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中国物理学会期刊

3D NAND闪存Z干扰问题的电学抑制方案研究

Research on Electrical Suppression Scheme for Z-Interference in 3D NAND Flash Memory

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  • 随着信息时代对数据存储需求的快速增长,3D NAND闪存凭借其优异的成本效益和高存储密度成为主流的非易失性存储解决方案.3D NAND闪存通过增加堆叠层数和减小单元尺寸来实现存储密度的提升.然而,减小单元尺寸引入的非理想效应Z干扰(Z-interference)对器件可靠性的影响日益加剧,已成为制约3D NAND闪存向前发展的核心挑战之一.本文提出了一种通过交替擦除和软编程操作来抑制Z干扰的电学优化方案,并基于TCAD仿真和实验对该方案进行验证.仿真结果表明,该方案能够向单元间区域(Intercell)引入大量俘获电子,降低攻击单元编程时该区域的电场强度,有效改善Z干扰.实验结果显示,与传统方案相比,该方案能够将Z干扰引起的阈值电压分布展宽减小14.62%.随着单元尺寸的进一步减小,该方案对Z干扰的抑制效果更显著.

     

    In this paper, we propose a novel scheme to mitigate z-direction interference (Z-interference) in charge-trap-based 3D NAND flash memory. Our approach reduces the electric field (E-field) in the inter-cell region of the charge trapping layer during programming aggressor (Agr) cell by increasing the trapped electrons concentration of the charge-trapping layer in the inter-cell region. Specifically, prior to programming the Agr cell, alternate erase and soft program operation is employed to introduce a significant number of electrons into the inter-cell region. We validate our proposed scheme using both technology computer-aided design (TCAD) simulation and experimental measurements. The experimental results show that the proposed scheme achieves a 14.62% reduction compared to the conventional method. Besides, as the cell size of 3D NAND flash memory continues to scale down, the proposed scheme exhibits a more pronounced suppression effect on Z-interference. Using this approach can improve 3D NAND Flash reliability.

     

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