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本文将磁偏转三级象差的工作推广,使适用于电子束入射处就有磁场的情况,导出一个能在任意平面上求三级偏转象差的公式,并经过数学处理,使公式简洁、换算方便。最后运用这套象差系数就水平一列式电子枪(PI枪)经偏转后所产生的光栅图形进行了分析和探讨。This paper deals with the generalization of the third order aberrations of magnetic deflection to the situation when the electron beam is originally immersed in a magnetic field. The formulae of third order magnetic deflection aberration coefficients in an arbitrary plane have been derived. The formulae are simplified and hence easy for calculation. These aberration coefficients have been applied to analyse the raster patterns produced by the in-line guns.
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