-
随着CMOS工艺的日益成熟和SiGe外延技术水平的不断提高, SiGe BiCMOS低噪声放大器(LNA)广泛应用于空间射频收发系统的第一级模块. SiGe HBT作为SiGe BiCMOS LNA的核心器件, 天然具有优异的低温特性、抗总剂量效应和抗位移损伤效应的能力, 然而, 其瞬态电荷收集引起的空间单粒子效应是制约其空间应用的瓶颈问题. 本文基于SiGe BiCMOS工艺低噪声放大器开展了单粒子效应激光微束实验, 并定位了激光单粒子效应敏感区域. 实验结果表明, SiGe HBT瞬态电荷收集是引起 SiGe BiCMOS LNA单粒子效应的主要原因. TCAD模拟表明, 离子在CMOS区域入射时, 电离径迹会越过深沟槽隔离结构, 进入SiGe HBT区域产生电子空穴对并引起瞬态电荷收集. ADS电路模拟分析表明, 单粒子脉冲瞬态电压在越过第1级与第2级之间的电容时, 瞬态电压峰值骤降, 这表明电容在传递单粒子效应产生的瞬态脉冲过程中起着重要作用. 本文实验和模拟工作为SiGe BiCMOS LNA单粒子效应抗辐射设计加固提供了技术支持.With the further development of the complementary metal-oxide-semiconductor (CMOS) technology and the silicon-germanium (SiGe) epitaxy technology, SiGe bipolar CMOS (BiCMOS) low noise amplifiers (LNAs) are widely used in the first level of radio frequency (RF) transceiver system in space. The core part of SiGe BiCMOS LNA is SiGe heterojunction bipolar transistor (SiGe HBT) which naturally possesses excellent temperature characteristic and favorable build-in total ionizing dose and displacement damage resistance without any radiation hardening. However, the single event effect caused by the transient charge collection is the bottleneck problem, restricting its application in space. In this work, laser microbeam experiments were carried out on a SiGe BiCMOS LNA in which the sensitive region of single event effect was located. The experimental results indicate that the transient charge collection of SiGe HBT is the main reason of the single event effect of SiGe BiCMOS LNA. TCAD simulations show that the ionization track caused by ion incident in CMOS region will cross the deep trench isolation (DTI) structure, generate electron-hole pairs in SiGe HBT region and cause transient charge collection. The circuit simulations by ADS show that the peak value of the transient voltage will drop sharply when the SEE pulse transient voltage crosses the capacitor between the first stage and the second stage, which indicates that the capacitor plays an important role in transmitting the transient pulses caused by single event effect. The experimental and simulation results in this work provide technical support for radiation hardening by design (RHBD) of the single event effect of SiGe BiCMOS LNA.
-
Keywords:
- SiGe BiCMOS /
- low noise amplifiers /
- single event effect /
- laser-simulated experiment /
- TCAD numerical simulations /
- ADS circuit simulations








下载: