Recently, the novel two-dimensional semiconductor material
β-TeO
2 has been successfully synthesized in experiments and exhibits excellent optoelectronic properties, attracting growing attention and research interest. Using first-principles calculations based on density functional theory, we systematically investigate the structural stability, electronic properties, and magnetism of monolayer
β-TeO
2 containing intrinsic point defects (vacancies, interstitials, and antisite defects) and substitutional defects. Several physical quantities-including defect formation energy, electronic band structure, projected density of states, partial charge density, and magnetic moments-are calculated. Under oxygen-poor conditions, the most readily formed vacancy, interstitial, antisite, and substitutional defects are V
O1, O
i, Te
O2, and F
O, respectively. Under oxygen-rich conditions, the corresponding defects are V
O1, O
i, Te
O2, and Sb
Te. The introduction of vacancy defects (V
O1, V
O2, and V
Te), interstitial defects (Te
i), and antisite defects (O
Te, Te
O1, and Te
O2) does not induce magnetism in monolayer
β-TeO
2, and its semiconducting characteristics are preserved. However, these defects introduce multiple spin-degenerate defect states within the bandgap, leading to a significant reduction in bandgap size. In contrast, interstitial oxygen defects (O
i) neither induce magnetism nor produce in-gap defect states
β; the system retains its semiconducting character with an essentially unchanged bandgap. Conversely, all substitutional defects (F
O1, F
O2, N
O1, N
O2, I
Te, and Sb
Te) induce magnetism in monolayer
β-TeO
2 and generate spin-polarized defect states within the bandgap, transforming the system into a magnetic semiconductor. The corresponding magnetic moments are 0.66
μB, 0.59
μB, 0.67
μB, 0.74
μB, 0.77
μB, and 0.75
μB, respectively. Furthermore, we provide a detailed analysis of the origin and mechanism of the defect states and magnetic moments. This study advances the understanding of defect properties in two-dimensional
β-TeO
2 and provides a theoretical foundation for its applications in electronic and spintronic devices.