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中国物理学会期刊

高密度阻变存储器研究进展

Research progress of High-Density Resistive Random-Access Memory

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  • 阻变存储器(RRAM)因其结构简单、CMOS兼容性好及存内计算潜力,成为后摩尔时代高密度存储的重要候选技术。然而,基于1T1R结构的二维RRAM在尺寸微缩过程中受到操作电流需求与晶体管面积之间矛盾的制约,难以进一步提升存储密度。本文系统综述了高密度RRAM的发展,重点分析了二维微缩的关键瓶颈以及向三维集成演进的技术路径。首先,从器件与阵列两个层面阐述了1T1R结构演变与nTmR阵列优化方法,并总结了驱动能力不足、串扰增强及可靠性退化等限制因素。随后,围绕三维RRAM的发展,重点讨论了自选择器件的工作机制与性能需求,比较了金属细丝型、非晶硫化物阈值开关型及绝缘体金属转变型等典型选择管的特点,并分析了自选择存储单元在密度提升方面的优势。在三维阵列架构方面,对水平堆叠、垂直堆叠及基于晶体管的三维结构进行对比,指出垂直堆叠架构在密度扩展方面具有最大潜力。同时,分析了三维阵列中漏电路径、寄生效应与热管理等关键问题及其优化策略。研究表明,选择管性能提升与三维堆叠架构优化是实现超高密度RRAM的关键方向,为新一代非易失存储与智能计算提供重要支撑。

     

    Resistive random access memory (RRAM) has emerged as a promising candidate for high-density data storage in the post-Moore era, owing to its simple structure, excellent CMOS compatibility, and potential for in-memory computing. However, conventional two-dimensional RRAM based on the 1T1R (one-transistor–one-resistor) architecture faces fundamental scaling limitations, mainly due to the trade-off between operating current and transistor footprint, which constrains further density improvement. This paper reviews recent progress in high-density RRAM, focusing on key bottlenecks in two-dimensional scaling and the transition toward three-dimensional integration. The evolution of 1T1R structures and optimization strategies for nTmR array configurations are analyzed at both device and array levels, with attention to challenges including insufficient driving capability, aggravated sneak-path interference, and reliability degradation. Recent progress in three-dimensional RRAM is then discussed, focusing on the switching mechanisms and performance requirements of selector devices. Representative technologies, including metallic filament-based selectors, amorphous chalcogenide threshold switching devices, and insulator-metal transition selectors, are compared. The advantages of self-selective memory cells for density enhancement are also discussed. At the array level, horizontal stacking, vertical stacking, and transistor-based three-dimensional architectures are compared, among which vertical stacking is identified as the most promising approach for ultra-high-density integration. Key issues in three-dimensional arrays, including leakage paths, parasitic effects, and thermal management, are analyzed along with potential solutions. Overall, improving selector performance and optimizing three-dimensional stacking architectures are critical for achieving ultra-high-density RRAM, supporting next-generation non-volatile memory and intelligent computing systems.

     

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