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中国物理学会期刊

基于聚焦氦离子束技术的高温超导平面梯度计不平衡度

CSTR: 32037.14.aps.75.20260253

Imbalance of high-temperature superconducting planar gradiometers based on helium focused ion beam technology

CSTR: 32037.14.aps.75.20260253
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  • 梯度计的不平衡度是制约其在无屏蔽环境下应用的关键指标, 聚焦氦离子束(helium focused ion beam, He-FIB)技术凭借纳米级加工精度, 为制备高温超导梯度计提供了新方案. 本文设计了高度对称的平面梯度计, 在结构上优化了不平衡度, 通过He-FIB技术制备的器件尺寸为5 mm×10 mm、基线长度为4.2 mm. 在77 K下梯度计的磁场梯度分辨率低至1.48 pT·cm–1·Hz–1/2, 不平衡度优于3×10–3, 与台阶结和双晶结等技术制备的高温超导梯度计性能相当, 验证了He-FIB技术在制备高平衡度高温超导梯度计的可行性, 为探索更高性能的高温超导梯度计提供了研究思路.

     

    The intrinsic imbalance of a superconducting quantum interference device (SQUID) gradiometer is a critical physical parameter that influences its common-mode rejection ratio (CMRR) and ultimate performance in unshielded environments. Traditional fabrication methods for high-temperature superconducting (HTS) Josephson junctions, such as bicrystal and step-edge techniques, suffer from strict substrate grain boundary constraints or poor etching reproducibility, making it difficult to precisely control the geometric symmetry and the electrical uniformity of the two pickup coils. To address this issue, this study explores a novel approach to optimize the imbalance of HTS planar gradiometers utilizing helium focused ion beam (He-FIB) technology.
    Five highly symmetric HTS planar gradiometers are designed and fabricated on a single-layer YBCO thin film. He-FIB direct-write technology, featuring maskless and nanometer-level processing precision, is employed to precisely define the Josephson junctions via local irradiation-induced superconductor-normal metal-superconductor (SNS) transitions or superconductor-insulator-superconductor (SIS) transitions. The total footprint of the device is strictly limited to 5 mm×10 mm with a baseline length of 4.2 mm.
    A systematic calibration experiment, utilizing homogeneous Helmholtz coils and gradient Maxwell coils, is established to evaluate the effective parasitic area and the effective gradient area. Extensive electrical and magnetic characterizations are performed at liquid nitrogen temperature 77 K. The fabricated devices exhibit high-quality resistively shunted junction (RSJ) model-like current-voltage characteristics, with critical currents (Ic) ranging from 22.4 to 144 μA and voltage modulation depths of approximately 10 μV. To further suppress the low-frequency 1/f noise originating from the intrinsic defect states in the He-FIB irradiated barriers, an alternating current (AC) bias reversal scheme is applied, successfully pushing the 1/f noise corner frequency down to approximately 20 Hz. In the white noise region (>1 kHz), the gradiometer achieves a magnetic field gradient resolution as low as 1.48 pT·cm–1·Hz–1/2. More importantly, the measured imbalance levels of the five prepared samples consistently fell within the narrow range of 2.7×10–3 to 9.8×10–3.
    The experimental results demonstrate the superior reliability and high yield of the He-FIB technology in fabricating highly symmetric HTS planar gradiometers. Although the two-dimensional topology of the single-layer YBCO film limits the absolute imbalance to the 10–3 level due to the unavoidable parasitic area of the SQUID loop itself, the overall performance is comparable to, and in terms of yield surpasses, state-of-the-art devices fabricated by complex multilayer or bicrystal techniques.
    Combined with software-based reference compensation, the achieved balance level and gradient resolution provide a solid technological foundation for next-generation unshielded magnetic detection applications, including deep-earth geophysical exploration and mobile magnetoencephalography.

     

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