氦对铜钨纳米多层膜界面稳定性的影响

刘望; 邬琦琦; 陈顺礼; 朱敬军; 安竹; 汪渊

doi:10.7498/aps.61.176802

摘要

采用射频磁控溅射方法,分别在纯Ar和Ar, He混合气氛下制备了多个不同调制周期的Cu/W纳米多层膜. 利用增强质子背散射(EPBS)、扫描电子显微镜(SEM)、X射线衍射(XRD)分别对Cu/W多层膜中He含量、截面形貌和相结构进行了分析.结果表明:多层膜的界面稳定性是耐氦损伤的前提和保证. 在适当的调制周期下,纳米多层膜能有抑制氦泡成核及长大的能力.

关键词:

Cu/W /
纳米多层膜 /
氦泡 /
界面稳定性

In this paper, Cu/W nanomultilayers with different modulation periods are prepared in pure Ar and mixing atmosphere (He and Ar) by radio frequency magnetron sputtering method. The helium content, cross-section morphology and phase structure of Cu/W nanomultilayer are characterized by EPBS, SEM and XRD, repectively. The results show that the stable interface of the nanomultilayer is the prerequisite for resisting and the guarantee against the damage of helium. The nanomultilayer can suppress the growth of helium bubbles under the appropriate modulation.

Keywords:

作者及机构信息

1.
四川大学原子核科学技术研究所, 教育部辐射物理及技术重点实验室, 成都 610064

基金项目: 国家自然科学基金(批准号: 51171124, 50771069); 四川省科技支撑计划基金(批准号: 2008FZ0002); 教育部新世纪人才基金(批准号: NCET-08-0380)和金属材料强度国家重点实验室开放基金 (批准号: 201011006)资助的课题.

Authors and contacts

1.
Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064, China

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 51171124, 50771069), the Scientific and Technical Supporting Programs of SCST (Grant No. 2008FZ0002), the Program for New Century Excellent Talents in University (Grant No. NCET-08-0380), and the State Key Laboratory for Mechanical Behavior of Materials (Grant No. 201011006).

参考文献

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施引文献

[1]	Chaouadi R, Hirai T, Linke J, Pintsuk G 2009 J. Nucl. Mater. 386-388 544
[2]	Ronchi C, Hiernaut J P 2004 J. Nucl. Mater. 325 5
[3]	Fabritsiev S A, Pokrovsky A S 1988 J. Nucl. Mater. 258-263 1995
[4]	Zhang C H, Chen K Q, Wang Y S, Sun J G 1997 Acta Phys. Sin. 46 1774 (in Chinese) [张崇宏, 陈克勤, 王引书, 孙继光 1997 物理学报 46 1774]
[5]	Fabritsiev S A, Pokrovsky A S 2003 Fusion Eng. Des. 62 551
[6]	Wilson W D, Bisson C L, Baskes M I 1981 Phys. Rev. B 24 5618
[7]	Ullmaier H 1985 J. Nucl. Mater. 133-134 102
[8]	Misra A, Thilly L 2010 MRS Bull. 35 5
[9]	Gilliam S B, Gidcumb S M, Forsythe D, Parikh N R, Hunn J D, Snead L L, Lamaze G P 2005 Nucl. Instrum. Methods Phys. Res. Sect. B 241 493
[10]	Muhlratzer A, Zeilinger H, Esser H G 1984 Nucl. Technol. 66 570
[11]	Zhou X S, Long X G, Zhang L, Peng S M, Luo S Z 2010 J. Nucl. Mater. 396 225
[12]	Chen J C, Pete J 2000 Ceram. Int. 26 514
[13]	Lhuillier P E, Belhabib T, Desgardin P, Courtois B, Sauvage T, Barthe M F, Thomann A L, Brasult P, Tessier Y 2011 J. Nucl. Mater. 416 15
[14]	Sagues A A, Schroeder H, Kesternich W, Ullmaier H 1987 J. Nucl. Mater. 78 293
[15]	Misra A, Demkowicz M J, Zhang X, Hoagland R G 2007 Jom 63
[16]	Fu E G, Misra A, Wang H, Lin S, Zhang X 2010 J. Nucl. Mater. 407 185
[17]	Demkowicz M J, Bellon P, Wirth B D 2010 MRS Bull. 35 2
[18]	Han E H 2011 Acta Metall. Sin. 47 772 (in Chinese) [韩恩厚 2011 金属学报 47 772]
[19]	Zheng S X, Luo S Z, Liu Z Y, Long X G, Wang P L, Peng S M, Liao X D, Liu N 2004 Acta Phys. Sin. 53 557 (in Chinese) [郑思孝, 罗顺忠, 刘仲阳, 龙兴贵, 王培禄, 彭述明, 廖小东, 刘宁 2004 物理学报 53 557]
[20]	Wang J, Zhang B L, Zhou Y L, Hou Q 2011 Acta Phys. Sin. 60 106601 (in Chinese) [汪俊, 张宝玲, 周宇璐, 侯氢 2011 物理学报 60 106601]
[21]	Zhou X S, Long X G, Zhang L, Peng S M, Luo S Z 2010 J. Nucl. Mater. 396 225
[22]	Yang L, Zu X T, Xiao H Y, Gao F, Heinisch H L, Kurtz R J, Wang Z G, Liu K Z 2007 Nucl. Instrum. Methods Phys. Res. Sect. B 255 65
[23]	Demkowicz M J, Bhattacharyya D, Usov I, Wang Y Q, Nastasi M, Misra A 2010 Appl. Phys. Lett. 97 161903
[24]	Yu L H, Dong S R, Xu J H, Li G Y 2008 Acta Phys. Sin. 57 7063 (in Chinese) [喻利花, 董师润, 许俊华, 李戈杨 2008 物理学报 57 7603]

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