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中国物理学会期刊

脉冲激光沉积YBCO超导薄膜的原位多模态监测与小样本学习建模研究

In Situ Multimodal Monitoring and Small-Sample Learning Modeling of Pulsed-Laser-Deposited YBCO Superconducting Thin Films

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  • 脉冲激光沉积(Pulsed Laser Deposition,PLD)制备YBa2Cu3O7-δ(YBCO)高温超导薄膜时,薄膜晶格结构并非仅由预设工艺条件确定,沉积过程中等离子体羽辉演化、温度漂移、腔体真空度波动等动态运行状态,同样会对其产生关键调控作用。针对传统人工记录参数难以表征真实生长过程、材料实验小样本限制数据建模效果的问题,本文构建了面向PLD薄膜生长的原位多模态监测与小样本稳健建模框架。通过激光脉冲同步触发工业相机采集羽辉图像,并利用光学字符识别提取温度与真空度时序信息,获得“工艺参数—温度/真空度时序—羽辉形貌演化”的全过程数据;进一步采用U-Net和语义分割Transformer模型解析羽辉核心区与包络区,提取反映能量密度、空间扩展、形貌稳定性及核心—包络耦合关系的物理引导特征;通过重复随机子抽样稳定特征排序、最小冗余最大相关性约束、高相关过滤和偏最小二乘回归,建立小样本预测模型。以X射线衍射θ-2θ扫描中的(005)峰位作为模型预测目标,留一交叉验证表明,静态生长参数预测能力有限(R2=0.0484) ,引入温度/真空度动态信息后仅小幅提升(R2=0.1043) ;引入羽辉形貌特征后,模型性能显著提高,其中仅使用羽辉形貌特征取得最优性能(R2=0.7193) ,略优于联合使用生长参数、温度/真空度与羽辉形貌特征的模型(R2=0.6872)。消融结果进一步表明,羽辉核心区与包络区具有互补信息,二者空间协调性是预测YBCO薄膜c轴晶格状态的关键。标签随机化检验(p=0.0196)进一步排除了偶然拟合。本研究为PLD薄膜生长过程的原位监测、可解释建模与数据驱动研究提供了一种低成本、可扩展的新路径。

     

    During pulsed laser deposition (PLD) of YBa2Cu3O7-δ (YBCO) superconducting thin films, the lattice state is governed not only by preset process parameters but also by dynamic conditions such as plasma-plume evolution, temperature drift, and chamber-pressure fluctuations. Conventional manually recorded parameters therefore provide an incomplete description of the actual growth process, while the small number of labeled samples available in materials experiments further limits data-driven modeling. Here, we develop an in situ multimodal monitoring and robust small-sample learning framework for PLD-grown YBCO films. Plume images are acquired synchronously with laser pulses, and optical character recognition is used to extract temperature and vacuum-pressure time series, yielding process data that combine nominal parameters, dynamic thermal/vacuum information, and plume morphology. U-Net and SegFormer are employed to segment the high-intensity core and diffuse envelope of the plume, respectively, from which physics-guided descriptors of energy-density distribution, spatial expansion, morphological stability, and core-envelope coupling are constructed. A nested modeling procedure combining repeated random subsampling for stable feature ranking, minimum redundancy-maximum relevance constraints, high-correlation filtering, and partial least-squares regression is then used to predict the X-ray diffraction (005) peak position. Leave-one-out cross-validation shows that static growth parameters have little predictive power (R2=0.0484), and adding temperature/vacuum dynamics yields only a modest improvement. In contrast, plume morphology markedly improves performance: plume features alone give the best result (R2=0.7193), slightly outperforming the combination of all feature groups (R2=0.6872). Ablation analysis indicates that the core and envelope contain complementary information and that their spatial coordination is critical for describing the YBCO c-axis lattice state. A label-randomization test (p=0.0196) further suggests that the observed predictive performance is unlikely to arise from chance fitting. This work provides a low-cost and scalable route for in situ monitoring, interpretable modeling, and data-driven analysis of PLD thin-film growth under small-sample conditions.

     

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