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碳基材料因其独特且优异的光、热、电、磁、力等物理特性在红外光电探测领域备受关注，这些特性使其在通信、军事、成像、能源、生物等领域具有广泛的应用前景。然而，在面向工程化应用的实际场景中，碳基材料仍面临诸多挑战，如富勒烯、石墨烯和单根碳纳米管在红外波段吸收弱、灵敏度不足、响应慢等。碳基材料与波导集成，一方面可限域光场，有效抑制光传输的环境耗散，提升光与物质的耦合效率，从而提高探测器的信噪比、灵敏度、响应速度与工作带宽；另一方面，其工艺兼容CMOS加工工艺，有望实现低成本、高密度集成，可满足下一代红外光电探测器的发展需要。本文围绕多种波导材料集成的碳基红外光电探测器展开综述，详细介绍分析了器件的性能增强策略与发展瓶颈，最后展望了波导集成的碳基红外探测器的发展方向。Carbon-based materials have garnered significant attention in the field of infrared photodetection due to their unique and excellent physical properties, including optical, thermal, electrical, magnetic, and mechanical properties. These characteristics endow them with broad application prospects in various fields such as communication, military, imaging, energy, and biology. However, in practical scenarios oriented towards engineering applications, carbon-based materials still encounter numerous challenges, including weak absorption in the infrared band, insufficient sensitivity, and slow response in fullerenes, graphene, and single carbon nanotubes. When integrated with waveguides, carbon-based materials can effectively suppress environmental dissipation of light transmission, confine the light field, enhance the coupling efficiency between light and matter, thereby improving the signal-to-noise ratio, sensitivity, response speed, and operating bandwidth of the detector. On the other hand, waveguide-integrated photodetectors are compatible with CMOS processing technology, promising low-cost, high-density integration to meet the development needs of next-generation infrared photodetectors. This paper provides an overview of carbon-based infrared photodetectors integrated with various waveguide materials, offering a detailed analysis of performance enhancement strategies and development bottlenecks for these devices. Finally, it explores the future directions of waveguide-integrated carbon-based infrared detectors.
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Keywords:
- carbon-based materials /
- graphene /
- waveguide integration /
- infrared detector
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