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中国物理学会期刊

基于GaSe/Ga2O3异质结的自供电日盲紫外光电探测器

CSTR: 32037.14.aps.73.20240267

GaSe/β-Ga2O3 heterojunction based self-powered solar-blind ultraviolet photoelectric detector

CSTR: 32037.14.aps.73.20240267
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  • 氧化镓(Ga2O3)作为超宽禁带半导体在深紫外探测领域有极其重要的应用价值. 它能与GaSe形成典型的Ⅱ型异质结构, 促进载流子分离与传输, 进而实现高性能的自供电探测. 本文利用等离子体增强化学气相沉积(PECVD)技术在蓝宝石衬底上生长了Ga2O3薄膜, 并采用布里奇曼技术在氧化镓薄膜上生长了GaSe薄膜, 构建了GaSe/β-Ga2O3异质结光电探测器, 分析其中涉及的光物理与界面物理问题. 该探测器对深紫外光有很好的响应性能, 在8 V的电压下器件的暗电流仅为1.83 pA, 254 nm光照下的光电流达到了6.5 nA, 且UV-C/可见光(254 nm/600 nm)的抑制比约为354, 即使在很小的光照强度下, 响应度和探测度也达到了1.49 mA/W 和 6.65× 1011 Jones. 同时, 由于结界面上的空间电荷区形成的光伏效应, 该探测器在零偏压下表现出自供电性能, 开路电压为0.2 V. 此外, 探测器有很好的灵敏度, 无论是在电压恒定的条件下用不同光强的光照射探测器, 还是在光强恒定条件下改变电压, 器件都能快速响应.

     

    UV photodetectors have the advantages of high sensitivity and fast response speed. As an ultra-wide bandgap semiconductor, gallium oxide (Ga2O3) plays an extremely important role in detecting deep ultraviolet. It can form a typical type-II heterostructure with GaSe, promoting carrier separation and transport. In this work, Ga2O3 epitaxial films are grown on sapphire substrates by plasma-assisted chemical vapor deposition (PECVD). The GaSe films and GaSe/β-Ga2O3 heterojunction photodetectors are grown on gallium oxide films by Bridgeman technology. The detector has a good response to deep ultraviolet light, the dark current of the device is only 1.83 pA at 8 V, and the photocurrent reaches 6.5 nA at 254 nm. The UVC/Visible (254 nm/600 nm) has a high rejection ratio of about 354. At very small light intensities, the responsivity and detection can reach 1.49 mA/W and 6.65 × 1011 Jones, respectively. At the same time, due to the photovoltaic effect formed by the space charge region at the junction interface, the detector exhibits self-powered supply performance at zero bias voltage, and the open-circuit voltage is 0.2 V. In addition, the detector has a very good sensitivity. The device can respond quickly, whether it is irradiated with different light intensities under constant voltage, or with different voltages under constant light intensity. It can respond within milliseconds under a bias voltage of 10 V. This work demonstrates the enormous potential of heterojunctions in photoelectric detection by analyzing the photophysical and interface physical issues involved in heterojunction photodetectors, and provides a possibility for detecting the deep ultraviolet of gallium oxide.

     

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