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本文提出了一种基于U形波导耦合单微环结构的新型SOI（绝缘体上硅）温度传感器. 温度变化引起感温部位有效折射率和长度变化，导致传感器的输出光谱发生漂移. 根据传输矩阵法和耦合模理论，设计了新型传感器模型，并且分析了感温部位不同时系统输出光谱特性. 结果表明：当U形波导耦合单微环整体结构感温时，输出光谱无伪模，消光比达到31 dB，可作为最佳感温元件. 相比于传统的双直波导耦合单微环结构，当U形波导的两个耦合点间的距离为微环周长的整数倍数时，FSR（自由光谱范围）可加倍至56 nm，灵敏度提高到89.2 pm/℃，测量范围为298720 K，实现了SOI微环谐振器的高温测量.A novel SOI (silicon on insulator) temperature sensor based on a U-shaped waveguide-coupled single micro-ring is proposed in this paper. Refractive index and length of the temperature-sensing part will change as the temperature changes, leading to the shift of the output spectrum of the sensor. The transfer function of the U-shaped waveguide coupled with a single micro-ring is obtained based on the theory of coupling modes and transfer matrix method. And we have studied the output spectrum properties of the system from different temperature-sensing parts. Results show that the whole structure of U-shaped waveguide coupled with the single micro-ring proves to be the best temperature-sensing part as the output spectrum with no spurious modes and a deep extinction ratio of 31 dB. Compared with the traditional two waveguides coupled with a single micro-ring resonator, when the distance between the two coupling points of the U-shaped waveguide is an integer multiple of circumference of the micro-ring, the free spectrum range (FSR) can be expanded to 56 nm, the sensitivity can achieve 89.2 pm/℃, and the measurement range be 298720 K, achieving a high temperature measurement of SOI micro-ring resonator.
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Keywords:
- micro-ring resonator /
- temperature sensor /
- measurement of sensor
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[1] Guo S, Eriksen H, Childress K, Fink A, Hoffman M 2009 Sensors and Actuators A: Physical 154 255
[2] [3] Rouger N, Chrostowski L, Vafaei R 2010 Journal of Lightwave Technology 28 1380
[4] [5] [6] Zhao Y L, Zhao L B, Jiang Z D 2003 Sensors and Actuators A: Physical 108 108
[7] Liu W, Etessam-Yazdani K, Hussin R, Asheghi M 2006 Electron Devices, IEEE Transactions on 53 1868
[8] [9] Ren G H, Chen S W, Cao T T 2012 Acta Phys. Sin. 61 034215 (in Chinese) [任光辉, 陈少武, 曹彤彤 2012 物理学报 61 034215]
[10] [11] Cao T T, Zhang L B, Fei Y G, Cao Y M, Lei X, Chen S W 2013 Acta Phys. Sin. 62 194210 (in Chinese) [曹彤彤, 张利斌, 费永浩, 曹严梅, 雷勋, 陈少武 2013 物理学报 62 194210]
[12] [13] Xiong K, Xiao X, Hu Y T, Li Z Y, Chu T, Yu Y D, Yu J Z 2012 Chin. Phys. B 21 074203
[14] [15] [16] Wu Y, Jia L, Zhang T H, Rao Y J, Gong Y 2012 Optics Communications 285 2218
[17] [18] Bhola B, Steier W H 2007 Sensors Journal IEEE 7 1759
[19] [20] Kim G D, Lee H S, Lee S S, Lim B T Bae H K, Lee W G 2009 Frontiers in Optics, Optical Society of America, October, 2009 FMJ6
[21] [22] Xu D X, Vachon M, Densmore A, Ma R, Janz S, Dela ge A, Fédéli J M 2010 Optics Express 18 22867
[23] [24] Kwon M S, Steier W H 2008 Optics Express 16 9372
[25] [26] Lu Y, Fu X, Chu D, Wen W, Yao J 2011 Optics Communications 284 476
[27] Yu C Q, Zhang Y, Zhang X, Wang K, Yao C, Yuan P, Guan Y 2012 Applied optics 51 8873
[28] [29] [30] Li Z Q, Li X Y, Sun Y C, Li S, Zheng W Y 2012 Acta Optica Sinica 32 0723001 (in Chinese) [李志全, 李晓云, 孙宇超, 李莎, 郑文颖 2012 光学学报 32 0723001]
[31] Feng J B, Li Q Q, Zhou Z P 2011 IEEE Photon. Technol. Lett. 23 79
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