为代表的过渡金属硫族化合物半导体材料具有良好的光学、电学性质, 近十年来引起了人们广泛的研究兴趣. 合成高质量单层MoS2薄膜是科学研究及工业应用的基础. 最近科研人员提出了盐辅助化学气相沉积生长单层薄膜的方法, 大大提高了单层MoS2薄膜的生长速度及晶体质量. 本文基于此方法, 提出利用氯化钠(NaCl)的双辅助方法, 成功制备了高质量的单层MoS2薄膜. 光致发光(PL)谱显示其发光强度比无NaCl辅助生长的样品有了明显的提高. 本文提出的NaCl双辅助生长方法为二维材料的大规模生长提供了思路.

     

    In recent years, transition metal dichalcogenides materials represented by monolayer molybdenum disulfide (MoS2) have aroused great interest due to their excellent optical and electrical properties. The synthesis method of high-quality monolayer MoS2 film is a key problem for scientific research and industrial application. Recently, researchers have proposed a salt-assisted chemical vapor deposition method for growing the monolayer films, which greatly promotes the growth rate and quality of monolayer film. By using this method, we design a growth source of semi-enclosed quartz boat, and successfully obtain high-quality monolayer MoS2 films by using the double auxiliary action of sodium chloride (NaCl). Scanning electron microscopy shows the excellent film formation, and the photoluminescence spectra show that the luminescence intensity is significantly higher than that of the sample grown without NaCl. The NaCl double-assisted growth method proposed in this study can reduce the growth temperature of MoS2, shorten the growth time, and improve the optical properties of the films. Besides, the operation is simple and the cost is low, which provides an idea for growing the large-scale two-dimensional materials.

     

    目录

    /

    返回文章
    返回