The surface potential of the sample was changed by the irradiation of energetic electrons. The energy spectra of varieties of sputtered ion species were measured with different surface potential. It was found that under conventional condition, particularly when there was oxygen enhanced emission, the resonant electron tunneling would not reduce the savival probability of sputtered ions. The energy spectra were also used to investigate the dynamic aspect of the ion emmission. The dynamic parameters indicated that the surface potential which the ion yield depended on was highly localized. In addition, the electron irradiation could be helpful in improving the quatitative analysis of the SIMS even for metals.