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中国物理学会期刊

氢终端金刚石双向开关器件的制备与特性研究

Study on the Fabrication and Characteristics of H-Terminated Diamond Bidirectional Switch Devices

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  • 双向开关器件在光伏、能源、电动汽车等领域应用广泛,金刚石优异的物理特性有望满足开关器件对低导通电阻和高击穿电压的应用需求。本研究率先采用(100)晶面的氢终端金刚石制备了耗尽型的共漏极反向串联单片集成结构双向开关MOSFET器件,器件采用100nm厚度的Al2O3介质作为栅介质和钝化层。器件开关比高达109,阈值电压为52.8V。通过短接两个栅极,器件为双向开关工作模式,当偏置电压大于阈值电压时可实现双向电流流动,在双向导通工作模式下分别实现了最大输出电流为180.52mA/mm、170.90mA/mm,导通电阻分别为0.20kΩ·mm、0.23kΩ·mm。双向开关器件的栅漏击穿电压在两个栅电极分别与相邻源电极短路时分别为-358V和366V,击穿场强约为0.22MV/cm,本研究为氢终端金刚石功率器件提供了新的应用示范场景。

     

    Bidirectional switching devices are widely employed in photovoltaic, energy, and electric vehicle applications. The superior physical properties of diamond are expected to fulfill the requirements of switching devices for low on-resistance and high breakdown voltage. In this study, for the first time, a depletion-mode bidirectional switching MOSFET device with a common-drain anti-series monolithically integrated structure was fabricated using hydrogen-terminated diamond with a (100) crystal orientation. The device utilizes a 100nm Al2O3 layer as both the gate dielectric and the passivation layer. The device exhibits an on/off ratio of 109, a threshold voltage of 52.8 V, excellent gate control capability, and ultra low gate leakage current. By short circuiting the two gate electrodes, the device operates in a bidirectional switching mode, enabling bidirectional current flow when the applied bias voltage exceeds the threshold voltage. In the bidirectional conduction mode, the maximum output currents are 180.52 mA/mm and 170.90 mA/mm, and the corresponding on resistances are 0.20 kΩ·mm and 0.23 kΩ·mm, respectively, satisfying the demand for low on resistance in switching devices. When one of the gate electrodes is shorted to the adjacent ohmic contact electrode, voltage regulation allows current flow in only one direction while blocking current in the opposite direction. The gate drain breakdown voltages of the bidirectional switch device are measured as -358 V and 366 V when the two gate electrodes are individually shorted to their respective neighboring source electrodes, with a breakdown electric field of approximately 0.22 MV/cm. With further optimization of the device structure and improvement of the gate dielectric quality, this device shows considerable potential for high voltage applications. This work provides a new application demonstration scenario for hydrogen terminated diamond power devices.

     

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