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中国物理学会期刊

超导动态电感探测器的噪声谱分析

CSTR: 32037.14.aps.73.20231504

Noise spectrum analysis of superconducting kinetic inductance detectors

CSTR: 32037.14.aps.73.20231504
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  • 动态电感探测器容易频域集成, 作为一种新兴的超导探测器件在(亚)毫米及光学波段的天文探测和阵列成像中得到了初步应用. 在单像素层面, 动态电感探测器的暗噪声水平是关键指标之一. 本文详细介绍了一种适用于动态电感探测器的噪声功率谱分析方法, 可以较好地平衡噪声频谱分辨率与方差性能, 准确且高效地进行噪声谱分析. 利用此方法, 研究了两种工艺的超导铝动态电感探测器, 发现在铝膜上下两层镀氮化硅膜的样品的频率噪声约为裸铝样品的25%—50%. 基于这种双层氮化硅工艺, 进一步研究了多种几何设计的集总结构铝动态电感探测器在不同微波功率和温度下的噪声特性, 实验结果与典型的二能级系统噪声行为相符. 本文的研究为动态电感探测器的噪声谱表征提供了一种标准方法, 并为研制低噪声的超导铝动态电感探测器奠定了基础.

     

    As a newly developed pair-breaking superconducting detector, microwave kinetic inductance detectors are simple to integrate in the frequency domain and have already been used in astronomical detection and array imaging at the (sub)millimeter and optical wavelengths. For these applications, the dark noise level of kinetic inductance detector is one of the key performance indicators. Herein a noise power spectrum analysis method is introduced in detail, which can accurately and effectively analyze the noise spectrum of kinetic inductance detector in a wide frequency range. This method can well balance the noise spectrum resolution and variance performance, by taking the noise data at the resonance frequency with two sampling rates and setting the appropriate frequency resolutions for different frequency bands. This method is used to characterize and compare the noise of aluminum (Al) kinetic inductance detectors made from two different micromachining processes. We deposite a 25-nm-thick aluminum film on high-resistivity silicon substrate for one device, while place one silicon nitride (SiNx) film on the top and one on the bottom of the aluminum film for another device. It is found that the frequency noise of the device with two silicon nitride films is about 25% to 50% of the bare aluminum device. Using this double silicon nitride film fabrication technique, we further fabricate a few groups of lumped-element aluminum kinetic inductance detectors with various inductor and interdigitated capacitor designs. We investigate the noise properties of these devices at different microwave driven power and bath temperatures, and the experimental results show typical two-level system noise behaviors. Our work provides a standard method to characterize the noise power spectrum of kinetic inductor detector, and also paves the way to developing low-noise aluminum kinetic inductance detectors for terahertz imaging, photon-counting and energy-resolving applications.

     

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