Mn1-xZnxFe2O4 films were prepared by alternative rf-sputtering from targets of MnFe2O4 and ZnFe2O4. The films were deposited on substrates such as single-crystal Si（100）, oxidized single-crystal Si（100）, single-crystal Si（100） with ZnFe2O4 underlayer and single-crystal MgO（100）. The deposited films are amorphous. After annealing in vacuum furnace at 550℃, the polycrystalline Mn-Zn ferrite crystallizes. The film with composition of Mn0.5 Zn0.5 FeO4 shows better magnetic properties: high magnetization Ms and lower coercivity Hc. The coercivity of the film deposited on MgO（100） substrate is the lowest. In this paper, the influences of substrate on film structure and the magnetic properties are investigated. It is believed that the magneto-elastic anisotropy resulting from stress in films dominates the coercivity of Mn-Zn ferrite films. The grain size may be refined to nanometer scale instrumentally by using suitable substrate; the stronger exchange coupling between grains would lead to a lower magneto-elastic anisotropy by averaging to the grains. Therefore, the soft magnetic properties of Mn-Zn ferrite films are improved.