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中国物理学会期刊

Ku频段介质加载三端微波开关设计及其微放电特性

Design of Ku-band Dielectric-loaded Three-terminal Microwave Switch and Its Multipactor Characteristics

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  • 设计了一种基于介质填充减小高频损耗的Ku波段微波开关结构,工作频率范围为DC~18 GHz。通过对开关中同轴和屏蔽带状线匹配仿真优化,实现了微波开关在18 GHz内的匹配传输,优化后开关的带内损耗小于0.23 dB,隔离度大于90 dB。设置氧化铝为开关内的填充介质,对不同输入功率下开关中二次电子数量演化过程开展模拟研究,结果表明:填充未经处理的氧化铝片后开关的微放电阈值为10874 W。为提升开关微放电阈值,分别应用表面微结构制造和溅射氮化钛镀层两种工艺,降低氧化铝表面二次电子产额(SEY),测试结果表明应用两种工艺后的氧化铝表面SEY峰值分别由3.56降低至1.71和1.99,对应的微波开关微放电阈值计算结果分别为12624 W和12374 W。结合两种工艺后,氧化铝SEY峰值降至1.13,微波开关微放电阈值提升至13124 W,较原始器件提升2250 W。为衡量介质带电对放电过程的影响,计算了射频电场和表面带电情况下的二次电子运动状态和SEY曲线演化趋势。计算结果显示,经过100、500和2000次脉冲辐照后,介质表面SEY的改变能够将微波开关的微放电阈值提升至11624 W、12374 W和12624 W。在考虑表面静电场状况下,修正Hatch-Williams微放电模型理论,定性揭示了介质表面电荷诱导静电场对微放电阈值的影响规律。本工作为高功率Ku频段微波开关设计及其微放电特性研究,提供了可复用的模型结构和微放电可靠性提升方案,对微波开关抗微放电设计具有工程参考价值。

     

    The multipactor effect limits the performance and power capacity of spacecraft microwave systems. This phenomenon of secondary electron multiplication occurs under specific radio frequency operating conditions during the secondary electron emission process on material surfaces within microwave devices. Multipactor deteriorates the performance of the components, and in severe circumstances, it is even possible to result in the failure of the components or the spacecraft. Alumina ceramics possess favorable dielectric properties, high hardness, excellent thermal insulation, and low dielectric loss, rendering them widely employed in high-power microwave systems, including microwave components such as filters. However, the surface of alumina ceramics exhibits a high secondary electron yield (SEY), indicating that within space environments, the high-power microwave assemblies filled with alumina may trigger the destructive effects of secondary electron multiplication. This work designed a Ku-band single-pole double-throw microwave switch structure employing medium filling to reduce high-frequency losses. Its operational frequency range spans DC to 18 GHz. Through matched simulation optimization of shielded striplines, the microwave switch achieves matched transmission across an 18 GHz broadband range. Following optimization, the switch exhibits in-band loss below 0.23 dB and isolation exceeding 90 dB. Simulation studies were conducted on the evolution of secondary electrons within microwave switches under varying input power conditions, with the internal structure configured to utilize lossless alumina as the filling medium. Results indicate that after filling with untreated alumina media discs, the switch's multipactor threshold reached 10874 W. Two experimental methods were employed to modify the alumina surface for SEY tuning: laser etching to create a microporous structure with 67.24% porosity, and sputter deposition of TiN functional film using N2:Ar gas flow ratio of 7.5:15. Test results demonstrated that applying either technique independently reduced the SEY on the alumina surface from 3.56 to 1.71 and 1.99, respectively. while the first critical energy EP1 increased from 26 eV to 70 eV and 40 eV respectively. Simulation results indicate corresponding microwave switch multipactor thresholds elevated to 12624 W and 12374 W respectively. By combining the two techniques, the SEY on the aluminum oxide surface was further reduced to 1.13. The first critical energy EP1 increased from 26 eV to 161 eV, while the microwave switch multipactor threshold was elevated to 13124 W, marking an improvement of approximately 0.82 dB over the original device. In practice, secondary electron multiplication is dynamic process in which electrons move under continuously varying radio-frequency electric field. When considering the influence of the radio-frequency electric field on electron trajectories, it is found that the field promotes the escape of secondary electrons from the microstructure, thereby weakening the microstructure’s ability to suppress multipactor. Concurrently, the accumulation of surface charge on the alumina surface caused by secondary electron emission affects the energy of both incident electrons and emitted secondary electrons, thereby influencing the surface SEY and multipactor thresholds, the fabrication of microstructures on the alumina surface can reduce the potential level of the positive surface charge. The charged surface SEY irradiated by 2000 pulses can raise the multipactor threshold of the device from 10874 W to 12624 W, which indicates that the charged surface may promote the multipactor threshold to some extent. Taking into account the electrostatic field at surface saturation (EDC), the Hatch-Williams model was modified, and the role of the electrostatic field induced by surface charges in the dielectric in raising the multipactor threshold was qualitatively demonstrated using theoretical equations. This work holds significant engineering application value for enhancing the reliability of high-power microwave devices.

     

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