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中国物理学会期刊

变势垒甚长波红外量子级联探测器

Variable Barrier Very-Long-Wave infrared Quantum Cascade Detector

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  • 针对现阶段甚长波量子级联探测器仅可在液氦温区工作、工作温度低、应用成本高昂的技术瓶颈,本文设计并制备了一种14 μm波段变势垒量子级联探测器。该器件采用变势垒结构,增强器件吸收强度,在吸收区有效阻挡激发态电子的热泄露,并在抽取区采用双阱耦合能级对激发态电子抽取,提升抽取效率,综合提高器件响应率。最终实现了14微米器件液氮温度下32mA/W的峰值响应率,探测率1.7×109 cmW−1Hz1/2,在外加1.75V的偏压下,器件在液氮温度下的峰值响应率提高到121mA/W,探测率达到2.6×109 cmW−1Hz1/2,成功将14微米量子级联探测器工作温度提升到液氮温度。

     

    To mitigate the high operational cost caused by the liquid-helium cooling requirement for very-long-wave infrared quantum cascade detectors (VLW-QCDs), we propose and demonstrate a variable-barrier VLW-QCD structure. The active region adopts AlGaAs barriers with two different Al compositions: low-Al-content barriers are employed in the absorption region to increase the light absorption efficiency and achieve an optical absorption intensity of 1.55%, while high-Al-content barriers are introduced in the relaxation region to suppress thermally activated leakage of excited-state electrons and raise the device resistance. A coupled double-quantum-well structure is further integrated into the extraction region, raising the carrier extraction efficiency to 35%, which outperforms the 24% of traditional single-well devices.
    Benefiting from the synergistic structural optimization, the fabricated 14 μm device achieves a peak responsivity of 32 mA/W and a detectivity of 1.7×109 cm·W-1·Hz1/2 at liquid nitrogen temperature under zero bias, with the detectivity improved by two orders of magnitude compared with reported counterparts. When a forward bias of 1.75 V is applied, the responsivity is further enhanced to 121 mA/W, with the detectivity reaching 2.6×109 cm·W-1·Hz1/2. This design successfully upgrades the operating temperature of 14 μm VLW-QCD from liquid-helium to liquid-nitrogen temperature, and the device still maintains a responsivity of 2 mA/W at 160 K.

     

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