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中国物理学会期刊

基于深径比约束的多特征融合光学测量方法

Multi-feature Fusion Optical Measurement Method Based on Aspect-Ratio Constraint

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  • 传统大深径比微孔非接触光学测量易受孔底弱信号、孔内杂散反射及伪焦点干扰影响,导致深度判定不稳、深径比误差累积,难以满足复杂微结构高精度测量需求.针对上述问题,提出一种基于深径比约束的多特征融合光学测量方法.该方法通过轴向精密扫描获取不同离焦位置下的显微图像序列,在感兴趣区域内提取清晰度、灰度均值和对比度等特征,建立图像特征与轴向位移的响应关系,并基于归一化响应离散度进行自适应加权融合,生成深度候选参数集;进一步结合孔口直径测量结果及合理深径比区间对候选结果进行约束筛选,实现微孔深度及深径比的稳定测量.对20组不同深径比的微孔样品的实验结果表明,测量深径比与标准值具有良好线性一致性,平均绝对误差为0.0195,均方根误差为0.0235,最大绝对误差为0.06.该方法不依赖复杂干涉光路,能够有效抑制弱光、低对比度及复杂反射条件下伪焦点对测量结果的影响,为大深径比微孔几何参数的非接触测量提供了一种准确、稳定且可行的方法.

     

    High-aspect-ratio microholes are widely used in aerospace, electronic packaging, biomedical devices, and precision manufacturing. However, their non-contact optical measurement is still challenged by weak bottom signals, false-focus interference caused by stray reflections and scattering inside the hole, and accumulated uncertainty in aspect-ratio evaluation. To address these problems, this paper proposes a multi-feature fusion optical measurement method based on an aspect-ratio constraint for stable measurement of microhole depth and aspect ratio. In this method, a sequence of microscopic images is acquired at different defocus positions through precise axial scanning. Within a predefined region of interest, multiple image features, including sharpness, mean gray level, and contrast, are extracted to establish the response relationship between image characteristics and axial displacement. After min-max normalization, these features are adaptively weighted according to their response dispersion and fused into a comprehensive feature response function. The local extrema of the fused response curve are then extracted as candidate bottom positions. Furthermore, combined with the measured entrance diameter, a reasonable prior interval of the aspect ratio is introduced as a geometric constraint to screen the candidate depths, thereby reducing the uncertainty caused by false-focus points and single-feature judgment. Experiments were carried out on 20 microhole samples with different aspect ratios. The results show that the proposed method can effectively suppress false-focus interference under weak illumination, low contrast, and complex internal reflection conditions. A good linear agreement is obtained between the measured aspect ratios and the standard values, with a fitted slope of 0.997 and an intercept of 0.00912. The mean absolute error, root-mean-square error, and maximum absolute error are 0.0195, 0.0235, and 0.06, respectively. The proposed method provides a feasible and robust approach for non-contact measurement of geometric parameters of high-aspect-ratio microholes and has potential applications in online inspection, quality evaluation, and process optimization in precision manufacturing.

     

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