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中国物理学会期刊

GaN高电子迁移率晶体管器件单粒子烧毁“台阶”电流机制

CSTR: 32037.14.aps.75.20260122

Mechanism of step current evolution in single event burnout of GaN high-electron-mobility transistors

CSTR: 32037.14.aps.75.20260122
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  • 针对两款商用增强型氮化镓高电子迁移率晶体管, 利用飞秒脉冲激光开展了单粒子烧毁(single event burnout, SEB)效应实验研究, 发现两款器件在SEB触发过程中的电流特征存在显著差异: INN650D150A在激光入射后电流瞬间跃升并直接进入大电流烧毁状态, 而EPC2034C在最终烧毁前出现明显的“台阶”电流现象. 基于器件电特性参数分析发现, 两款器件的栅源和漏源电容存在较大差异, 进而提出寄生电容可能是导致器件SEB“台阶”电流的关键因素. 最后基于单粒子效应精细实验和TCAD仿真手段, 阐明了SEB“台阶”电流的触发机理. 当器件漏极和栅极同时施加外接电容(680 pF与1 nF)时, SEB“台阶”电流现象被触发. 这是由于诱发单粒子效应时会引起电流瞬时跃升, 而电容的快速充电限制了电流的瞬态上升过程, 并在未再次诱发阶段保持电流不变, 形成“台阶”电流. 此外, 寄生电容的增大使得漏极附近电子浓度升高, 电子陷阱俘获增强, 促进漏极附近负电荷积累, 导致漏极局部电场增强, SEB阈值电压降低.

     

    Single event burnout (SEB) is a critical reliability concern for GaN high-electron-mobility transistors (GaN HEMTs) intended for space power applications. While SEB currents reported in the literature are typically characterized by an abrupt transition into a destructive high-current state (“direct burnout”), a step current evolution has also been sporadically observed but remains poorly understood. In this work, we investigate the physical origin of the step SEB current by combining femtosecond pulsed laser single event effect experiments, capacitance-controlled comparative tests, and TCAD simulations on two commercial enhancement-mode GaN HEMTs (INN650D150A and EPC2034C). Experiments were performed using a 35 fs, 630 nm laser at 5 kHz repetition rate and 9 nJ pulse energy, under off-state bias (VG = VS = 0 V) with drain bias stepped until failure. Distinct SEB signatures were reproducibly identified: INN650D150A exhibited a direct transition to the compliance-limited current at VDS = 400 V, whereas EPC2034C showed a step current waveform at VDS = 150 V, featuring an initial stable plateau followed by a rapid rise into the destructive regime. Electrical characterization revealed that EPC2034C possesses substantially larger intrinsic parasitic capacitances (CGS and CDS) than INN650D150A, motivating a capacitance-driven hypothesis for the step behavior. To verify this hypothesis, a set of external capacitance experiments was conducted on INN650D150A. The step SEB current was not observed when only the drain-side or gate-side capacitance was increased, nor when both sides were increased with insufficient capacitance. In contrast, a clear step response was triggered only when both drain and gate were simultaneously shunted by large capacitors (CDS,ext = 680 pF and CGS,ext = 1 nF), producing a stable plateau current (~6.5 μA) before final burnout, and concurrently reducing the SEB threshold voltage. The analysis indicates that during the triggering of the single event effect, the drain current undergoes a transient increase, while the rapid charging of the capacitances at the drain and gate limits the further transient rise of the current. Subsequently, during the process in which no additional single event effect is triggered, the drain current remains nearly constant, thereby giving rise to the observed step current. Finally, TCAD simulations were employed to clarify how enhanced parasitic capacitance can also lower the SEB threshold voltage. Two capacitance-enhanced device variants (CE1-HEMT/CE2-HEMT) were constructed by reducing the thickness of the Si3N4 passivation layer relative to a baseline p-GaN gate structure. Electrons generated by heavy ion irradiation drift toward the drain under the applied electric field. The increase in parasitic capacitance leads to a higher electron concentration near the drain and enhances electron trapping, which promotes negative charge accumulation near the drain. Consequently, the local electric field is intensified, reducing the SEB threshold voltage. The experimental evidence and simulation results demonstrate that parasitic capacitance is a decisive factor governing both the shape of the SEB current (direct vs. step) and the SEB threshold voltage, providing practical guidance for radiation-hard design.

     

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