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中国物理学会期刊

多腔耦合波导可调五重Fano共振及传感特性研究

Study on Multi-Cavity Coupled Waveguide Tunable Quintuple Fano Resonance and Sensing Characteristics

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  • 本文提出一种多腔耦合MIM波导结构,与传统对称腔不同,该结构由方形环腔(SRR)、半圆环腔(SSR)和开口半环腔(SSSR)双侧耦合直波导形成非对称构型。基于有限元法对该结构开展中红外波段光传输特性仿真分析,通过优化谐振腔几何尺寸实现了多重Fano共振的选择性调控,并阐明了腔间耦合强度与腔体本征频率的竞争效应是实现模式选择性调制的核心机理。传感性能结果表明,该结构基于多重Fano共振效应具备优异的高灵敏折射率传感特性,其最高灵敏度可达3277.47 nm/RIU,FOM为135.23 RIU-1,Q值可达143.25。在物质浓度检测应用中,该结构可实现葡萄糖与甘油浓度的同步检测,其灵敏度分别为0.39 nm·L/g和0.37 nm·L/g。本研究从理论上验证了多腔耦合MIM波导结构在多重Fano共振激发与多功能集成传感领域的应用潜力。

     

    Fano resonance, originating from destructive and constructive interference between discrete states and a continuum, exhibits unique asymmetric line shapes, ultra-narrow spectral linewidths, and high sensitivity to the refractive index of the surrounding medium, thus showing great potential in high-performance sensors and optical switches. However, achieving selectivity tuning of multiple Fano resonances in a single device remains a key challenge in this field. Here, we propose an asymmetric multi-cavity coupled metal-insulator-metal (MIM) waveguide structure composed of a bus waveguide coupled with a square ring resonator (SRR), a semi-ring resonator (SSR), and a split semi-ring resonator (SSSR). The transmission characteristics of the structure are systematically investigated using the finite-element method. Five Fano resonance peaks are excited in the mid-infrared region (1000–3500 nm) via near-field coupling interference between the discrete states supported by the individual resonators and the continuum provided by the bus waveguide. And relying on the main control parameters corresponding to each structure, selective regulation of multiple resonance modes has been achieved. Among them, the tuning of FR2 by the SSSR radius shows a non-monotonic behavior of first blue shift and then red shift, revealing the competition mechanism between the variation of inter-cavity coupling strength and the intrinsic frequency of the cavity. In sensing applications, the structure achieves a maximum refractive index sensitivity of 3277.474 nm/RIU, a FOM of 135.23 RIU-1 and a Q value of 143.25, which is competitive among reported MIM waveguide structures with multiple Fano resonances. Moreover, exploiting the differential responses of distinct resonance peaks to refractive index variations in different cavities, simultaneous detection of glucose and glycerol solutions is demonstrated in a single device, with concentration sensitivities of 0.39 nm·L/g and 0.37 nm·L/g, respectively. This multi-cavity coupled MIM waveguide structure utilizes the resonance regulation characteristics of multiple Fano to provide a theoretical reference for subsequent high-performance, multi-parameter, and multi-functional integrated sensing experimental research.

     

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