搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

全息光栅曝光系统中空间滤波器孔径与激光束腰关系的选择方法

韩建 巴音贺希格 李文昊

引用本文:
Citation:

全息光栅曝光系统中空间滤波器孔径与激光束腰关系的选择方法

韩建, 巴音贺希格, 李文昊

The ratio choice method of the pinhole aperture to the waist of the Gaussian laser in the fabrication of holographic gratings

Han Jian, Bayanheshig, Li Wen-Hao
PDF
导出引用
  • 在全息光栅制作过程中, 由空气悬浮颗粒及光学器件缺陷引起的散射光会被记录在光刻胶上, 既影响光栅衍射效率, 又会带来光栅杂散光. 为消除系统散射光, 需要对激光光束的高频成分进行滤波处理. 但是, 激光光束通过空间滤波器后发生衍射, 进而影响干涉场质量, 因此选择合适的空间滤波器孔径是搭建全息光栅曝光系统的前提条件. 根据标量衍射积分理论, 通过卷积计算滤波光束的振幅分布分析光束的相位变化, 以光束相位突变位置远离光束中心为依据确定滤波器针孔半径与光束束腰半径的比值下限; 根据滤波光束的能量守恒关系, 通过滤波光束的高斯参数变化描述光束的衍射强弱规律, 以光束发生衍射的临界条件确定滤波器针孔半径与光束束腰半径的比值上限. 结果表明, 当空间滤波器针孔半径与激光束腰半径之比满足1.52 a/02.2时, 滤波光束曝光区域相位恒定, 光束能量通过率大于99%, 在此区间空间滤波器滤波效果最好.
    In the fabrication of the holographic diffraction gratings, the scatter light which is produced by the reflection of the granule in air or the diffraction defect of the optical apparatus will be recorded simultaneously in the resist. Those noises not only reduce the diffraction efficiency of gratings, but also give rise to the scattered light in diffraction. So an appropriate spatial filter should be used to stop the higher spatial frequencies corresponding to the Gaussian beam. Because the diffraction effect after the pinhole aperture can demolish the wavefronts of laser, it is the most important to choose the optimal pinhole for adjusting the waist of the laser. On the basis of standard scalar diffraction theory, the field amplitude is given by the convolution calculation, the phase distortion of diffraction wavefronts is also analyzed, and the lower limit ratio of the aperture size with respect to the beam radius is given when the phase transitions are further away from the center. Using the energy conservation of Gaussian beam and comparing the characteristics change of diffraction beam, the effect of diffraction is presented and the upper limit ratio of the spatial filter is given by the critical condition of the diffraction. The conclusion shows that if the ratio of the aperture radius to beam waist is between 1.52 a/02.2, the phase is invariable in the area of the exposal, and the power transmitting the spatial-filter pinhole aperture is slightly more than 99%, so spatial filter performs its function only in this range of the radio.
    • 基金项目: 国家自然科学基金(批准号: 60478034)、国家科技支撑计划(批准号: 2006BAK03A02)和吉林省科技发展计划(批准号: 20070523, 20086013)资助的课题.
    • Funds: Project supported by the National Natural Science Foundation of China (Grant No. 60478034), the State Key Program of Science and Technology of China (Grant No. 2006BAK03A02), and the Science and Technology Development Program of Jilin Province, China (Grant Nos. 20070523, 20086013).
    [1]

    Chen C G 2003 Ph. D. Dissertation (Cambridge: Massachusetts Institute of Technology)

    [2]

    Konkola P, Chen C G 2000 J. Vac. Sci. Technol. B 18 3282

    [3]

    Jia X M, Xie X L 2006 Chin. J. Laser 33 1220 (in Chinese) [贾雪梅, 谢兴龙 2006 中国激光 33 1220]

    [4]

    Liu H Z, Xu R W 2006 Acta Opt. Sin. 26 131 (in Chinese) [刘宏展, 徐荣伟 2006 光学学报 26 131]

    [5]

    Wang X E 2006 J. Opt. Soc. Am. A 23 872

    [6]

    Wen J J, Breazeale M A 1988 J. Acoust. Soc. Am. 83 1752

    [7]

    Dickson L D 1970 Appl. Opt. 9 1854

    [8]

    Roberts A 1987 J. Opt. Soc. Am. 4 1970

    [9]

    Belland P, Creen J P 1982 Appl. Opt. 21 522

    [10]

    Cerjan C 1994 OSA Proceedings on Extreme Ultraviolet Lithography (Monterey: Optical Society of America) pp19---21

    [11]

    Yu D Y, Tan H Y 2006 Engineering Optics (Beijing: China Machine Press) p166 (in Chinese) [郁道银, 谈恒英 2006 工程光学 (北京: 机械工业出版社) 第166页]

    [12]

    Born M, Wolf E 2009 Principles of Optics (Beijing: Publishing House of Electronics Industry) pp365---370 (in Chinese) [波恩M, 沃耳夫E 2009 光学原理 (中译本) (北京: 电子工业出版社) 第365---370页]

  • [1]

    Chen C G 2003 Ph. D. Dissertation (Cambridge: Massachusetts Institute of Technology)

    [2]

    Konkola P, Chen C G 2000 J. Vac. Sci. Technol. B 18 3282

    [3]

    Jia X M, Xie X L 2006 Chin. J. Laser 33 1220 (in Chinese) [贾雪梅, 谢兴龙 2006 中国激光 33 1220]

    [4]

    Liu H Z, Xu R W 2006 Acta Opt. Sin. 26 131 (in Chinese) [刘宏展, 徐荣伟 2006 光学学报 26 131]

    [5]

    Wang X E 2006 J. Opt. Soc. Am. A 23 872

    [6]

    Wen J J, Breazeale M A 1988 J. Acoust. Soc. Am. 83 1752

    [7]

    Dickson L D 1970 Appl. Opt. 9 1854

    [8]

    Roberts A 1987 J. Opt. Soc. Am. 4 1970

    [9]

    Belland P, Creen J P 1982 Appl. Opt. 21 522

    [10]

    Cerjan C 1994 OSA Proceedings on Extreme Ultraviolet Lithography (Monterey: Optical Society of America) pp19---21

    [11]

    Yu D Y, Tan H Y 2006 Engineering Optics (Beijing: China Machine Press) p166 (in Chinese) [郁道银, 谈恒英 2006 工程光学 (北京: 机械工业出版社) 第166页]

    [12]

    Born M, Wolf E 2009 Principles of Optics (Beijing: Publishing House of Electronics Industry) pp365---370 (in Chinese) [波恩M, 沃耳夫E 2009 光学原理 (中译本) (北京: 电子工业出版社) 第365---370页]

计量
  • 文章访问数:  4933
  • PDF下载量:  783
  • 被引次数: 0
出版历程
  • 收稿日期:  2011-06-20
  • 修回日期:  2012-04-28
  • 刊出日期:  2012-04-20

全息光栅曝光系统中空间滤波器孔径与激光束腰关系的选择方法

  • 1. 中国科学院长春光学精密机械与物理研究所, 长春 130033;
  • 2. 中国科学院研究生院, 北京 100049
    基金项目: 国家自然科学基金(批准号: 60478034)、国家科技支撑计划(批准号: 2006BAK03A02)和吉林省科技发展计划(批准号: 20070523, 20086013)资助的课题.

摘要: 在全息光栅制作过程中, 由空气悬浮颗粒及光学器件缺陷引起的散射光会被记录在光刻胶上, 既影响光栅衍射效率, 又会带来光栅杂散光. 为消除系统散射光, 需要对激光光束的高频成分进行滤波处理. 但是, 激光光束通过空间滤波器后发生衍射, 进而影响干涉场质量, 因此选择合适的空间滤波器孔径是搭建全息光栅曝光系统的前提条件. 根据标量衍射积分理论, 通过卷积计算滤波光束的振幅分布分析光束的相位变化, 以光束相位突变位置远离光束中心为依据确定滤波器针孔半径与光束束腰半径的比值下限; 根据滤波光束的能量守恒关系, 通过滤波光束的高斯参数变化描述光束的衍射强弱规律, 以光束发生衍射的临界条件确定滤波器针孔半径与光束束腰半径的比值上限. 结果表明, 当空间滤波器针孔半径与激光束腰半径之比满足1.52 a/02.2时, 滤波光束曝光区域相位恒定, 光束能量通过率大于99%, 在此区间空间滤波器滤波效果最好.

English Abstract

参考文献 (12)

目录

    /

    返回文章
    返回