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中国物理学会期刊

可见光-近红外万量级铪超导动态电感探测器阵列的设计与制备

Design and Fabrication of Optical and Near-Infrared 104-Scale Hafnium Superconducting Kinetic Inductance Detector Array

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  • 超导动态电感探测器(KID)具有低噪声、高灵敏度、单光子分辨能力且容易扩展为大阵列的特点,在天文探测领域得到了广泛研究与初步应用.本文针对可见光-近红外波段,设计、制备并测试了20008像素的超导动态电感探测器阵列.阵列共10条读出线,每条读出线的像素数量约2000个,像素集中排布于直径24 mm的圆形区域内,阵列整体尺寸32 mm×50 mm.设计上,通过仿真频率偏移随不同方向上像素间距的变化,确定阵列的最优空间布局,将像素间频率串扰控制在220 kHz以下,以保障高密度阵列信号读出的完整性与稳定性;通过对阻抗转换网络进行设计与优化,使反射系数S11 < -11 dB,可实现阵列与测试线路间信号的高效传输;此外还设计了微透镜阵列,设计其光斑尺寸与电感尺寸相匹配,用于提升探测器的光吸收率.工艺上,选用高电阻率、低超导转变温度的单质金属铪(Hf)作为超导薄膜材料,采用直流磁控溅射工艺沉积超导薄膜,制备了KID阵列.在20 mK温度下测试了阵列的S21,像素的内部品质因数(Qi)在3×103至80×103之间,并测得Hf薄膜的超导转变温度约为350 mK,展示了可见光-近红外波段万量级高密度KID阵列的潜在可行性.

     

    Superconducting kinetic inductance detectors (KIDs), featuring low noise, high sensitivity, singlephoton energy resolution, and easy scalability to large-format arrays, have been widely studied and preliminarily applied in astronomical detection. This paper designs, fabricates, and characterizes a 20008- pixel superconducting KID array for the optical and near-infrared wavelength band. The array contains 10 readout lines with approximately 2000 pixels per line. The pixels are arranged in a circular area with a diameterof 24 mm, and the overall array size is 32 mm×50 mm. The pixel spatial layout is optimized by simulating the frequency shift as a function of pixel spacing in different directions. It is found that a pixel pitch of 150 μm can reduce the inter-pixel frequency crosstalk below 220 kHz, ensuring the integrity and stability of signal readout for the high-density KID array. By designing and optimizing the impedance transformation network, the simulated reflection coeffcient S11 can be reduced to below -11 dB, enabling effcient signal transmission between the array and the readout circuit. In addition, a microlens array is designed with a focused light spot of diameter below 40 μm, matching the inductive absorber area of 39 μm×39 μm, to improve the optical absorption effciency. 100 nm thick high-resistivity hafnium (Hf) film with low superconducting transition temperature (TC ≈ 350 mK) is preliminarily fabricated using DC magnetron sputtering, and serves as the superconducting film for the KID array. The microwave transmission S21 of the Hf KID array is measured at a base temperature 20 mK, showing internal quality factor (Qi) ranging from 3×103 to 80×103 and higher resonance frequencies than designed values. We discuss the factors that may lead to the decrease in Qi and the resonance frequency away from designed value. These results demonstrate the potential feasibility of high-density KID arrays with number of pixels on the order of 104 for the optical and near-infrared wavelength band.

     

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