搜索

x
中国物理学会期刊

电子回旋共振放电的电离特性PIC/MCC模拟(Ⅱ)——数值模拟与结果讨论

CSTR: 32037.14.aps.55.5935

The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge (Ⅱ)——Numerical simulation and discussion of results

CSTR: 32037.14.aps.55.5935
PDF
导出引用
  • 采用粒子模拟与蒙特卡罗相结合(PIC/MCC)的方法,应用电磁模型,编写了准三维的电子回旋共振(ECR)放电电离过程的模拟程序,得到了ECR放电过程中电子与离子的相空间分布、电磁场分布.通过对这些分布随时间演化的分析,得出ECR加热发生在ω≈ωc0且垂直于轴向的区域;ECR区域,微波能量几乎全部耦合给电子,获得能量的电子通过与中性粒子的电离碰撞产生了大量的带电粒子;随着放电的进行,大量带电粒子通过频繁的碰撞,分布由各向异性逐渐趋于各向同性.

     

    We present a theoretical and computational model to study the ionization of the electron cyclotron resonance (ECR) microwave discharge using a quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision method. The simulation code is original. The detailed information about the distribution of charged particles and electromagnetic fields are obtained. We can conclude that the electrons absorb energy from microwave near the ECR region. Many electrons and ions are created through the ionization collisions between electrons and neutrals. And the distribution of charged particles vary gradually from anisotropic to isotropic by the frequently collisions.

     

    目录

    /

    返回文章
    返回