Small angle x-ray scattering (SAXS) method was adopted to investigate the characteristics of growth fractal of two sorts of typical nanoscaled clusters, i.e. g rowing in both ultrafine Ni powders synthesized by chemical reaction and Finemet (Fe73.5Cu1Nb3Si13.5B9) a morphous ribbon by physical crystal lization annealing. The SAXS measurement discloses definitely the existence of d istinct mass multifractal patterns within ultrafine Ni granules and crystallizin g Finemet ribbon. The multifractal spectra of the clusters mentioned above sugge st the occurrence of inhomogeneous distribution of constituent elements and grow th fractal during the formation of those nanoscale clusters. The multifractal sp ectra of ultrafine Ni powders prepared using a variety of procedures take on an obvious difference in shape, indicating the substantial influence of preparation process on diffusion of constituent elements and the growth mechanism of cluste rs. The crystallization annealing processes, however, affect the multifractal sp ectra of Finemet alloy slightly.