搜索

x
中国物理学会期刊

PVDF/ZnO+ZnO柔性传感与自供电一体化器件设计及其特性研究

Design and Characterization of Integrated Flexible Sensing and Self-Powered Device Based on PVDF/ZnO+ZnO Composite

PDF
导出引用
  • 为解决可穿戴电子设备依赖外接电源、柔性与生物相容性不足以及传统压电薄膜器件输出性能受限、需二次极化等问题,本文开发了一种基于静电纺丝工艺制备ZnO/PVDF复合压电薄膜和磁控溅射工艺制备ZnO电荷传输层的集成柔性传感与自供电一体化器件。借助有限元分析与傅里叶红外光谱等表征手段,系统探究ZnO粒径及质量分数对器件电学性能的影响,并对器件的电学性能进行了测试研究。结果表明,当ZnO粒径为30 nm、质量分数为2 wt%时,PVDF的β相含量达84.93%,双层复合结构器件在9 Hz激励频率下输出性能最优,开路电压5.3 V、短路电流1320 nA,负载电阻8.2 MΩ时具有0.81 μW的最大功率。该器件兼具良好柔性与生物相容性,可精准监测腕关节运动、走路/慢跑/跳跃等动态行为,以及桡动脉脉搏信号,脉搏检测结果与健康成人正常范围吻合。本研究为可穿戴设备提供了高效可靠的自供电传感解决方案,在绿色能量采集与柔性传感领域具有重要应用潜力。

     

    Piezoelectric nanogenerators (PENG) have emerged as promising candidates for self-powered wearable electronics, yet their practical deployment is constrained by insufficient output performance, the need for post-polarization treatment, and limited charge extraction caused by the shielding effect at the electrode–polymer interface. Herein, we report an integrated flexible self-powered sensing device based on a ZnO/PVDF composite piezoelectric nanofiber membrane fabricated via electrospinning, coupled with a ZnO charge transport layer deposited by magnetron sputtering, forming a dual-layer ZnO architecture. Through finite element simulations and systematic experimental characterization, we investigate the influence of ZnO nanoparticle size and loading concentration on β-phase crystallization and piezoelectric output. The results demonstrate that ZnO nanoparticles with a diameter of 30 nm at a loading of 2 wt% yield the highest β-phase fraction of 84.93%, attributable to enhanced interfacial interaction, stronger molecular chain confinement, and more pronounced interfacial polarization effects associated with larger specific surface area. The ZnO charge transport layer, acting as an n-type semiconductor that forms a Schottky junction and built-in electric field with the nickel electrode while simultaneously improving interfacial contact, reducing charge traps, and providing stress buffering, further elevates the open-circuit voltage to 5.3 V and short-circuit current to 1320 nA under 9 Hz excitation, representing improvements of 17.8% and 68.8%, respectively, compared with the single-layer device. A maximum output power of 0.81 μW is achieved at a matched load resistance of 8.2 MΩ. The device successfully charges commercial capacitors and illuminates 9 LEDs, confirming its practical energy harvesting capability. Moreover, the device exhibits excellent flexibility, biocompatibility, and cycling stability over 6300 bending cycles, enabling accurate detection of wrist joint motions, gait patterns, and radial artery pulse signals with characteristic P, T, and D waves. This study delivers a feasible route to fabricate high-performance self-powered wearable sensors. It also possesses great prospects for mechanical energy collection and real-time physiological signal tracking.

     

    目录

    /

    返回文章
    返回