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中国物理学会期刊

铪基FeFET铁电层陷阱对单粒子瞬态的非对称调制机制

Asymmetric Modulation Mechanism of Single-Event Transient Response by Trap Charging Types in the Ferroelectric Layer of HfO2-Based FeFETs

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  • 氧化铪铁电层中的陷阱电荷是影响铪基FeFET辐射可靠性的重要因素。本文通过TCAD仿真,系统揭示了铁电层陷阱电荷对FeFET单粒子效应的调制机制。研究表明,器件对陷阱带电类型表现出显著的非对称响应,施主型缺陷在极化向下时显著抬升初始稳态导通背景,导致单粒子瞬态脉冲表观峰值显著增加;而受主型陷阱对瞬态响应的影响较弱。本工作揭示了“单粒子瞬态脉冲峰值骤增不等于单粒子净收集电荷增加”的物理本质,同时证实,缺陷浓度升高会提升有效缺陷电荷,进而对沟道表面势形成静态调制。此外,瞬态电荷的空间收集主要受局域电场漂移控制,与铁电极化状态的直接关联较弱。本研究确立了“缺陷特征——有效缺陷电荷——导通基线——瞬态脉冲峰值”的静态调制链式机制,为优化铪基FeFET在辐射环境下的单粒子瞬态抗扰能力提供重要参考。

     

    Trap charges in the ferroelectric layer pose a serious threat to the normal operation of HfO2-based ferroelectric field-effect transistors (FeFETs) in radiation environments. In this work, the influence of ferroelectric-layer traps on the single-event transient (SET) characteristics of HfO2-based FeFETs is systematically investigated using a calibrated TCAD simulation model. The effects of trap type, energy level, concentration, and energy-level distribution on the polarization behavior, electrical characteristics, transient current response, and charge collection process are analyzed.
    The results show that the modulation effect of traps strongly depends on the coupling relationship between trap charge polarity and ferroelectric polarization direction. Donor traps produce positively charged centers after ionization, which enhance the local electric field under downward polarization and increase the polarization magnitude, resulting in a negative shift of the transfer characteristics. In contrast, acceptor traps capture electrons and generate negative charges, thereby suppressing the channel potential and shifting the transfer characteristics toward positive gate voltages.
    The single-event transient response exhibits a pronounced asymmetry with respect to trap polarity. Under the downward polarization state, donor traps significantly increase the apparent transient current peak when the trap energy level approaches the middle of the bandgap. The transient peak current increases from approximately 9.5 μA to 23 μA, whereas acceptor traps only produce minor variations. Further analysis indicates that the increase in transient peak current mainly originates from the enhancement of the pre-strike steady-state drain current. Increasing trap concentration or broadening trap energy distribution raises the effective trap charge, which in turn exerts static modulation on the channel surface potential.
    After removing the steady-state current background, the net collected charge is found to be nearly independent of trap parameters. The extracted net charge agrees well with the electron current component, indicating that the SET response is dominated by the rapid drift of electrons driven by the local electric field. Moreover, the collected charge distribution is mainly determined by the geometric relationship between the ion strike location and the source/drain junctions, while the influence of ferroelectric polarization remains relatively weak.
    These results reveal that the influence of ferroelectric-layer traps on SET behavior follows a static modulation mechanism of “trap characteristics–effective trap charge–conduction baseline–transient current peak”. This work provides physical insights into the radiation response of HfO2-based FeFETs and offers important references for optimizing device design to improve single-event transient immunity via defect engineering and bias adjustment.

     

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